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公开(公告)号：US09865427B2
公开(公告)日：2018-01-09
申请号：US14704453
申请日：2015-05-05
Applicant: FEI COMPANY
Inventor： Martinus Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
IPC: H01J37/26 , H01J37/18 , H01J37/21 , H01J37/302 , H01J37/16 , H01J37/20 , H01J37/22 , H01J37/244 , H01J37/28
CPC classification number: H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.
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公开(公告)号：US20160189922A1
公开(公告)日：2016-06-30
申请号：US14983038
申请日：2015-12-29
Applicant: FEI Company
IPC: H01J37/244 , H01J37/285
CPC classification number: H01J37/244 , G01N23/223 , G01N23/2252 , G01N23/2257 , G01N2223/501 , H01J37/285 , H01J2237/2445
Abstract: A spectroscopic analysis method, comprising: Directing a beam of radiation onto a location P on a specimen, thereby causing a flux of X-rays to emanate from said location; Examining said flux using a detector arrangement, thus accruing a measured spectrum; Choosing a set of mutually different measurement directions d={dn} that originate from P, where n is a member of an integer sequence; Recording an output On of said detector arrangement for different values of dn, thus compiling a measurement set M={(On, dn)}; Adopting a spectral model On′ for On that is a convoluted mix of terms Band Lp, where: B is a substantially continuous spectral component associated with Bremsstrahlung; Lp is a substantially discrete spectral component associated with the specimen composition at location P; automatically deconvolving the measurement set Mon the basis of said spectral model On′ and distill Lp therefrom.
Abstract translation: 一种光谱分析方法，包括：将辐射束定向到样本上的位置P，从而导致从所述位置发出X射线通量; 使用检测器装置检查所述通量，从而产生测量的光谱; 选择一组彼此不同的测量方向d = {dn}，其源自于P，其中n是整数序列的成员; 记录不同值dn的所述检测器装置的输出On，从而编译测量集M = {（On，dn）}; 采用光谱模型On'for On是一个卷积混合的条带Band Lp，其中：B是与Bremsstrahlung相关联的基本上连续的光谱分量; Lp是与位置P处的样本组成相关联的基本上离散的光谱分量; 自动解卷积测量设置Mon所述光谱模型的基础On'并从中提取Lp。
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公开(公告)号：US20150371815A1
公开(公告)日：2015-12-24
申请号：US14743780
申请日：2015-06-18
Applicant: FEI Company
Inventor： Pavel Potocek , Cornelis Sander Kooijman , Hendrik Nicolaas Slingerland , Gerard Anne Nikolaas van Veen , Faysal Boughorbel
CPC classification number: H01J37/222 , G02B21/0024 , G02B21/0048 , G02B21/008 , H01J37/226 , H01J37/28 , H01J2237/226 , H01J2237/28 , H01J2237/2811
Abstract: A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps: Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen; Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation; Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position, which method additionally comprises the following steps: In a first sampling session S1gathering detector data from a first collection P1 of sampling points distributed sparsely across the specimen; Repeating this procedure so as to accumulate a set {Pn} of such collections, gathered during an associated set {Sn} of sampling sessions, each set with a cardinality N>1; Assembling an image of the specimen by using the set {Pn} as input to an integrative mathematical reconstruction procedure, wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}.
Abstract translation: 使用扫描式显微镜对样本的图像进行累积的方法，包括以下步骤：从源极通过照射器提供辐射束，以照射样本; 提供检测器，用于响应于所述照射来检测从样本发出的辐射通量; 使所述光束相对于样本的表面进行扫描运动，并且根据扫描位置记录检测器的输出，该方法另外包括以下步骤：在第一采样会话中，从第一采集器P1聚集检测器数据 抽样点分布稀疏地遍布样本; 重复此过程，以便累积在相关集合{Sn}采样会话期间收集的集合{Pn}，每个集合具有基数N> 1; 通过使用集合{Pn}作为整合数学重建过程的输入来组装样本的图像，其中，作为所述组装过程的一部分，进行数学登记校正以补偿组{Pn的不同成员之间的漂移错配 }。
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公开(公告)号：US20130092826A1
公开(公告)日：2013-04-18
申请号：US13655129
申请日：2012-10-18
Applicant: FEI Company
Inventor： Tom Miller , Gene Mirro , Cornelis Sander Kooijman , Hendrik Jan de Vos
IPC: H01J3/26
CPC classification number: H01J3/26 , H01J37/1472 , H01J37/1477 , H01J37/3026 , H01J2237/1504 , H01J2237/1518 , H01J2237/1526 , H01J2237/30416 , H01J2237/3045 , H01J2237/30461
Abstract: An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated.
Abstract translation: 引导带电粒子束的改进方法，其补偿带电粒子通过改变一个或多个偏转器信号而穿过系统所需的时间。 根据本发明的一个实施例，在数模（D / A）转换之前，将数字滤波器应用于扫描图案，以便减少或消除可能由TOF误差引起的过拍影响。 在其他实施例中，也可以使用模拟滤波器或具有较低带宽的信号放大器的使用来补偿TOF误差。 通过改变扫描图案，可以显着减少或消除超拍效果。
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公开(公告)号：US09620330B2
公开(公告)日：2017-04-11
申请号：US14743780
申请日：2015-06-18
Applicant: FEI Company
Inventor： Pavel Poto{hacek over (c)}ek , Cornelis Sander Kooijman , Hendrik Nicolaas Slingerland , Gerard Nicolaas Anne van Veen , Faysal Boughorbel
CPC classification number: H01J37/222 , G02B21/0024 , G02B21/0048 , G02B21/008 , H01J37/226 , H01J37/28 , H01J2237/226 , H01J2237/28 , H01J2237/2811
Abstract: A method and apparatus for imaging a specimen using a scanning-type microscope, by irradiating a specimen with a beam of radiation using a scanning motion, and detecting a flux of radiation emanating from the specimen in response to the irradiation, in the first sampling session {S1} of a set {Sn}, gathering data from a first collection of sparsely distributed sampling points {P1} of set {Pn}. A mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}, and an image of the specimen is assembled using the set {Pn} as input to an integrative mathematical reconstruction procedure.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20160322194A1
公开(公告)日：2016-11-03
申请号：US14702753
申请日：2015-05-03
Applicant: FEI Company
Inventor： Cornelis Sander Kooijman , Jacob Simon Faber
CPC classification number: H01J37/265 , H01J37/28
Abstract: Methods and systems are provided for a scanning microscope to rapidly form a partial digital image of an area. The method includes performing an initial scan for the area and using initial scan to identify regions representing features of interest in the area. Then, the method performs additional adaptive scans of the regions representing structures of interest. Such scans adapt the path of the scanning beam to follow the edges of a feature of interest by performing localized scan patterns that intersect the feature edge, and directing the localized scan patterns to follow the feature edge.
Abstract translation: 为扫描显微镜提供了快速形成区域的部分数字图像的方法和系统。 该方法包括对该区域执行初始扫描并使用初始扫描来识别表示该区域中感兴趣特征的区域。 然后，该方法对表示感兴趣的结构的区域执行附加的自适应扫描。 这种扫描通过执行与特征边缘相交的局部扫描图案来适应扫描光束的路径跟随感兴趣特征的边缘，并且引导局部扫描图案跟随特征边缘。
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公开(公告)号：US20160254119A1
公开(公告)日：2016-09-01
申请号：US15053898
申请日：2016-02-25
Applicant: FEI Company
Inventor： Nikolaos Kontaras , Bart Jozef Janssen , Cornelis Sander Kooijman , Duarte Guerreiro Tome Antunes
IPC: H01J37/244 , H01J37/28
CPC classification number: H01J37/244 , G01T1/17 , H01J37/28 , H01J2237/22
Abstract: A system for analyzing an analogue signal comprising randomly spaced events, the event having an event height, comprises: Converting the signal to a series of samples S(t), with t the moment of sampling, thereby forming a sampled, discrete time signal, Detecting the presence of an event, the event detected at t=T, Estimating the event height, Using a model (412, FIG. 5) to estimate a noise contribution N(t) for t=(T−Δ1) to t=(T+Δ2), the noise contribution derived from samples S(t) with t≦(T−Δ1) and/or samples S(t) with t≧(T+Δ2), with Δ1 and Δ2 predetermined or preset time periods having a value such that the event has a negligible contribution to samples taken before (T−Δ1) or after (T+Δ2), Estimating the event height E by integrating the series of samples from (T−Δ1) to (T+Δ2) minus the noise contribution for said samples, E=Σt=(T−Δ1)t=(T+Δ2)S(t)−Σt=(T−Δ1)t=(T+Δ2)N(t)=Σt=(T−Δ1)t=(T+Δ2)[S(t)−N(t)].
Abstract translation: 一种用于分析包括随机间隔事件的模拟信号的系统，所述事件具有事件高度，包括：在t为采样时刻的情况下，将信号转换为一系列样本S（t），从而形成采样的离散时间信号， 检测事件的存在，在t = T处检测到的事件，估计事件高度，使用模型（412，图5）估计t =（T-Δ1）至t =（T-Δ1）的噪声贡献N（t） （T +Δ2），具有t≤（T-Δ1）的样本S（t）和/或具有t≥（T +Δ2）的样本S（t）的噪声贡献，具有Δ1和Δ2预定或预设时间段 具有使得事件对（T-Δ1）之前或之后（T +Δ2）采取的样本的贡献可以忽略不计，通过将来自（T-Δ1）到（T +Δ2）的一系列样本积分来估计事件高度E ）减去所述样本的噪声贡献，E =Σt=（T-Δ1）t =（T +Δ2）S（t）-Σt=（T-Δ1）t =（T +Δ2）N（t）=Σt =（T-Δ1）t =（T +Δ2）[S（t）-N（t）]。
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公开(公告)号：US20130254948A1
公开(公告)日：2013-09-26
申请号：US13655200
申请日：2012-10-18
Applicant: FEI Company
Inventor： Arthur Reinout Hartong , Cornelis Sander Kooijman
CPC classification number: H01J37/26 , G01Q10/00 , G01Q30/06 , H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/28
Abstract: The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa.
Abstract translation: 该方法涉及扫描样品的方法。 扫描样品通常通过沿着大量平行线的探头扫描样品来完成。 在现有技术的扫描方法中，用标称相同的扫描图案扫描多次样品。 本发明基于以下认识：沿着扫描方向的相邻点之间的相干性远远优于垂直于扫描方向的相邻点的相干性。 通过组合彼此垂直扫描的两个图像，因此应该可以使用改进的相干性（由于较短的时间距离）在两个方向上形成图像。 因此，该方法涉及用两个扫描图案扫描样本，一个扫描图案的线优选地垂直于另一扫描图案的线。 因此，可以使用一个扫描图案的线上的扫描点的时间相干性来对准另一扫描图案的线，反之亦然。
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公开(公告)号：US20190362932A1
公开(公告)日：2019-11-28
申请号：US16522308
申请日：2019-07-25
Applicant: FEI Company
Inventor： Nikolaos Kontaras , Bart Jozef Janssen , Cornelis Sander Kooijman , Duarte Guerreiro Tome Antunes
IPC: H01J37/244 , H01J37/28
Abstract: The invention relates to a method for analyzing an analogue signal comprising randomly spaced events having an event height. The method includes irradiating a sample with a focused beam of energetic electrons, detecting emission from the sample in response to such irradiation, and converting an analog signal of the emissions to a stationary time signal. The method further includes determining an estimated noise contribution for the stationary time signal, and determining an estimated event height of an event based on the stationary time signal and the estimated noise contribution for the stationary time signal, and determining, based on the estimated event height, an energy of the emission detected by the detector. This method is particularly useful for X-ray detectors, such as Silicon Drift Detectors, used in a SEM. By estimating the noise contribution to the signal, the step height is estimated with improved accuracy.
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公开(公告)号：US09361275B2
公开(公告)日：2016-06-07
申请号：US13866484
申请日：2013-04-19
Applicant: FEI Company
Inventor： Cornelis Sander Kooijman , Hendrik Jan de Vos
Abstract: The invention relates to a method for analyzing the output signal of a silicon drift detector (SDD). A SDD is used for detecting X-rays emitted by a sample as a result of impinging radiation.The signal of a SDD comprises a number of randomly spaced steps, in which the step height is a function of the energy of the detected X-ray photon.The variance in step height is a function of the averaging time that can be used to determine the plateau between steps: averaging over a short interval results in more uncertainty of the plateau value than a long interval. By according a weight factor, a function of the variance such that a step with low variance (high reliability) is associated with a larger weight factor than a step with high variance (low reliability), measurement values with a low variance are emphasized. This results in better resolved spectra.
Abstract translation: 本发明涉及一种用于分析硅漂移检测器（SDD）的输出信号的方法。 SDD用于检测作为射入辐射的结果的样品发射的X射线。 SDD的信号包括多个随机间隔的步骤，其中台阶高度是所检测的X射线光子的能量的函数。 台阶高度的方差是平均时间的函数，可用于确定平台之间的平台：在较短的间隔之间进行平均，导致平台值比长间隔更多的不确定性。 通过权重因子，方差的函数使得低方差（高可靠性）的步长与具有高方差（低可靠性）的步长相比具有更大的权重因子，强调具有低方差的测量值。 这导致更好的解析光谱。
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