公开(公告)号：US20230411113A1

公开(公告)日：2023-12-21

申请号：US18210169

申请日：2023-06-15

Applicant: JEOL Ltd.

Inventor： Tatsuya Uchida ,  Terutaka Shimojima

IPC: H01J37/244 ,  H01J37/05 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/24485

Abstract: An electron spectrometer is provided which can collect spectra in a reduced measurement time. The electron spectrometer includes an electron analyzer for providing energy dispersion of electrons emitted from a sample (S), a detector having a plurality of detection elements juxtaposed and arranged in the direction of energy dispersion of the dispersed electrons, and a processor. The processor operates (i) to sweep a measurement energy in first incremental energy steps (ΔE1) within the analyzer, to detect the dispersed electrons with the detection elements, and to obtain a plurality of resulting first spectra; (ii) to interpolate points of measurement in each of the first spectra; and (iii) to generate a spectral chart in second incremental energy steps (ΔE2) smaller than the first incremental energy steps (ΔE1) on the basis of the first spectra for which the points of measurement have been interpolated.