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公开(公告)号：US20180019098A1
公开(公告)日：2018-01-18
申请号：US15648757
申请日：2017-07-13
Applicant: FEI Company
Inventor： Eric Gerardus Theodoor Bosch , Bart Jozef Janssen
IPC: H01J37/22 , H01J37/20 , H01J37/244
CPC classification number: H01J37/222 , H01J37/20 , H01J37/228 , H01J37/244 , H01J37/28 , H01J2237/226 , H01J2237/2614
Abstract: A method of imaging a specimen using ptychography includes directing a charged-particle beam from a source through an illuminator so as to traverse the specimen and land upon a detector, detecting a flux of radiation emanating from the specimen with the detector, calculating at least one property of a charged-particle wavefront exiting the specimen based on using an output of the detector in combination with applying a mathematical reconstruction technique, wherein the at least one property comprises a phase of the wavefront, and wherein applying the mathematical construction technique comprises directly reconstructing the phase of the wavefront to determine a reconstructed phase of the wavefront. An associated apparatus is also described.
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公开(公告)号：US09865428B2
公开(公告)日：2018-01-09
申请号：US15218385
申请日：2016-07-25
Applicant: FEI Company
Inventor： Herve-William Remigy
CPC classification number: H01J37/26 , F25B19/005 , F25D3/10 , G01N1/2813 , G01N1/42 , H01J37/20 , H01J37/244 , H01J2237/002
Abstract: A method of preparing a sample for study in a charged-particle microscope, whereby the sample is subjected to rapid cooling using a cryogen, comprising the following steps: Providing two conduits for transporting cryogenic fluid, each of which conduits opens out into a mouthpiece, which mouthpieces are arranged to face each other across an intervening gap; Placing the sample in said gap; Pumping cryogenic fluid through said conduits so as to concurrently flush from said mouthpieces, thereby suddenly immersing the sample in cryogenic fluid from two opposite sides.
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公开(公告)号：US09865427B2
公开(公告)日：2018-01-09
申请号：US14704453
申请日：2015-05-05
Applicant: FEI COMPANY
Inventor： Martinus Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
IPC: H01J37/26 , H01J37/18 , H01J37/21 , H01J37/302 , H01J37/16 , H01J37/20 , H01J37/22 , H01J37/244 , H01J37/28
CPC classification number: H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.
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公开(公告)号：US09812286B2
公开(公告)日：2017-11-07
申请号：US14978180
申请日：2015-12-22
Applicant: FEI Company
Inventor： David H. Narum , Milos Toth , Steven Randolph , Aurelien Philippe Jean Maclou Botman
IPC: C25D17/10 , C25D5/02 , H01J37/20 , C25D5/04 , C25D5/00 , C25D17/00 , C25D17/12 , C25D21/04 , C25D21/12 , H01J37/18 , H01J37/22 , H01J37/28
CPC classification number: H01J37/20 , C25D5/003 , C25D5/02 , C25D5/026 , C25D5/04 , C25D17/005 , C25D17/10 , C25D17/12 , C25D21/04 , C25D21/12 , H01J37/18 , H01J37/222 , H01J37/28 , H01J2237/182 , H01J2237/2003 , H01J2237/202 , H01J2237/2801
Abstract: A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber.
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公开(公告)号：US20170309441A1
公开(公告)日：2017-10-26
申请号：US15135205
申请日：2016-04-21
Applicant: FEI Company
Inventor： John F. Flanagan, IV
CPC classification number: H01J37/20 , H01J37/261 , H01J37/265 , H01J2237/1501 , H01J2237/202 , H01J2237/2826
Abstract: A method and apparatus are provided for aligning a sample in a charged particle beam system. The charged particle beam is directed toward the sample to obtain a sample diffraction pattern. The sample diffraction pattern is compared with reference diffraction patterns having known misalignments to determine which reference pattern most closely matches the sample pattern. The known alignment of the best-matching reference diffraction pattern is used to correct the tilt of the sample. The “patterns” compared can be lists of bright spots with corresponding intensities rather than images.
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Patent Agency Ranking
公开(公告)号：US09778377B2
公开(公告)日：2017-10-03
申请号：US15072929
申请日：2016-03-17
Applicant: FEI Company
IPC: H01J37/244 , H01J37/28 , G01T1/20 , H01L31/107 , H04N5/32 , H01L27/146 , H01L27/148
CPC classification number: G01T1/2006 , H01J37/244 , H01J37/28 , H01J2237/057 , H01J2237/24485 , H01J2237/2802 , H01J2237/2804 , H01L27/14643 , H01L27/148 , H01L31/107 , H04N5/32
Abstract: A Transmission Charged-Particle Microscope comprises a source of charged particles which are then directed by an illuminator onto a specimen supported by a specimen holder. Charged particles transmitted through the specimen may undergo energy loss with a distribution of losses providing information about the specimen. A dispersing device disperses the transmitted charged particles into an energy-resolved array of spectral sub-beams distributed along a dispersion direction. The dispersed charged particles are detected by a detector comprising an assembly of sub-detectors arranged along said dispersion direction, whereby different sub-detectors are adjustable to have different detection sensitivities.
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公开(公告)号：US09778215B2
公开(公告)日：2017-10-03
申请号：US13662072
申请日：2012-10-26
Applicant: FEI Company
Inventor： Michael James Owen , Michael Buhot
IPC: G01N23/225 , H01J37/28 , H01J37/256
CPC classification number: G01N23/2252 , G01N2223/418 , H01J37/256 , H01J37/28 , H01J2237/2442 , H01J2237/24425 , H01J2237/2804 , H01J2237/2807
Abstract: The present invention discloses a combination of two existing approaches for mineral analysis and makes use of the Similarity Metric Invention, that allows mineral definitions to be described in theoretical compositional terms, meaning that users are not required to find examples of each mineral, or adjust rules. This system allows untrained operators to use it, as opposed to previous systems, which required extensive training and expertise.
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公开(公告)号：US20170213691A1
公开(公告)日：2017-07-27
申请号：US15218512
申请日：2016-07-25
Applicant: FEI Company
Inventor： Pleun Dona , Luigi Mele
CPC classification number: H01J37/20 , H01J2237/022 , H01J2237/2003 , H01J2237/2605 , H01J2237/2802
Abstract: Presented is a holder assembly for cooperating with a nanoreactor and an electron microscope. The holder assembly has a distal end for holding the nanoreactor. The volume has a fluid inlet and outlet. The holder assembly has fluid supply and outlet tubes which in working are connected to the fluid inlet and outlet of the nanoreactor. In working, the connection between the fluid inlet and outlet and the respective supply and outlet tubes are sealed by sealing elements. The holder assembly has a recess which, when the nanoreactor is attached and the holder is inserted into the evacuated portion of an electron microscope, forms a sealed pre-vacuum volume between the holder and the nanoreactor, with the pre-vacuum volume being evacuated via a pre-vacuum channel such that any fluid leakage is pumped away and does not enter the evacuated part of the electron microscope.
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公开(公告)号：US20170133220A1
公开(公告)日：2017-05-11
申请号：US15087968
申请日：2016-03-31
Applicant: FEI Company
Inventor： Brian Roberts Routh, JR. , Thomas G. Miller , Chad Rue , Noel Thomas Franco
CPC classification number: H01L21/02266 , C23C14/221 , C23C14/30 , G01N1/32 , H01J37/3056 , H01J2237/3174 , H01J2237/31744 , H01J2237/31745 , H01J2237/31749 , H01L21/02164 , H01L21/02214 , H01L21/02362
Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.
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公开(公告)号：US20170115224A1
公开(公告)日：2017-04-27
申请号：US15246512
申请日：2016-08-24
Applicant: FEI Company
Inventor： Rainer Daum , Xaver Voegele
CPC classification number: G01N21/6458 , G01N21/45 , G02B21/0056 , G02B21/008 , G02B21/06 , G02B21/088 , G02B21/14 , G02B21/16 , G02B21/18 , G02B21/361 , G02B21/364 , G02B27/58
Abstract: A wide-field interferometric microscope comprising: A specimen holder, for holding a specimen at an analysis location; An illuminator, for illuminating the specimen with input radiation, so as to cause it to emit fluorescence light; A pair of projection systems, arranged at opposite sides of said analysis location, to collect at least a portion of said fluorescence light and direct a corresponding pair of light beams into a respective pair of inputs of an optical combining element, where they optically interfere; A detector arrangement, for examining output light from said combining element, wherein: The illuminator is configured to produce a standing wave of input radiation at the analysis location The detector arrangement comprises exactly two interferometric detection branches.
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