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公开(公告)号：US10971324B2
公开(公告)日：2021-04-06
申请号：US15909482
申请日：2018-03-01
发明人： Joseph Khoury , Sean R. Kirkpatrick , Michael J. Walsh , James G. Bachand , Allen R. Kirkpatrick
IPC分类号： H01J37/05 , H05H3/02 , H01J37/317 , H01J37/147 , H05H5/04
摘要： A device such as a medical device and a method for making same provides a surface modified by beam irradiation, such as a gas cluster ion beams or a neutral beam, to inhibit or delay attachment or activation or clotting of platelets.
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公开(公告)号：US10858732B2
公开(公告)日：2020-12-08
申请号：US16273037
申请日：2019-02-11
IPC分类号： C23C14/00 , C23C14/58 , H01J37/32 , G02B1/12 , G02B1/02 , H01J37/05 , H01J37/317 , H01J37/147
摘要： A method for Neutral Beam irradiation derived from gas cluster ion beams and articles produced thereby including optical elements.
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3.发明授权公开(公告)号：US09799488B2
公开(公告)日：2017-10-24
申请号：US14571533
申请日：2014-12-16
IPC分类号： H01J37/05 , H01J37/317 , H01J37/08 , H01J37/147
CPC分类号： H01J37/3171 , C03C23/005 , C03C2204/08 , H01J37/05 , H01J37/08 , H01J37/147 , H01J37/317 , H01J2237/0041 , H01J2237/0812 , H01J2237/15 , H01J2237/31701 , H01L21/02115 , H01L21/02238 , H01L21/02274 , H01L21/26506 , H01L21/26513 , H01L21/26566 , H01L21/31105 , H01L21/31116 , H01L21/32115 , H01L29/36 , H01M4/04 , H01M10/04 , H01M10/0585 , H01M2004/021 , Y10T428/24355 , Y10T428/24479 , Y10T428/30
摘要： A method of improving the surface of an object treats the surface with a neutral beam formed from a gas cluster ion mean to create a surface texture and/or increase surface area.
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公开(公告)号：US11735432B2
公开(公告)日：2023-08-22
申请号：US17225272
申请日：2021-04-08
发明人： Sean R. Kirkpatrick , Kiet A. Chau , Thy Yam , Michael J. Walsh
IPC分类号： H01L21/311 , C03C15/02 , H01L21/306 , H01L21/3213 , H01L21/02 , H01L21/3065 , H01L21/3105 , C03C15/00 , H01L21/265 , H01L21/308
CPC分类号： H01L21/32134 , C03C15/00 , C03C15/025 , H01L21/0234 , H01L21/02115 , H01L21/02167 , H01L21/02227 , H01L21/02238 , H01L21/02252 , H01L21/02274 , H01L21/02326 , H01L21/26566 , H01L21/3065 , H01L21/3086 , H01L21/30604 , H01L21/3105 , H01L21/31105 , H01L21/31111 , H01L21/31116 , H01J2237/061 , H01J2237/0812
摘要： A method for removing amorphous regions from a surface of a crystal substrate uses an accelerated neutral beam including reactive gas species for removing or reactively modifying material surfaces without sputtering. Accelerated neutral atom beam enabled surface reactions remove surface contaminants from substrate surfaces to create an interface region with exposed crystal lattice in preparation for next phase processing.
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公开(公告)号：US20210405523A1
公开(公告)日：2021-12-30
申请号：US17222467
申请日：2021-04-05
发明人： Joseph Khoury , Sean R. Kirkpatrick , Michael J. Walsh , James G. Bachand , Allen R. Kirkpatrick , Thomas J. Webster
IPC分类号： G03F1/80 , H05H3/02 , H01J37/317 , H01L21/02 , H01L21/265 , H01L21/311 , H01J37/05 , H01J37/147 , G03F1/82
摘要： A device such as a medical device and a method for making same provides a device surfaces modified by beam irradiation, such as a gas cluster ion beams or a neutral beam, to inhibit or delay attachment or activation or clotting of platelets or to match surface energy of the device to that of a protein with the property of inhibition of bacterial colonization that can coat the all or part of the device surface to effect such inhibition.
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公开(公告)号：US20210225661A1
公开(公告)日：2021-07-22
申请号：US17225272
申请日：2021-04-08
发明人： Sean R. Kirkpatrick , Kiet A. Chau , Thy Yam , Michael J. Walsh
IPC分类号： H01L21/3213 , H01L21/02 , H01L21/306 , H01L21/3065 , H01L21/311 , H01L21/3105 , C03C15/00 , H01L21/265 , H01L21/308 , C03C15/02
摘要： A method for removing amorphous regions from a surface of a crystal substrate uses an accelerated neutral beam including reactive gas species for removing or reactively modifying material surfaces without sputtering. Accelerated neutral atom beam enabled surface reactions remove surface contaminants from substrate surfaces to create an interface region with exposed crystal lattice in preparation for next phase processing.
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公开(公告)号：US10825685B2
公开(公告)日：2020-11-03
申请号：US16246634
申请日：2019-01-14
IPC分类号： H01J37/05 , H01L21/02 , H01L21/265 , H01L21/311 , H01L21/321 , C03C23/00 , H01J37/08 , H01J37/317 , H01J37/147 , H01L29/167 , H01L29/36 , H01L21/324
摘要： A method for treating a silicon substrate, and a silicon substrate, provide a surface treated with an accelerated neutral beam.
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8.发明申请公开(公告)号：US20190279872A1
公开(公告)日：2019-09-12
申请号：US16246634
申请日：2019-01-14
IPC分类号： H01L21/265 , H01L29/167 , H01J37/05 , H01L21/02 , H01L21/311 , H01L21/321 , C03C23/00 , H01J37/08 , H01J37/317 , H01J37/147
摘要： A method for treating a silicon substrate, and a silicon substrate, provide a surface treated with an accelerated neutral beam.
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公开(公告)号：US20180190468A1
公开(公告)日：2018-07-05
申请号：US15909482
申请日：2018-03-01
发明人： Joseph Khoury , Sean R. Kirkpatrick , Michael J. Walsh , James G. Bachand , Allen R. Kirkpatrick
IPC分类号： H01J37/05 , H05H3/02 , H01J37/317 , H01J37/147
CPC分类号： H01J37/05 , H01J37/147 , H01J37/317 , H01J37/3171 , H01J2237/0041 , H01J2237/0812 , H01J2237/15 , H05H3/02 , H05H5/04 , Y10T428/24355 , Y10T428/24479 , Y10T428/30
摘要： A device such as a medical device and a method for making same provides a surface modified by beam irradiation, such as a gas cluster ion beams or a neutral beam, to inhibit or delay attachment or activation or clotting of platelets.
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10.发明申请公开(公告)号：US20190185991A1
公开(公告)日：2019-06-20
申请号：US16273037
申请日：2019-02-11
CPC分类号： C23C14/5833 , G02B1/02 , G02B1/12 , H01J37/05 , H01J37/147 , H01J37/3171 , H01J37/32816 , H01J2237/0041 , H01J2237/0812 , H01J2237/15 , Y10T428/30
摘要： A method for Neutral Beam irradiation derived from gas cluster ion beams and articles produced thereby including optical elements.
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