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公开(公告)号:US20170115224A1
公开(公告)日:2017-04-27
申请号:US15246512
申请日:2016-08-24
Applicant: FEI Company
Inventor: Rainer Daum , Xaver Voegele
CPC classification number: G01N21/6458 , G01N21/45 , G02B21/0056 , G02B21/008 , G02B21/06 , G02B21/088 , G02B21/14 , G02B21/16 , G02B21/18 , G02B21/361 , G02B21/364 , G02B27/58
Abstract: A wide-field interferometric microscope comprising: A specimen holder, for holding a specimen at an analysis location; An illuminator, for illuminating the specimen with input radiation, so as to cause it to emit fluorescence light; A pair of projection systems, arranged at opposite sides of said analysis location, to collect at least a portion of said fluorescence light and direct a corresponding pair of light beams into a respective pair of inputs of an optical combining element, where they optically interfere; A detector arrangement, for examining output light from said combining element, wherein: The illuminator is configured to produce a standing wave of input radiation at the analysis location The detector arrangement comprises exactly two interferometric detection branches.
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公开(公告)号:US20180195962A1
公开(公告)日:2018-07-12
申请号:US15880945
申请日:2018-01-26
Applicant: FEI Company
Inventor: Rainer Daum , Xaver Voegele
CPC classification number: G01N21/6458 , G01N21/45 , G02B21/0056 , G02B21/008 , G02B21/06 , G02B21/088 , G02B21/14 , G02B21/16 , G02B21/18 , G02B21/361 , G02B21/364 , G02B27/58
Abstract: A standing wave interferometric microscope is disclosed herein. An example microscope may include an illuminator, for illuminating a specimen with a standing wave of input radiation at an analysis location to cause the specimen to fluoresce, the specimen arranged in the analysis location, a pair of projection systems, arranged at opposite sides of the analysis location, coupled to collect at least a portion of the fluorescence and direct a corresponding pair of fluorescence light beams into a respective pair of inputs of an optical combining element, a wavefront modifier for producing astigmatism in at least one of the fluorescence light beams entering the optical combining element, and a detector for examining output light from said combining element.
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公开(公告)号:US09885660B2
公开(公告)日:2018-02-06
申请号:US15246512
申请日:2016-08-24
Applicant: FEI Company
Inventor: Rainer Daum , Xaver Voegele
CPC classification number: G01N21/6458 , G01N21/45 , G02B21/0056 , G02B21/008 , G02B21/06 , G02B21/088 , G02B21/14 , G02B21/16 , G02B21/18 , G02B21/361 , G02B21/364 , G02B27/58
Abstract: A wide-field interferometric microscope comprising: A specimen holder, for holding a specimen at an analysis location; An illuminator, for illuminating the specimen with input radiation, so as to cause it to emit fluorescence light; A pair of projection systems, arranged at opposite sides of said analysis location, to collect at least a portion of said fluorescence light and direct a corresponding pair of light beams into a respective pair of inputs of an optical combining element, where they optically interfere; A detector arrangement, for examining output light from said combining element, wherein: The illuminator is configured to produce a standing wave of input radiation at the analysis location The detector arrangement comprises exactly two interferometric detection branches.
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公开(公告)号:US10401291B2
公开(公告)日:2019-09-03
申请号:US15880945
申请日:2018-01-26
Applicant: FEI Company
Inventor: Rainer Daum , Xaver Voegele
IPC: G01N21/64 , G02B21/14 , G02B21/16 , G02B27/58 , G01N21/45 , G02B21/06 , G02B21/08 , G02B21/18 , G02B21/36 , G02B21/00
Abstract: A standing wave interferometric microscope is disclosed herein. An example microscope may include an illuminator, for illuminating a specimen with a standing wave of input radiation at an analysis location to cause the specimen to fluoresce, the specimen arranged in the analysis location, a pair of projection systems, arranged at opposite sides of the analysis location, coupled to collect at least a portion of the fluorescence and direct a corresponding pair of fluorescence light beams into a respective pair of inputs of an optical combining element, a wavefront modifier for producing astigmatism in at least one of the fluorescence light beams entering the optical combining element, and a detector for examining output light from said combining element.
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5.
公开(公告)号:US20140160265A1
公开(公告)日:2014-06-12
申请号:US14008473
申请日:2012-04-16
Applicant: FEI Company
Inventor: Xaver Voegele , Rainer Uhl , Rainer Daum
CPC classification number: G02B21/16 , G01N21/64 , G01N21/6458 , G02B21/18 , G02B21/361
Abstract: The invention relates to a microscope arrangement provided with: a microscope (10) having at least two optical outputs (12, 14) for outputting a fluorescence signal and a switching arrangement (16) for switching the output of the fluorescence signal between the optical outputs; a beam splitter arrangement (18); optical elements (28, 30) for generating a separate partial beam path (24, 26) associated with each output in such a way that the respective fluorescence signal of each of the outputs is superimposed at the beam splitter arrangement after passing through the respective partial beam path; and also at least two optical detectors (20, 22), wherein for each of the partial beam paths, one of the detectors is located behind the beam splitter, seen from the microscope, in reflection and another of the detectors is located behind the beam splitter arrangement, seen from the microscope, in transmission.
Abstract translation: 本发明涉及一种具有以下装置的显微镜装置:具有至少两个用于输出荧光信号的光学输出(12,14)的显微镜(10)和用于在荧光输出端之间切换荧光信号的输出的开关装置(16) ; 分束器装置(18); 光学元件(28,30),用于产生与每个输出相关联的分离的部分光束路径(24,26),使得每个输出的相应荧光信号在通过相应的部分 光束路径 以及至少两个光学检测器(20,22),其中对于每个部分光束路径,检测器中的一个位于分束器的后面,从显微镜观察反射,另一个检测器位于光束后面 分离器布置,从显微镜看,在传输。
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