Hydrogen gas recovery system and hydrogen gas separation and recovery method
    6.
    发明授权
    Hydrogen gas recovery system and hydrogen gas separation and recovery method 有权
    氢气回收系统和氢气分离回收方法

    公开(公告)号:US08778061B2

    公开(公告)日:2014-07-15

    申请号:US13501522

    申请日:2010-07-26

    申请人: Yasushi Kurosawa

    发明人: Yasushi Kurosawa

    IPC分类号: B01D53/02

    摘要: The reaction exhaust gas from which chlorosilanes and hydrogen chloride have been removed in a hydrogen chloride absorption unit (30) is introduced to an adsorption unit (50) to recover a purified hydrogen (S105). Activated carbon is packed in the adsorption unit (50), the gas, which is mainly composed of hydrogen, is passed through the activated carbon-packed layer during which unseparated chlorosilanes, hydrogen chloride, nitrogen, carbon monoxide, methane, and monosilane contained in the gas are adsorbed on the activated carbon and removed from the gas, and thereby the purified hydrogen is obtained. Nitrogen, carbon monoxide, methane and monosilane are a compressed gas in the state of adsorption, whereas hydrogen chloride and chlorosilanes are a liquid in the state of adsorption, and require a vaporization heat during desorption. Using these properties, the separation of hydrogen chloride and chlorosilanes from other impurity components is possible merely by separating the pathways for the desorbed gas.

    摘要翻译: 在氯化氢吸收单元(30)中已经除去氯硅烷和氯化氢的反应废气被引入吸附单元(50)以回收纯化的氢气(S105)。 活性炭被填充在吸附单元(50)中,主要由氢组成的气体通过活性炭填充层,在该活性炭填充层中,未分离的氯硅烷,氯化氢,氮,一氧化碳,甲烷和甲硅烷 气体被吸附在活性炭上并从气体中除去,从而获得纯化的氢。 氮,一氧化碳,甲烷和甲硅烷是处于吸附状态的压缩气体,而氯化氢和氯硅烷是处于吸附状态的液体,并且在解吸期间需要蒸发热。 使用这些性质,氯化氢和氯硅烷与其他杂质组分的分离只能通过分离解吸气体的途径来实现。