Semiconductor element, method for manufacturing same, and electronic device including same
    1.
    发明授权
    Semiconductor element, method for manufacturing same, and electronic device including same 有权
    半导体元件及其制造方法及包括其的电子器件

    公开(公告)号:US08173487B2

    公开(公告)日:2012-05-08

    申请号:US12530552

    申请日:2008-04-01

    CPC classification number: H01L29/7869 H01L29/78696 Y10S438/922

    Abstract: A thin-film transistor (1) of the present invention includes an insulating substrate (2), a gate electrode (3) which has a predetermined shape and is formed on the insulating substrate (2), a gate insulating film (4) formed on the gate electrode (3), and a semiconductor layer (5) which is polycrystalline ZnO and is formed on the gate insulating film (4). The semiconductor layer (5) is immersed in a solution in which impurities are dissolved so that the impurities are selectively added to a grain boundary part of the polycrystalline ZnO film. Subsequently, a source electrode (6) and a drain electrode (7) are formed so as to have a predetermined shape. Next, a protection layer (8) is formed on the source electrode (6) and the drain electrode (7). Thus, a thin-film transistor which has a good subthreshold characteristic and has a zinc oxide film as a base of an active layer can be realized.

    Abstract translation: 本发明的薄膜晶体管(1)包括绝缘基板(2),具有预定形状并形成在绝缘基板(2)上的栅电极(3),形成有栅极绝缘膜(4) 在栅电极(3)上形成半导体层(5),并形成在栅极绝缘膜(4)上。 将半导体层(5)浸渍在杂质溶解的溶液中,使杂质选择性地添加到多晶ZnO膜的晶界部分。 随后,源电极(6)和漏电极(7)形成为具有预定形状。 接下来,在源电极(6)和漏电极(7)上形成保护层(8)。 因此,可以实现具有良好的亚阈值特性并且具有氧化锌膜作为有源层的基底的薄膜晶体管。

    Definition of anti-fuse cell for programmable gate array application
    6.
    发明授权
    Definition of anti-fuse cell for programmable gate array application 有权
    用于可编程门阵列应用的反熔丝单元的定义

    公开(公告)号:US06307248B1

    公开(公告)日:2001-10-23

    申请号:US09289890

    申请日:1999-04-12

    CPC classification number: H01L27/11803 Y10S438/922

    Abstract: A method for fabricating an anti-fuse cell using an undoped polysilicon film as a mask in defining the anti-fuse window is described. A layer of silicon oxide is provided over the surface of a semiconductor substrate. A first undoped polysilicon layer is deposited overlying the silicon oxide layer. The first undoped polysilicon layer is covered with a photoresist layer patterned to form a mask. The first undoped polysilicon layer and a portion of the silicon oxide layer are etched away where they are not covered by the mask to form a cell opening. The mask and the remaining silicon oxide within the cell opening are removed. An insulating layer is deposited over the surface of the first undoped polysilicon layer and within the cell opening. A second polysilicon layer is deposited overlying the insulating layer and doped. The second polysilicon layer is patterned to form an anti-fuse cell. Gate electrodes and source and drain regions are formed completing the fabrication of the integrated circuit device.

    Abstract translation: 描述了在限定反熔丝窗口中使用未掺杂的多晶硅膜作为掩模来制造抗熔丝电池的方法。 在半导体衬底的表面上设置一层氧化硅。 第一未掺杂的多晶硅层沉积在氧化硅层上。 第一未掺杂的多晶硅层被图案化以形成掩模的光致抗蚀剂层覆盖。 将第一未掺杂的多晶硅层和一部分氧化硅层蚀刻掉,其中它们不被掩模覆盖以形成电池开口。 除去孔中的掩模和剩余的氧化硅。 绝缘层沉积在第一未掺杂多晶硅层的表面上并且在电池开口内。 第二多晶硅层沉积在绝缘层上并掺杂。 将第二多晶硅层图案化以形成抗熔丝电池。 形成栅电极和源极和漏极区,完成集成电路器件的制造。

    Process of making a radiation responsive device
    9.
    发明授权
    Process of making a radiation responsive device 失效
    制造辐射响应装置的过程

    公开(公告)号:US4155785A

    公开(公告)日:1979-05-22

    申请号:US856941

    申请日:1977-12-02

    Abstract: The practice of this disclosure obtains a relatively high efficiency operation for a crystalline semiconductor solar cell containing various defects of the linear and planar types. Linear defects include screw dislocations as well as full and partial dislocations. Planar defects include twins, stacking faults, grain boundaries and surfaces. Such defects normally contain recombination centers at which electrons and holes generated in the semiconductor region recombine with loss to the external current of the charge carried thereby. Through application of the principles of this invention, especial dopant concentrations and conductivity regions are established in a finite region around the linear and planar defects so that electrons and holes which are generated in the semiconductor region by incident radiation are substantially collected for external current as consequence thereof.

    Abstract translation: 本公开的实践获得了包含线性和平面类型的各种缺陷的晶体半导体太阳能电池的相对高效率的操作。 线性缺陷包括螺旋位错以及全部和部分位错。 平面缺陷包括双胞胎,堆垛层错,晶界和表面。 这样的缺陷通常包含复合中心,在半导体区域中产生的电子和空穴与由此携带的电荷的外部电流的损耗重新组合。 通过应用本发明的原理,在围绕线性和平面缺陷的有限区域内建立了特殊的掺杂剂浓度和导电性区域,使得通过入射辐射在半导体区域中产生的电子和空穴基本上被收集用于外部电流 其中。

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