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    Device for measuring very small electric currents
    261.
    发明授权
    Device for measuring very small electric currents 失效
    用于测量非常小的电流的装置

    公开(公告)号：US3839674A

    公开(公告)日：1974-10-01

    申请号：US36754573

    申请日：1973-06-06

    Applicant: PHILIPS CORP

    Inventor： BROUWER G

    IPC: G01R19/00 ,  H01J37/05 ,  H01J43/30 ,  G01R1/30 ,  G01R19/26

    CPC classification number: G01R19/0023 ,  H01J37/05 ,  H01J43/30

    Abstract: Apparatus for measuring an electric current of the order of magnitude of 10 13 amps and smaller which comprises an evacuated envelope having a cathode and a control electrode for converting the current into a flow of distinct electrons proportional to the current, and an electron multiplier and anode for converting each distinct electron into a pulse for measurement. The apparatus may also have a positive feedback circuit to increase the speed of response.

    Abstract translation: 用于测量10ns或更小的数量级的电流的装置，其包括具有阴极的抽真空的外壳和用于将电流转换成与电流成比例的不同电子流的控制电极，以及电子 乘法器和阳极，用于将每个不同的电子转换成用于测量的脉冲。 该装置还可以具有正反馈电路以增加响应速度。

    Mass dependent ion microscope having an array of small mass filters
    262.
    发明授权
    Mass dependent ion microscope having an array of small mass filters 失效
    具有小型过滤器阵列的大量依赖离子显微镜

    公开(公告)号：US3819941A

    公开(公告)日：1974-06-25

    申请号：US40643673

    申请日：1973-10-15

    Applicant: BENDIX CORP

    Inventor： CARRICO J

    IPC: G01Q30/16 ,  G01Q30/20 ,  H01J37/05 ,  H01J37/285 ,  H01J49/42 ,  H01J37/26

    CPC classification number: H01J37/285 ,  H01J37/05 ,  H01J49/0004 ,  H01J49/009 ,  H01J49/4215

    Abstract: A mass dependent ion microscope having an array of very small mass filters, interposed between the source of an ion image and an image transducer for transmitting on a point-for-point basis only ions of a predetermined mass-to-charge ratio, is described. The point-for-point transmission by the mass filter array preserves the image information of the original ion image and permits the filtered ion image to be visually observed on a phosphor screen or otherwise detected. The individual filter elements of the array may be either of the monopole or quadrupole structure fabricated from glass.

    Electron microscope comprising a velocity filter system
    263.
    发明授权
    Electron microscope comprising a velocity filter system 失效
    包含速度滤波系统的电子显微镜

    公开(公告)号：US3624393A

    公开(公告)日：1971-11-30

    申请号：US3624393D

    申请日：1970-07-13

    Applicant: SOPELEM

    Inventor： TORQUEBIAU EMILE

    IPC: H01J37/26 ,  G01Q20/02 ,  G01Q30/02 ,  H01J37/05 ,  H01J37/12 ,  H01J37/14

    CPC classification number: H01J37/05

    Abstract: In an electron microscope having a velocity filtering system involving reflection in a prism, the normal objective lens is replaced by a complex lens comprising three electrostatic lens elements. This arrangement enables the order of image and diffraction diagram in the propagation path to be reversed, so that the diffraction diagram can be filtered as well as the image.

    Atom probe field microscope having means for separating the ions according to mass
    264.
    发明授权
    Atom probe field microscope having means for separating the ions according to mass 失效
    具有根据质量分离离子的手段的原子探针场显微镜

    公开(公告)号：US3602710A

    公开(公告)日：1971-08-31

    申请号：US3602710D

    申请日：1969-05-07

    Applicant: RESEARCH CORP

    Inventor： MUELLER ERWIN W

    IPC: G01Q30/12 ,  G01Q80/00 ,  H01J37/05 ,  H01J37/285 ,  H01J49/30 ,  H01J39/34

    CPC classification number: H01J49/30 ,  H01J37/05 ,  H01J37/285

    Abstract: A field ion microscope capable of isolating and analyzing one or a few atoms of a specimen comprises a field ion microscope section including an emitter tip mounting the specimen to be examined, an apertured screen in the path of the beam of ions emitted by the specimen and means for adjusting the path traversed by the ion beam with respect to the aperture in the screen to cause a selected area of the beam to pass through the aperture and an ion detector positioned in the path of ions passing through the aperture. The path of the ion beam emitted by the specimen by the application of a high voltage may be altered by beam-deflecting means adjacent the beam path or by varying the angular disposition of the emitter tip with respect to the image screen, or the beam may be allowed to drift through a long tube and measured in its time-of-flight in each case using a detector of single particle sensitivity.

    Electron Spectrometer and Analytical Method
    268.
    发明公开
    Electron Spectrometer and Analytical Method 审中-公开

    公开(公告)号：US20230411113A1

    公开(公告)日：2023-12-21

    申请号：US18210169

    申请日：2023-06-15

    Applicant: JEOL Ltd.

    Inventor： Tatsuya Uchida ,  Terutaka Shimojima

    IPC: H01J37/244 ,  H01J37/05 ,  H01J37/28

    CPC classification number: H01J37/244 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/24485

    Abstract: An electron spectrometer is provided which can collect spectra in a reduced measurement time. The electron spectrometer includes an electron analyzer for providing energy dispersion of electrons emitted from a sample (S), a detector having a plurality of detection elements juxtaposed and arranged in the direction of energy dispersion of the dispersed electrons, and a processor. The processor operates (i) to sweep a measurement energy in first incremental energy steps (ΔE1) within the analyzer, to detect the dispersed electrons with the detection elements, and to obtain a plurality of resulting first spectra; (ii) to interpolate points of measurement in each of the first spectra; and (iii) to generate a spectral chart in second incremental energy steps (ΔE2) smaller than the first incremental energy steps (ΔE1) on the basis of the first spectra for which the points of measurement have been interpolated.

    Mismatched optics for angular control of extracted ion beam
    269.
    发明授权
    Mismatched optics for angular control of extracted ion beam 有权

    公开(公告)号：US11651932B1

    公开(公告)日：2023-05-16

    申请号：US17510996

    申请日：2021-10-26

    Applicant: Applied Materials, Inc.

    Inventor： Alexandre Likhanskii ,  Jay T. Scheuer ,  Sudhakar Mahalingam ,  Nevin Clay

    IPC: H01J37/08 ,  H01J37/05 ,  H01J37/317

    CPC classification number: H01J37/08 ,  H01J37/05 ,  H01J37/3171

    Abstract: An ion source capable of extracting a ribbon ion beam with improved vertical angular uniformity is disclosed. The extraction plate and extraction optics are designed such that there is at least one non-uniform gap between adjacent components. A non-uniform gap may be effective in reducing angular spread non-uniformity of the extracted ribbon ion beam. Specifically, for a given gap in the Z direction, ions extracted from regions with lower plasma density may have more vertical angular spread. A larger gap in the Z direction between components in this region may make the vertical angular spread closer to the vertical angular spread of ions extracted from regions with higher plasma density. The non-uniform gap may be created by having an extraction plate that is flat or curved and electrodes that are flat, convex or concave. In certain embodiments, the non-uniform gap is located between the extraction plate and the suppression electrode.

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