公开(公告)号：US10858732B2

公开(公告)日：2020-12-08

申请号：US16273037

申请日：2019-02-11

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick ,  Michael J. Walsh

IPC: C23C14/00 ,  C23C14/58 ,  H01J37/32 ,  G02B1/12 ,  G02B1/02 ,  H01J37/05 ,  H01J37/317 ,  H01J37/147

Abstract: A method for Neutral Beam irradiation derived from gas cluster ion beams and articles produced thereby including optical elements.

公开(公告)号：US09799488B2

公开(公告)日：2017-10-24

申请号：US14571533

申请日：2014-12-16

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick ,  Michael J. Walsh ,  Richard C. Svrluga

IPC: H01J37/05 ,  H01J37/317 ,  H01J37/08 ,  H01J37/147

CPC classification number: H01J37/3171 ,  C03C23/005 ,  C03C2204/08 ,  H01J37/05 ,  H01J37/08 ,  H01J37/147 ,  H01J37/317 ,  H01J2237/0041 ,  H01J2237/0812 ,  H01J2237/15 ,  H01J2237/31701 ,  H01L21/02115 ,  H01L21/02238 ,  H01L21/02274 ,  H01L21/26506 ,  H01L21/26513 ,  H01L21/26566 ,  H01L21/31105 ,  H01L21/31116 ,  H01L21/32115 ,  H01L29/36 ,  H01M4/04 ,  H01M10/04 ,  H01M10/0585 ,  H01M2004/021 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/30

Abstract: A method of improving the surface of an object treats the surface with a neutral beam formed from a gas cluster ion mean to create a surface texture and/or increase surface area.

公开(公告)号：US20200083048A1

公开(公告)日：2020-03-12

申请号：US16566649

申请日：2019-09-10

Applicant: Exogenesis Corporation

Inventor： Allen R. Kirkpatrick

IPC: H01L21/263 ,  H01J37/147 ,  H01J37/305

Abstract: An improved ANAB system or process substantially or fully eliminating contaminant particles from reaching a beam target by adding to the usual primary (first) ionizer of the ANAB system or process an additional (second) ionizer to ionize contaminant particles and means to block or retard the ionized particles to prevent their reaching the beam target.

公开(公告)号：US20190185991A1

公开(公告)日：2019-06-20

申请号：US16273037

申请日：2019-02-11

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick ,  Michael J. Walsh

IPC: C23C14/58 ,  H01J37/05 ,  G02B1/12 ,  G02B1/02 ,  H01J37/32 ,  H01J37/317

CPC classification number: C23C14/5833 ,  G02B1/02 ,  G02B1/12 ,  H01J37/05 ,  H01J37/147 ,  H01J37/3171 ,  H01J37/32816 ,  H01J2237/0041 ,  H01J2237/0812 ,  H01J2237/15 ,  Y10T428/30

Abstract: A method for Neutral Beam irradiation derived from gas cluster ion beams and articles produced thereby including optical elements.

公开(公告)号：US20150213996A1

公开(公告)日：2015-07-30

申请号：US14496412

申请日：2014-09-25

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick

IPC: H01J37/05 ,  H01J37/317

CPC classification number: G03F1/80 ,  B24B37/04 ,  G03F1/82 ,  H01J37/05 ,  H01J37/147 ,  H01J37/317 ,  H01J37/3171 ,  H01J2237/0041 ,  H01J2237/0812 ,  H01J2237/15 ,  H01L21/02115 ,  H01L21/02274 ,  H01L21/26506 ,  H01L21/26513 ,  H01L21/26566 ,  H01L21/31105 ,  H01L21/31111 ,  H01L29/36 ,  H05H3/02 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/30

Abstract: An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.

Abstract translation: 其装置，方法和产品提供从用于加工材料的加速气体簇离子束衍生的加速中性束。

公开(公告)号：US20210405523A1

公开(公告)日：2021-12-30

申请号：US17222467

申请日：2021-04-05

Applicant: Exogenesis Corporation

Inventor： Joseph Khoury ,  Sean R. Kirkpatrick ,  Michael J. Walsh ,  James G. Bachand ,  Allen R. Kirkpatrick ,  Thomas J. Webster

IPC: G03F1/80 ,  H05H3/02 ,  H01J37/317 ,  H01L21/02 ,  H01L21/265 ,  H01L21/311 ,  H01J37/05 ,  H01J37/147 ,  G03F1/82

Abstract: A device such as a medical device and a method for making same provides a device surfaces modified by beam irradiation, such as a gas cluster ion beams or a neutral beam, to inhibit or delay attachment or activation or clotting of platelets or to match surface energy of the device to that of a protein with the property of inhibition of bacterial colonization that can coat the all or part of the device surface to effect such inhibition.

公开(公告)号：US10825685B2

公开(公告)日：2020-11-03

申请号：US16246634

申请日：2019-01-14

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick ,  Michael J. Walsh ,  Richard C. Svrluga

IPC: H01J37/05 ,  H01L21/02 ,  H01L21/265 ,  H01L21/311 ,  H01L21/321 ,  C03C23/00 ,  H01J37/08 ,  H01J37/317 ,  H01J37/147 ,  H01L29/167 ,  H01L29/36 ,  H01L21/324

Abstract: A method for treating a silicon substrate, and a silicon substrate, provide a surface treated with an accelerated neutral beam.

公开(公告)号：US20190279872A1

公开(公告)日：2019-09-12

申请号：US16246634

申请日：2019-01-14

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick ,  Michael J. Walsh ,  Richard C. Svrluga

IPC: H01L21/265 ,  H01L29/167 ,  H01J37/05 ,  H01L21/02 ,  H01L21/311 ,  H01L21/321 ,  C03C23/00 ,  H01J37/08 ,  H01J37/317 ,  H01J37/147

Abstract: A method for treating a silicon substrate, and a silicon substrate, provide a surface treated with an accelerated neutral beam.

公开(公告)号：US10409155B2

公开(公告)日：2019-09-10

申请号：US14496412

申请日：2014-09-25

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick

IPC: H01J37/05 ,  G03F1/80 ,  H01J37/317 ,  H01J37/147 ,  H05H3/02 ,  G03F1/82 ,  H01L21/02 ,  H01L21/265 ,  H01L21/311 ,  B24B37/04 ,  H01L29/36

Abstract: An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.

公开(公告)号：US20180190468A1

公开(公告)日：2018-07-05

申请号：US15909482

申请日：2018-03-01

Applicant: Exogenesis Corporation

Inventor： Joseph Khoury ,  Sean R. Kirkpatrick ,  Michael J. Walsh ,  James G. Bachand ,  Allen R. Kirkpatrick

IPC: H01J37/05 ,  H05H3/02 ,  H01J37/317 ,  H01J37/147

CPC classification number: H01J37/05 ,  H01J37/147 ,  H01J37/317 ,  H01J37/3171 ,  H01J2237/0041 ,  H01J2237/0812 ,  H01J2237/15 ,  H05H3/02 ,  H05H5/04 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/30

Abstract: A device such as a medical device and a method for making same provides a surface modified by beam irradiation, such as a gas cluster ion beams or a neutral beam, to inhibit or delay attachment or activation or clotting of platelets.