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公开(公告)号:US11841270B1
公开(公告)日:2023-12-12
申请号:US17824614
申请日:2022-05-25
Applicant: VisEra Technologies Company Ltd.
Inventor: Lai-Hung Lai , Hsin-Yi Hsieh , Chin-Chuan Hsieh
CPC classification number: G01J3/2823 , G01J3/0208 , G01J3/18 , G02B6/42 , G02B6/4215 , G02B27/30 , H01L27/14625 , H10K39/32
Abstract: The spectrometer includes a lightguide substrate, an upper grating layer, a lower grating layer, an image sensor, and a readout circuit. The upper grating layer is disposed on the lightguide substrate and configured to receive a light. The upper grating layer includes a first grating structure, a second grating structure, and a third grating structure, and the first, second, and third grating structures have different grating periods. The lightguide substrate is configured to diffract the light when the light propagates into the lightguide substrate, such that multiple diffraction lights are formed and each of the multiple diffraction lights has different wavelengths and different optical path. The lower grating layer is disposed under the lightguide substrate and configured to emit the multiple diffraction lights. The image sensor is disposed under the lower grating layer. The readout circuit is disposed under the image sensor.
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公开(公告)号:US11796390B2
公开(公告)日:2023-10-24
申请号:US17856660
申请日:2022-07-01
Applicant: KLA Corporation
Inventor: Tianhan Wang , Aaron Rosenberg , Dawei Hu , Alexander Kuznetsov , Manh Dang Nguyen , Stilian Pandev , John Lesoine , Qiang Zhao , Liequan Lee , Houssam Chouaib , Ming Di , Torsten R. Kaack , Andrei V. Shchegrov , Zhengquan Tan
CPC classification number: G01J3/18 , G01J3/28 , G01N21/21 , G01N21/25 , G01N21/55 , G01N21/8422 , G01N21/8851 , G01N21/956 , G01J2003/2836 , G01N2021/8883
Abstract: A spectroscopic metrology system includes a spectroscopic metrology tool and a controller. The controller generates a model of a multilayer grating including two or more layers, the model including geometric parameters indicative of a geometry of a test layer of the multilayer grating and dispersion parameters indicative of a dispersion of the test layer. The controller further receives a spectroscopic signal of a fabricated multilayer grating corresponding to the modeled multilayer grating from the spectroscopic metrology tool. The controller further determines values of the one or more parameters of the modeled multilayer grating providing a simulated spectroscopic signal corresponding to the measured spectroscopic signal within a selected tolerance. The controller further predicts a bandgap of the test layer of the fabricated multilayer grating based on the determined values of the one or more parameters of the test layer of the fabricated structure.
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公开(公告)号:US20230324303A1
公开(公告)日:2023-10-12
申请号:US17715862
申请日:2022-04-07
Applicant: Onto Innovation Inc.
Inventor: George Andrew ANTONELLI
CPC classification number: G01N21/65 , G01J3/4412 , G01J3/0208 , G01J3/10 , G02B27/141 , G01J3/0224 , G01J3/18
Abstract: An optical metrology device performs multi-wavelength polarized confocal Raman spectroscopy. The optical metrology device uses a first light source to produce a first light beam with a first wavelength and a second light source to produce a second light beam with a second wavelength. A dichroic beam splitter partially reflects the first light beam and transmits the second light beam to combine the light beams along a same optical axis that is incident on a sample. The dichroic beam splitter directs the Raman response emitted from the sample in response to the first light beam and the second light beam together towards at least one spectrometer and directs the first light beam away from the at least one spectrometer. A chopper may be used to isolate the Raman response to the first and second light beams that is received and spectrally measured by the at least one spectrometer.
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公开(公告)号:US11781909B2
公开(公告)日:2023-10-10
申请号:US17684603
申请日:2022-03-02
Applicant: THERMO ELECTRON SCIENTIFIC INSTRUMENTS LLC
Inventor: Matthew Meyer , Francis Deck
CPC classification number: G01J3/0202 , G01J3/021 , G01J3/0208 , G01J3/0237 , G01J3/18
Abstract: An embodiment of a support structure for adjusting the position of a plurality of optical elements is described that comprises a base plate comprising a centering pin, a first translation slot, and a second translation slot; and a translatable plate configured to operatively couple with a plurality of the optical elements and move relative to the base plate, wherein the translatable plate comprises a centering slot configured to engage with the centering pin, a first cam configured to engage with the first translation slot and control movement of the translatable plate along a first axis, and a second cam configured to engage with the second translation slot and control movement of the translatable plate along a second axis.
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25.
公开(公告)号:US20230314795A1
公开(公告)日:2023-10-05
申请号:US17760583
申请日:2020-12-19
Applicant: SOOCHOW UNIVERSITY
Inventor: Jian BAO , Qiuyang SHEN , Xinhua CHEN , Weimin SHEN
CPC classification number: G02B27/0012 , G01J3/14 , G01J3/18 , G01J3/2823 , G01J2003/1208
Abstract: The invention discloses a design method of a wavenumber linearity dispersion optical system and an imaging spectrometer, including: building an optical system including a grating, a prism and an objective lens that are sequentially arranged, the grating adjoins the prism; defining a linearity evaluation coefficient RMS; assigning a minimum value to the linearity evaluation coefficient RMS through adjustment to the vertex angle of the prism, when the linearity evaluation coefficient RMS is at minimum, the vertex angle of the prism being α1; acquiring compensations for distortion and longitudinal chromatic aberration of the objective lens based on the interval between equal-difference wavenumbers on the image plane when the vertex angle of the prism is α1; and optimizing the objective lens based on the compensations for distortion and longitudinal chromatic aberration of the objective lens to obtain an optimized optical system. Higher wavenumber linearity can be achieved through objective-lens-aberration compensated wavenumber linearity.
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公开(公告)号:US20230314216A1
公开(公告)日:2023-10-05
申请号:US18022719
申请日:2021-10-14
Applicant: Ushio Denki Kabushiki Kaisha
Inventor: Kazuki Shinoyama
IPC: G01J3/10 , G02F1/365 , G01N21/359 , G01J3/18 , G01J3/02
CPC classification number: G01J3/10 , G02F1/365 , G01N21/359 , G01J3/1895 , G01J3/0218 , G01N2201/06113
Abstract: The pulse width of light from a pulsed light source 1 is stretched by a stretching element 2 such that an elapsed time and the wavelength of the light in the pulsed light correspond to each other on a one-to-one basis, and the stretched light radiates to an object S. The output of a light receiver 4 that has received light from the object S is digitized by an AD converter 6 and the digitized signal is supplied to a calculation means 5. A trigger signal generated by a trigger signal generator 7 in response to the rise of the pulsed light is delayed by a trigger delay section 74 and supplied to the AD converter 6 after the completion of a dead time T3.
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27.
公开(公告)号:US11703453B2
公开(公告)日:2023-07-18
申请号:US17407230
申请日:2021-08-20
Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
Inventor: Jerry R. Meyer , Igor Vurgaftman , Chadwick Lawrence Canedy , William W. Bewley , Chul Soo Kim , Charles D. Merritt , Michael V. Warren , R. Joseph Weiblen , Mijin Kim
IPC: G01N21/59 , H01S5/028 , H01S5/10 , H01S5/125 , H01S5/34 , H01S5/343 , H01S5/042 , H01S5/20 , H01S5/02 , H01S5/026 , G02B6/10 , G01N21/27 , G01N21/25 , G01J3/18 , G01J3/28 , H01S5/22 , H01S5/06 , H01S5/062
CPC classification number: G01N21/59 , G01J3/1895 , G01J3/2803 , G01N21/255 , G01N21/27 , G02B6/102 , H01S5/0215 , H01S5/0262 , H01S5/0287 , H01S5/0421 , H01S5/101 , H01S5/125 , H01S5/2063 , H01S5/2206 , H01S5/3402 , H01S5/343 , G01N2201/0612 , H01S5/062 , H01S5/0612
Abstract: Building blocks are provided for on-chip chemical sensors and other highly-compact photonic integrated circuits combining interband or quantum cascade lasers and detectors with passive waveguides and other components integrated on a III-V or silicon. A MWIR or LWIR laser source is evanescently coupled into a passive extended or resonant-cavity waveguide that provides evanescent coupling to a sample gas (or liquid) for spectroscopic chemical sensing. In the case of an ICL, the uppermost layer of this passive waveguide has a relatively high index of refraction that enables it to form the core of the waveguide, while the ambient air, consisting of the sample gas, functions as the top cladding layer. A fraction of the propagating light beam is absorbed by the sample gas if it contains a chemical species having a fingerprint absorption feature within the spectral linewidth of the laser emission.
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公开(公告)号:US20230194344A1
公开(公告)日:2023-06-22
申请号:US18064651
申请日:2022-12-12
Applicant: Thermo Fisher Scientific (Bremen) GmbH
Inventor: Ning Ning Pan
CPC classification number: G01J3/2803 , G01J3/1809 , G01J2003/284 , G01J2003/2859
Abstract: Systems, devices, and methods of analyzing an interfered peak of a sample spectrum is disclosed. The sample spectrum may be generated using a detector of an optical spectrometer. The interfered peak may be produced by a plurality of spectral peaks of different wavelengths. The method may include generating interfered curve parameters representative of the peak shape of each spectral emission in the interfered peak based at least in part on a model of expected curve parameters for the optical spectrometer and a location of the interfered peak on the detector of the optical spectrometer; fitting a plurality of curves to the interfered peak, each curve corresponding to one of the plurality of spectral emissions of different wavelengths forming the interfered peak, wherein each curve is fitted using the interfered curve parameters provided by the model of expected peak parameters; and outputting the plurality of curves for further analysis.
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29.
公开(公告)号:US11678805B2
公开(公告)日:2023-06-20
申请号:US17832340
申请日:2022-06-03
Applicant: Omni Medsci, Inc.
Inventor: Mohammed N. Islam
IPC: A61B5/00 , G01J3/10 , G01J3/28 , G01J3/14 , G01J3/453 , G01J3/42 , G01J3/02 , G01N21/35 , G16H40/67 , G01N21/359 , A61B5/145 , G01N33/15 , G01N33/49 , G01N21/3563 , G01N21/39 , G01N33/02 , G01N33/44 , G01N21/88 , A61B5/1455 , G16Z99/00 , A61C19/04 , G01N21/3504 , H01S3/30 , G01J3/18 , G01J3/12 , G01N21/85 , G01N21/95 , H01S3/067 , H01S3/00 , G01M3/38 , A61C1/00
CPC classification number: A61B5/0088 , A61B5/0013 , A61B5/0022 , A61B5/0075 , A61B5/0086 , A61B5/1455 , A61B5/14532 , A61B5/14546 , A61B5/4547 , A61B5/6801 , A61B5/7203 , A61B5/7257 , A61B5/742 , A61B5/7405 , A61C19/04 , G01J3/02 , G01J3/0218 , G01J3/108 , G01J3/14 , G01J3/28 , G01J3/2823 , G01J3/42 , G01J3/453 , G01N21/35 , G01N21/3504 , G01N21/359 , G01N21/3563 , G01N21/39 , G01N21/88 , G01N33/02 , G01N33/025 , G01N33/15 , G01N33/442 , G01N33/49 , G16H40/67 , G16Z99/00 , A61B5/0024 , A61B2562/0233 , A61B2562/0238 , A61B2562/146 , A61B2576/02 , A61C1/0046 , G01J3/1838 , G01J2003/104 , G01J2003/1208 , G01J2003/2826 , G01M3/38 , G01N21/85 , G01N21/9508 , G01N2021/3513 , G01N2021/3595 , G01N2021/399 , G01N2201/061 , G01N2201/062 , G01N2201/06113 , G01N2201/08 , G01N2201/12 , G01N2201/129 , H01S3/0092 , H01S3/06758 , H01S3/302 , Y02A90/10
Abstract: An active remote sensing system is provided with an array of laser diodes that generate light directed to an object having one or more optical wavelengths that include at least one near-infrared wavelength between 700 nanometers and 2500 nanometers. One of the laser diodes pulses with pulse duration of approximately 0.5 to 2 nanoseconds at repetition rate between one kilohertz and about 100 megahertz. A beam splitter receives the laser light, separates the light into a plurality of spatially separated lights and directs the lights to the object. A detection system includes a photodiode array synchronized to the array of laser diodes and performs a time-of-flight measurement by measuring a temporal distribution of photons received from the object. The time-of-flight measurement is combined with images from a camera system, and the remote sensing system is configured to be coupled to a wearable device, a smart phone or a tablet.
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30.
公开(公告)号:US11619583B2
公开(公告)日:2023-04-04
申请号:US17407246
申请日:2021-08-20
Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
Inventor: Jerry R. Meyer , Igor Vurgaftman , Chadwick Lawrence Canedy , William W. Bewley , Chul Soo Kim , Charles D. Merritt , Michael V. Warren , R. Joseph Weiblen , Mijin Kim
IPC: G01N21/59 , H01S5/028 , H01S5/10 , H01S5/125 , H01S5/34 , H01S5/343 , H01S5/042 , H01S5/20 , H01S5/02 , H01S5/026 , G02B6/10 , G01N21/27 , G01N21/25 , G01J3/18 , G01J3/28 , H01S5/22 , H01S5/06 , H01S5/062
Abstract: Building blocks are provided for on-chip chemical sensors and other highly-compact photonic integrated circuits combining interband or quantum cascade lasers and detectors with passive waveguides and other components integrated on a III-V or silicon. A MWIR or LWIR laser source is evanescently coupled into a passive extended or resonant-cavity waveguide that provides evanescent coupling to a sample gas (or liquid) for spectroscopic chemical sensing. In the case of an ICL, the uppermost layer of this passive waveguide has a relatively high index of refraction that enables it to form the core of the waveguide, while the ambient air, consisting of the sample gas, functions as the top cladding layer. A fraction of the propagating light beam is absorbed by the sample gas if it contains a chemical species having a fingerprint absorption feature within the spectral linewidth of the laser emission.
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