Standing wave interferometric microscope

    公开(公告)号:US10401291B2

    公开(公告)日:2019-09-03

    申请号:US15880945

    申请日:2018-01-26

    Applicant: FEI Company

    Abstract: A standing wave interferometric microscope is disclosed herein. An example microscope may include an illuminator, for illuminating a specimen with a standing wave of input radiation at an analysis location to cause the specimen to fluoresce, the specimen arranged in the analysis location, a pair of projection systems, arranged at opposite sides of the analysis location, coupled to collect at least a portion of the fluorescence and direct a corresponding pair of fluorescence light beams into a respective pair of inputs of an optical combining element, a wavefront modifier for producing astigmatism in at least one of the fluorescence light beams entering the optical combining element, and a detector for examining output light from said combining element.

    Switchable microscope arrangement with multiple detectors
    5.
    发明申请
    Switchable microscope arrangement with multiple detectors 有权
    具有多个检测器的可切换显微镜布置

    公开(公告)号:US20140160265A1

    公开(公告)日:2014-06-12

    申请号:US14008473

    申请日:2012-04-16

    Applicant: FEI Company

    CPC classification number: G02B21/16 G01N21/64 G01N21/6458 G02B21/18 G02B21/361

    Abstract: The invention relates to a microscope arrangement provided with: a microscope (10) having at least two optical outputs (12, 14) for outputting a fluorescence signal and a switching arrangement (16) for switching the output of the fluorescence signal between the optical outputs; a beam splitter arrangement (18); optical elements (28, 30) for generating a separate partial beam path (24, 26) associated with each output in such a way that the respective fluorescence signal of each of the outputs is superimposed at the beam splitter arrangement after passing through the respective partial beam path; and also at least two optical detectors (20, 22), wherein for each of the partial beam paths, one of the detectors is located behind the beam splitter, seen from the microscope, in reflection and another of the detectors is located behind the beam splitter arrangement, seen from the microscope, in transmission.

    Abstract translation: 本发明涉及一种具有以下装置的显微镜装置:具有至少两个用于输出荧光信号的光学输出(12,14)的显微镜(10)和用于在荧光输出端之间切换荧光信号的输出的开关装置(16) ; 分束器装置(18); 光学元件(28,30),用于产生与每个输出相关联的分离的部分光束路径(24,26),使得每个输出的相应荧光信号在通过相应的部分 光束路径 以及至少两个光学检测器(20,22),其中对于每个部分光束路径,检测器中的一个位于分束器的后面,从显微镜观察反射,另一个检测器位于光束后面 分离器布置,从显微镜看,在传输。

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