公开(公告)号：US09865427B2

公开(公告)日：2018-01-09

申请号：US14704453

申请日：2015-05-05

Applicant: FEI COMPANY

Inventor： Martinus Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W. G. Persoon

IPC: H01J37/26 ,  H01J37/18 ,  H01J37/21 ,  H01J37/302 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

公开(公告)号：US08653457B2

公开(公告)日：2014-02-18

申请号：US13946755

申请日：2013-07-19

Applicant: FEI Company

Inventor： Sander Richard Marie Stoks

IPC: G01N23/00 ,  G21K7/00

CPC classification number: G01N23/225 ,  G01N23/223 ,  G01N2223/076

Abstract: A method of examining a sample using a spectroscopic apparatus, comprising the following steps: Mounting the sample on a sample holder; Directing a focused input beam of radiation onto a location on the sample, thereby producing an interaction that causes a flux of stimulated photonic radiation to emanate from said location; Examining said flux using a multi-channel photon-counting detector, thus accruing a measured spectrum for said location; Automatically repeating said directing and examining steps for a series of successive locations on the sample, which method comprises the following steps: Choosing a beam parameter of the input beam that will influence a magnitude of said flux of stimulated photonic radiation; For each location within a first set of locations on the sample, accruing a spectrum using a first value of said beam parameter; For each location within a second set of locations on the sample, accruing a spectrum using a second value of said beam parameter, different from said first value.

Abstract translation: 使用分光装置检查样品的方法，包括以下步骤：将样品安装在样品架上; 将聚焦的输入射束辐射定向到样品上的位置，从而产生引起受激光子辐射通量从所述位置发出的相互作用; 使用多通道光子计数检测器检查所述通量，由此产生所述位置的测量光谱; 自动重复对样品上的一系列连续位置的指导和检查步骤，该方法包括以下步骤：选择将影响受激光子辐射通量的大小的输入光束的波束参数; 对于采样上的第一组位置内的每个位置，使用所述光束参数的第一值产生光谱; 对于样本上的第二组位置内的每个位置，使用不同于所述第一值的所述波束参数的第二值产生频谱。

公开(公告)号：US20140021346A1

公开(公告)日：2014-01-23

申请号：US13946755

申请日：2013-07-19

Applicant: FEI Company

Inventor： Sander Richard Marie Stoks

IPC: G01N23/225

CPC classification number: G01N23/225 ,  G01N23/223 ,  G01N2223/076

Abstract: A method of examining a sample comprisesmounting the sample on a sample holder;directing a beam of radiation onto a location on the sample, thereby causing a flux of stimulated photonic radiation to emanate from said location;examining said flux using a multi-channel photon-counting detector, thus accruing a measured spectrum for said location;automatically repeating said directing and examining steps for a series of successive locations,the method of which compriseschoosing a beam parameter of the input beam that will influence a magnitude of said flux of stimulated photonic radiation;for each location within a first set of locations on the sample, accruing a spectrum using a first value of said beam parameter;for each location within a second set of locations on the sample, accruing a spectrum using a second value of said beam parameter.

Abstract translation: 检查样品的方法包括将样品安装在样品架上; 将辐射束引导到样品上的位置，从而导致受激光子辐射的通量从所述位置发出; 使用多通道光子计数检测器检查所述通量，从而产生所述位置的测量光谱; 对一系列连续的位置自动地重复所述的引导和检查步骤，其方法包括：选择将影响受激光子辐射通量的大小的输入光束的波束参数; 对于采样上的第一组位置内的每个位置，使用所述光束参数的第一值产生光谱; 对于样本上的第二组位置内的每个位置，使用所述波束参数的第二值产生频谱。