公开(公告)号：US09762863B2

公开(公告)日：2017-09-12

申请号：US14090215

申请日：2013-11-26

Applicant: FEI Company

Inventor： Pavel Poto{hacek over (c)}ek ,  Martinus Petrus Maria Bierhoff ,  Tomá{hacek over (s)} Vystav{hacek over (e)}l ,  Luká{hacek over (s)} Dryb{hacek over (c)}ák

IPC: H04N7/18 ,  G01N23/225 ,  H01J37/28 ,  H01J37/26

CPC classification number: H04N7/18 ,  G01N23/2251 ,  H01J37/265 ,  H01J37/28

Abstract: The invention relates to a method of sampling and displaying information comprising scanning a beam over the sample in a series of N overlapping sub-frames, each comprising Mn scan positions, thereby irradiating the sample at N×Mn scan positions, which form the field of view; detecting a signal, sampled for each scan position, emanating from the sample; and displaying the sub-frames having at least N×Mn pixels in such a way, that after the series of N scans each of the pixels displays information derived from the signal from one or more scan positions; in which after the scan of the first sub-frame each of the pixels displays information derived from the scan positions of the first sub-frame; and after the scan of the second sub-frame each of the pixels displays information derived during the scanning of the first, the second, or both sub-frames.

公开(公告)号：US09865427B2

公开(公告)日：2018-01-09

申请号：US14704453

申请日：2015-05-05

Applicant: FEI COMPANY

Inventor： Martinus Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W. G. Persoon

IPC: H01J37/26 ,  H01J37/18 ,  H01J37/21 ,  H01J37/302 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

公开(公告)号：US20140146160A1

公开(公告)日：2014-05-29

申请号：US14090215

申请日：2013-11-26

Applicant: FEI Company

Inventor： Pavel Potocek ,  Martinus Petrus Maria Bierhoff ,  Tomás Vystavël ,  Lukás Drybcák

IPC: H04N7/18

CPC classification number: H04N7/18 ,  G01N23/2251 ,  H01J37/265 ,  H01J37/28

Abstract: The invention relates to a method of sampling and displaying information comprisingscanning a beam over the sample in a series of N overlapping sub-frames, each comprising Mn scan positions, thereby irradiating the sample at N×Mn scan positions, which form the field of view;detecting a signal, sampled for each scan position, emanating from the sample; and displaying the sub-frames having at least N×Mn pixels in such a way, that after the series of N scans each of the pixels displays information derived from the signal from one or more scan positions;in which after the scan of the first sub-frame each of the pixels displays information derived from the scan positions of the first sub-frame; andafter the scan of the second sub-frame each of the pixels displays information derived during the scanning of the first, the second, or both sub-frames.

Abstract translation: 本发明涉及一种采样和显示信息的方法，包括扫描一系列N个重叠子帧中的样本上的束，每个子帧包括Mn扫描位置，从而在N×Mn扫描位置照射样本，形成场 视图; 检测从样品发出的针对每个扫描位置采样的信号; 并且以这样的方式显示具有至少N×Mn个像素的子帧，在所述一系列N次扫描中，每个像素显示从一个或多个扫描位置的信号导出的信息; 其中在第一子帧的扫描之后，每个像素显示从第一子帧的扫描位置导出的信息; 并且在第二子帧的扫描之后，每个像素显示在扫描第一，第二或两个子帧期间导出的信息。