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公开(公告)号：US20170115224A1
公开(公告)日：2017-04-27
申请号：US15246512
申请日：2016-08-24
Applicant: FEI Company
Inventor： Rainer Daum , Xaver Voegele
CPC classification number: G01N21/6458 , G01N21/45 , G02B21/0056 , G02B21/008 , G02B21/06 , G02B21/088 , G02B21/14 , G02B21/16 , G02B21/18 , G02B21/361 , G02B21/364 , G02B27/58
Abstract: A wide-field interferometric microscope comprising: A specimen holder, for holding a specimen at an analysis location; An illuminator, for illuminating the specimen with input radiation, so as to cause it to emit fluorescence light; A pair of projection systems, arranged at opposite sides of said analysis location, to collect at least a portion of said fluorescence light and direct a corresponding pair of light beams into a respective pair of inputs of an optical combining element, where they optically interfere; A detector arrangement, for examining output light from said combining element, wherein: The illuminator is configured to produce a standing wave of input radiation at the analysis location The detector arrangement comprises exactly two interferometric detection branches.
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公开(公告)号：US20180195962A1
公开(公告)日：2018-07-12
申请号：US15880945
申请日：2018-01-26
Applicant: FEI Company
Inventor： Rainer Daum , Xaver Voegele
CPC classification number: G01N21/6458 , G01N21/45 , G02B21/0056 , G02B21/008 , G02B21/06 , G02B21/088 , G02B21/14 , G02B21/16 , G02B21/18 , G02B21/361 , G02B21/364 , G02B27/58
Abstract: A standing wave interferometric microscope is disclosed herein. An example microscope may include an illuminator, for illuminating a specimen with a standing wave of input radiation at an analysis location to cause the specimen to fluoresce, the specimen arranged in the analysis location, a pair of projection systems, arranged at opposite sides of the analysis location, coupled to collect at least a portion of the fluorescence and direct a corresponding pair of fluorescence light beams into a respective pair of inputs of an optical combining element, a wavefront modifier for producing astigmatism in at least one of the fluorescence light beams entering the optical combining element, and a detector for examining output light from said combining element.
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Patent Agency Ranking
公开(公告)号：US09512460B2
公开(公告)日：2016-12-06
申请号：US14196178
申请日：2014-03-04
Applicant: FEI Company
Inventor： Tobias Mayer , Rainer Daum , Matthias Geisbauer , Rudolf Johannes Peter Gerardus Schampers , Johannes Antonius Hendricus Wilhelmus Gerardus Persoon
CPC classification number: C12Q1/02 , G02B21/28 , G02B27/0006
Abstract: The present invention relates to a method of studying a sample using an optical microscope, comprising providing the sample in a sample holder with means to maintain the sample at a temperature below 273 K; providing a microscope objective lens, in a thermally insulating jacket, having an extremal lens element proximal to the sample holder; bringing the lens into a focus position proximal to the sample, which separates the extremal lens element and sample by an intervening space, providing a transparent window in said intervening space, with a gap between the window and the extremal lens element; providing a flow of substantially dry gas in said gap; and tailoring the geometry and velocity of said flow so that, at least in said gap, the flow is non-laminar; and does not excite substantial acoustic vibration in a structure proximal the gap.
Abstract translation: 本发明涉及使用光学显微镜研究样品的方法，其包括将样品提供在样品保持器中，以将样品保持在低于273K的温度; 在绝热护套中提供具有靠近样品保持器的极端透镜元件的显微镜物镜; 使透镜进入靠近样品的聚焦位置，其将极端透镜元件和样品分开中间空间，在所述中间空间中提供透明窗口，窗口与极光透镜元件之间具有间隙; 在所述间隙中提供基本干燥的气体流; 并且调整所述流的几何形状和速度，使得至少在所述间隙中，所述流是非层流的; 并且不会在靠近间隙的结构中激发大量的声振动。
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公开(公告)号：US09885660B2
公开(公告)日：2018-02-06
申请号：US15246512
申请日：2016-08-24
Applicant: FEI Company
Inventor： Rainer Daum , Xaver Voegele
CPC classification number: G01N21/6458 , G01N21/45 , G02B21/0056 , G02B21/008 , G02B21/06 , G02B21/088 , G02B21/14 , G02B21/16 , G02B21/18 , G02B21/361 , G02B21/364 , G02B27/58
Abstract: A wide-field interferometric microscope comprising: A specimen holder, for holding a specimen at an analysis location; An illuminator, for illuminating the specimen with input radiation, so as to cause it to emit fluorescence light; A pair of projection systems, arranged at opposite sides of said analysis location, to collect at least a portion of said fluorescence light and direct a corresponding pair of light beams into a respective pair of inputs of an optical combining element, where they optically interfere; A detector arrangement, for examining output light from said combining element, wherein: The illuminator is configured to produce a standing wave of input radiation at the analysis location The detector arrangement comprises exactly two interferometric detection branches.
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公开(公告)号：US20140248649A1
公开(公告)日：2014-09-04
申请号：US14196178
申请日：2014-03-04
Applicant: FEI Company
Inventor： Tobias Mayer , Rainer Daum , Matthias Geisbauer , Rudolf Johannes Peter Gerardus Schampers , Johannes Antonius Hendricus Wilhelmus Ge Persoon
IPC: C12Q1/02
CPC classification number: C12Q1/02 , G02B21/28 , G02B27/0006
Abstract: The present invention relates to a method of studying a sample using an optical microscope, comprising providing the sample in a sample holder with means to maintain the sample at a temperature below 273 K; providing a microscope objective lens, in a thermally insulating jacket, having an extremal lens element proximal to the sample holder; bringing the lens into a focus position proximal to the sample, which separates the extremal lens element and sample by an intervening space, providing a transparent window in said intervening space, with a gap between the window and the extremal lens element; providing a flow of substantially dry gas in said gap; and tailoring the geometry and velocity of said flow so that, at least in said gap, the flow is non-laminar; and does not excite substantial acoustic vibration in a structure proximal the gap.
Abstract translation: 本发明涉及使用光学显微镜研究样品的方法，其包括将样品提供在样品保持器中，以将样品保持在低于273K的温度; 在绝热护套中提供具有靠近样品保持器的极端透镜元件的显微镜物镜; 使透镜进入靠近样品的聚焦位置，其将极端透镜元件和样品分开中间空间，在所述中间空间中提供透明窗口，窗口与极光透镜元件之间具有间隙; 在所述间隙中提供基本干燥的气体流; 并且调整所述流的几何形状和速度，使得至少在所述间隙中，所述流是非层流的; 并且不会在靠近间隙的结构中激发大量的声振动。
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公开(公告)号：US10401291B2
公开(公告)日：2019-09-03
申请号：US15880945
申请日：2018-01-26
Applicant: FEI Company
Inventor： Rainer Daum , Xaver Voegele
IPC: G01N21/64 , G02B21/14 , G02B21/16 , G02B27/58 , G01N21/45 , G02B21/06 , G02B21/08 , G02B21/18 , G02B21/36 , G02B21/00
Abstract: A standing wave interferometric microscope is disclosed herein. An example microscope may include an illuminator, for illuminating a specimen with a standing wave of input radiation at an analysis location to cause the specimen to fluoresce, the specimen arranged in the analysis location, a pair of projection systems, arranged at opposite sides of the analysis location, coupled to collect at least a portion of the fluorescence and direct a corresponding pair of fluorescence light beams into a respective pair of inputs of an optical combining element, a wavefront modifier for producing astigmatism in at least one of the fluorescence light beams entering the optical combining element, and a detector for examining output light from said combining element.
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公开(公告)号：US20140160265A1
公开(公告)日：2014-06-12
申请号：US14008473
申请日：2012-04-16
Applicant: FEI Company
Inventor： Xaver Voegele , Rainer Uhl , Rainer Daum
CPC classification number: G02B21/16 , G01N21/64 , G01N21/6458 , G02B21/18 , G02B21/361
Abstract: The invention relates to a microscope arrangement provided with: a microscope (10) having at least two optical outputs (12, 14) for outputting a fluorescence signal and a switching arrangement (16) for switching the output of the fluorescence signal between the optical outputs; a beam splitter arrangement (18); optical elements (28, 30) for generating a separate partial beam path (24, 26) associated with each output in such a way that the respective fluorescence signal of each of the outputs is superimposed at the beam splitter arrangement after passing through the respective partial beam path; and also at least two optical detectors (20, 22), wherein for each of the partial beam paths, one of the detectors is located behind the beam splitter, seen from the microscope, in reflection and another of the detectors is located behind the beam splitter arrangement, seen from the microscope, in transmission.
Abstract translation: 本发明涉及一种具有以下装置的显微镜装置：具有至少两个用于输出荧光信号的光学输出（12,14）的显微镜（10）和用于在荧光输出端之间切换荧光信号的输出的开关装置（16） ; 分束器装置（18）; 光学元件（28,30），用于产生与每个输出相关联的分离的部分光束路径（24,26），使得每个输出的相应荧光信号在通过相应的部分 光束路径 以及至少两个光学检测器（20,22），其中对于每个部分光束路径，检测器中的一个位于分束器的后面，从显微镜观察反射，另一个检测器位于光束后面 分离器布置，从显微镜看，在传输。
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