VARIABLE RESISTANCE NON-VOLATILE MEMORY
    28.
    发明公开

    公开(公告)号:US20240049479A1

    公开(公告)日:2024-02-08

    申请号:US18177064

    申请日:2023-03-01

    CPC classification number: H10B63/845 H10B63/34 H10B61/22

    Abstract: A variable resistance non-volatile memory includes a memory cell including a core portion extending in a first direction above a semiconductor substrate, a variable resistance layer extending in a first direction and in contact with the core portion, a semiconductor layer extending in a first direction and in contact with the variable resistance layer, an insulator layer extending in a first direction and in contact with the semiconductor layer, and a first voltage application electrode extending in a second direction crossing the first direction and in contact with the insulator layer. An impurity concentration of the semiconductor layer is non-uniform, such that an impurity concentration of a first portion of the semiconductor layer in contact with the insulator layer is at least ten times higher than an impurity concentration of a second portion of the semiconductor layer in contact with the variable resistance layer.

    SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20240049465A1

    公开(公告)日:2024-02-08

    申请号:US18101530

    申请日:2023-01-25

    Applicant: SK hynix Inc.

    Inventor: In Ku KANG

    CPC classification number: H10B43/27 H10B41/27 H10B63/34

    Abstract: Provided herein are a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a gate stacked body including a plurality of interlayer insulating layers and a plurality of conductive layers that are alternately stacked, wherein a top-most conductive layer, among the plurality of conductive layers, corresponds to a backgate line and the rest of the plurality of conductive layers correspond to word lines, and a vertical channel structure passing through the gate stacked body. A first part of the vertical channel structure passing through the plurality of interlayer insulating layers and the plurality of conductive layers corresponding to the word lines has a circular structure in a plan view, and a second part of the vertical channel structure passing through the conductive layer corresponding to the backgate line has a pair of semicircular structures that are separated from each other in a plan view.

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