公开(公告)号：US20180318758A1

公开(公告)日：2018-11-08

申请号：US16030337

申请日：2018-07-09

申请人： Applied Materials, Inc.

发明人： Michael S. COX ,  Monique MCINTOSH ,  Colin John DICKINSON ,  Paul E. FISHER ,  Yutaka TANAKA ,  Zheng YUAN

IPC分类号： B01D53/32 ,  B01J19/08 ,  B01D53/64 ,  H01J37/32 ,  B01D53/70 ,  B01D53/76 ,  B01D53/54

CPC分类号： B01D53/32 ,  B01D53/54 ,  B01D53/64 ,  B01D53/70 ,  B01D53/76 ,  B01D2251/00 ,  B01D2251/10 ,  B01D2251/102 ,  B01D2251/104 ,  B01D2251/108 ,  B01D2251/20 ,  B01D2251/202 ,  B01D2251/204 ,  B01D2251/2062 ,  B01D2251/208 ,  B01D2251/502 ,  B01D2252/103 ,  B01D2257/55 ,  B01D2257/553 ,  B01D2257/556 ,  B01D2257/60 ,  B01D2257/7025 ,  B01D2257/93 ,  B01D2258/0216 ,  B01D2259/818 ,  B01J19/088 ,  B01J2219/0815 ,  B01J2219/0875 ,  B01J2219/0894 ,  H01J37/32091 ,  H01J37/321 ,  H01J37/3244 ,  H01J37/32522 ,  H01J37/32669 ,  H01J2237/002 ,  H01J2237/335 ,  Y02C20/20 ,  Y02C20/30

摘要： A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH4, H2O, H2, NF3, SF6, F2, HCl, HF, Cl2, and HBr. Representative condensing abating reagents include, for example, H2, H2O, O2, N2, O3, CO, CO2, NH3, N2O, CH4, and combinations thereof.

公开(公告)号：US20180001252A1

公开(公告)日：2018-01-04

申请号：US15541934

申请日：2015-01-07

申请人： MITSUBISHI HITACHI POWER SYSTEMS, LTD.,

发明人： Koichi Yokoyama ,  Eiji Miyamoto ,  Jun Shimamura

IPC分类号： B01D53/14 ,  B01D53/00 ,  C01B32/50 ,  C07C209/38 ,  B01D53/62

CPC分类号： B01D53/1418 ,  B01D53/005 ,  B01D53/1425 ,  B01D53/145 ,  B01D53/1475 ,  B01D53/62 ,  B01D2251/50 ,  B01D2251/502 ,  B01D2251/604 ,  B01D2252/204 ,  B01D2258/0283 ,  C01B32/50 ,  C07C209/38 ,  Y02C10/06

摘要： A method for decomposing a nitroso compound, comprising: adding an aqueous solution containing hydrogen halide to a liquid to be treated that contains the nitroso compound in such a manner that the hydrogen halide is present in an amount of 2 mol or more and 20 mol or less per mol of a nitroso group in the nitroso compound; and subsequently heating the resulting liquid to be treated at a temperature of not lower that 75° C. and not higher than a boiling point of water under ordinary pressure, thereby an amines are recovered.

公开(公告)号：US09649592B2

公开(公告)日：2017-05-16

申请号：US14638871

申请日：2015-03-04

申请人： Applied Materials, Inc.

发明人： Michael S. Cox ,  Monique McIntosh ,  Colin John Dickinson ,  Paul E. Fisher ,  Yutaka Tanaka ,  Zheng Yuan

IPC分类号： B01D53/32 ,  B01D53/64 ,  B01J19/08

CPC分类号： B01D53/32 ,  B01D53/54 ,  B01D53/64 ,  B01D53/70 ,  B01D53/76 ,  B01D2251/00 ,  B01D2251/10 ,  B01D2251/102 ,  B01D2251/104 ,  B01D2251/108 ,  B01D2251/20 ,  B01D2251/202 ,  B01D2251/204 ,  B01D2251/2062 ,  B01D2251/208 ,  B01D2251/502 ,  B01D2252/103 ,  B01D2257/55 ,  B01D2257/553 ,  B01D2257/556 ,  B01D2257/60 ,  B01D2257/7025 ,  B01D2257/93 ,  B01D2258/0216 ,  B01D2259/818 ,  B01J19/088 ,  B01J2219/0815 ,  B01J2219/0875 ,  B01J2219/0894 ,  H01J37/32091 ,  H01J37/321 ,  H01J37/3244 ,  H01J37/32522 ,  H01J37/32669 ,  H01J2237/002 ,  H01J2237/335 ,  Y02C20/20 ,  Y02C20/30

摘要： A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH4, H2O, H2, NF3, SF6, F2, HCl, HF, Cl2, and HBr. Representative condensing abating reagents include, for example, H2, H2O, O2, N2, O3, CO, CO2, NH3, N2O, CH4, and combinations thereof.

公开(公告)号：US20140205520A1

公开(公告)日：2014-07-24

申请号：US14126932

申请日：2012-06-15

申请人： Ingar F. Walder

发明人： Ingar F. Walder

IPC分类号： C22B3/06 ,  C22B26/22 ,  C22B26/20

CPC分类号： C22B3/06 ,  B01D53/62 ,  B01D53/80 ,  B01D2251/30 ,  B01D2251/40 ,  B01D2251/402 ,  B01D2251/404 ,  B01D2251/502 ,  B01D2251/504 ,  B01D2251/506 ,  B01D2251/60 ,  B01D2251/602 ,  B01D2251/70 ,  B01D2257/504 ,  B01D2258/0283 ,  C22B3/02 ,  C22B26/20 ,  C22B26/22 ,  Y02C10/04 ,  Y02P10/234

摘要： A method for leaching of minerals and sequestration of CO2 is disclosed, wherein the method comprises forming a rock pile; injecting exhaust gas containing CO2 in the lower part of the rock pile; spraying leaching liquid on top of the rock pile; collecting enriched leaching liquid from a lower part of the rock pile; precipitating mineral carbonates from the enriched leaching liquid, or further extracting dissolved elements or compounds.

摘要翻译： 公开了一种矿物的浸出方法和二氧化碳的封存方法，其中包括形成岩石桩; 在岩石桩的下部注入含有二氧化碳的废气; 在岩石顶部喷涂浸出液; 从岩石桩的下部收集富集的浸出液; 从富集的浸出液中沉淀出矿物碳酸盐，或进一步提取溶解的元素或化合物。

公开(公告)号：US20120128540A1

公开(公告)日：2012-05-24

申请号：US13388496

申请日：2010-08-05

申请人： Rikuma Shijo ,  Nobuyasu Sakata ,  Kiyonori Kushioka ,  Moritoshi Murakami ,  Nobuyuki Ukai

发明人： Rikuma Shijo ,  Nobuyasu Sakata ,  Kiyonori Kushioka ,  Moritoshi Murakami ,  Nobuyuki Ukai

IPC分类号： B01D53/56

CPC分类号： B01F3/04049 ,  B01D53/501 ,  B01D53/64 ,  B01D53/75 ,  B01D53/8625 ,  B01D53/8631 ,  B01D53/8665 ,  B01D53/90 ,  B01D2251/2062 ,  B01D2251/404 ,  B01D2251/502 ,  B01D2251/606 ,  B01D2257/602 ,  B01F5/0451 ,  B01F5/0453 ,  B01F5/0456 ,  B01F5/0461 ,  B01F5/0616 ,  F23J15/02 ,  F23J2215/60

摘要： An air pollution control device is an air pollution control device for reducing the amounts of NOx and Hg contained in flue gas 12 from a boiler 11. The air pollution control device includes: NH4Cl solution supply means 16 for spraying an NH4Cl solution 14 by a spray nozzle 15 into a flue gas duct 13 at the downstream of the boiler 11; a mixer 17 provided on the downstream side of a region where NH4Cl is gasified, for promoting mixing, with the flue gas 12, HCl and NH3 which are generated when NH4Cl is gasified; a reduction-denitration device 18 including a denitration catalyst for reducing NOx in the flue gas 12 with NH3 and for oxidizing Hg under the coexistence with HCl; and a wet desulfurization device 22 for reducing the amount of Hg oxidized in the reduction-denitration device 18 using a limestone-gypsum slurry 21.

摘要翻译： 空气污染控制装置是用于减少来自锅炉11的烟道气12中所含的NOx和Hg的量的空气污染控制装置。空气污染控制装置包括：NH 4 Cl溶液供给装置16，用于通过喷雾喷射NH 4 Cl溶液14 喷嘴15进入锅炉11下游的烟道13; 设置在NH 4 Cl气化区域的下游侧的混合器17，用于促进与NH 4 Cl气化时产生的烟道气12，HCl和NH 3的混合; 还原脱硝装置18，其包括用于通过NH 3还原烟道气12中的NOx并在与HCl共存的情况下氧化Hg的脱硝催化剂; 以及用于使用石灰石 - 石膏浆料21减少还原脱硝装置18中氧化的Hg量的湿式脱硫装置22。

公开(公告)号：US07901645B2

公开(公告)日：2011-03-08

申请号：US12640629

申请日：2009-12-17

申请人： Nobuyuki Ukai ,  Moritoshi Murakami ,  Susumu Okino ,  Tatsuto Nagayasu ,  Seiji Kagawa

发明人： Nobuyuki Ukai ,  Moritoshi Murakami ,  Susumu Okino ,  Tatsuto Nagayasu ,  Seiji Kagawa

IPC分类号： B01D53/50 ,  B01D53/56 ,  B01D53/64 ,  B01D53/74

CPC分类号： B01D53/8625 ,  B01D53/501 ,  B01D53/64 ,  B01D53/90 ,  B01D2251/206 ,  B01D2251/2062 ,  B01D2251/404 ,  B01D2251/502 ,  B01D2251/606 ,  B01D2257/602 ,  Y10S423/05

摘要： A mercury reduction system according to the present embodiment is a mercury reduction system that reduces NOx and Hg in flue gas discharged from a boiler, and includes a chemical supplying unit that mixes an NH4Cl solution, an NH3 solution, and an HCl solution in liquid states, and supplies a mixed solution into a flue provided downstream of the boiler, a reduction denitration apparatus that includes a denitration catalyst reducing NOx in the flue gas with NH3 and oxidizing Hg in the presence of HCl, and a wet desulfurization apparatus that reduces Hg oxidized in the reduction denitration apparatus with limestone-gypsum slurry.

摘要翻译： 根据本实施方案的汞还原系统是减少从锅炉排出的烟道气中的NOx和Hg的汞还原系统，并且包括将NH 4 Cl溶液，NH 3溶液和HCl溶液以液态混合的化学供应单元 并将混合溶液供应到设置在锅炉下游的烟道中，还原脱硝装置包括脱硝催化剂，其在NH 3存在下还原NH 3和在氧化汞中还原废气中的NO x，以及减少Hg氧化的湿式脱硫装置 在具有石灰石 - 石膏浆料的还原脱硝装置中。

公开(公告)号：US07887768B2

公开(公告)日：2011-02-15

申请号：US12522044

申请日：2007-07-18

申请人： Shintaro Honjo ,  Katsumi Nochi ,  Yoshiaki Obayashi ,  Masashi Kiyosawa

发明人： Shintaro Honjo ,  Katsumi Nochi ,  Yoshiaki Obayashi ,  Masashi Kiyosawa

IPC分类号： B01D53/56 ,  B01D53/64 ,  B01D53/74

CPC分类号： B01D53/64 ,  B01D53/8625 ,  B01D53/8665 ,  B01D2251/206 ,  B01D2251/2062 ,  B01D2251/502 ,  B01D2257/602 ,  F23J15/003 ,  F23J15/02 ,  F23J2215/20 ,  F23J2215/60 ,  F23J2219/10 ,  F23J2219/60 ,  F23L15/04 ,  Y02A50/2328 ,  Y02E20/348

摘要： An air pollution control apparatus according to the present invention reduces nitrogen oxides and oxidizes mercury in flue gas 16 discharged from a boiler by an ammonia denitrating catalyst. The air pollution control apparatus includes an economizer bypassing unit 15a that diverts high-temperature combustion gas 11 to a downstream side while bypassing an economizer 15 provided in a gas flue 10a for combustion gas 11 from the boiler, provided with an ammonium-chloride supply unit 101 that supplies powdery ammonium chloride (NH4Cl) to the economizer bypassing unit 15a. The air pollution control apparatus sublimates the ammonium chloride in an atmosphere at a high temperature of the combustion gas 11, and supplies hydrogen chloride and ammonium into the flue gas flue 102.

摘要翻译： 根据本发明的空气污染控制装置通过氨脱硝催化剂还原氮氧化物并氧化从锅炉排出的废气16中的汞。 空气污染控制装置包括节能器旁通单元15a，其将高温燃烧气体11转移到下游侧，同时旁路设置有来自锅炉的用于燃烧气体11的气体烟道气体10a的节能器15，设置有氯化铵供应单元 101向粉末状氯化铵（NH 4 Cl）供应到节能器旁路单元15a。 空气污染控制装置在燃烧气体11的高温气氛中使氯化铵升华，向烟道气102供给氯化氢和铵。

公开(公告)号：US20110002829A1

公开(公告)日：2011-01-06

申请号：US12640725

申请日：2009-12-17

申请人： Nobuyuki Ukai ,  Moritoshi Murakami ,  Susumu Okino ,  Tatsuto Nagayasu ,  Seiji Kagawa

发明人： Nobuyuki Ukai ,  Moritoshi Murakami ,  Susumu Okino ,  Tatsuto Nagayasu ,  Seiji Kagawa

IPC分类号： B01D53/64 ,  B01D50/00 ,  B01D53/56

CPC分类号： B01D53/64 ,  B01D53/501 ,  B01D53/8625 ,  B01D53/90 ,  B01D2251/2062 ,  B01D2251/404 ,  B01D2251/502 ,  B01D2251/606 ,  B01D2257/602 ,  Y10S423/05

摘要： A mercury reduction system according to the present embodiment is a mercury reduction system that reduces NOx and Hg in flue gas discharged from a boiler, and includes an NH4Cl solution spraying unit that sprays an NH4Cl solution into a flue of the boiler in a liquid state, a mixed gas spraying unit that is provided downstream of the NH4Cl solution spraying unit and sprays mixed gas containing NH3 gas and HCl gas into the flue, a reduction denitration apparatus that includes a denitration catalyst reducing NOx in the flue gas with NH3 and oxidizing Hg in the presence of HCl, and a wet desulfurization apparatus that reduces Hg oxidized in the reduction denitration apparatus with a limestone-gypsum slurry.

摘要翻译： 根据本实施方式的汞还原系统是减少从锅炉排出的烟道气中的NOx和Hg的汞还原系统，并且包括以液体状态将NH 4 Cl溶液喷射到锅炉的烟道中的NH 4 Cl溶液喷射单元， 一种混合气体喷射装置，其设置在NH 4 Cl溶液喷射装置的下游，并将含有NH 3气体和HCl气体的混合气体喷射到烟道中;还原脱硝装置，其包括脱硝催化剂，其用NH 3还原废气中的NO x并将Hg氧化 HCl的存在，以及用石灰石 - 石膏浆料还原还原脱硝装置中的Hg氧化的湿式脱硫装置。

公开(公告)号：US20100011956A1

公开(公告)日：2010-01-21

申请号：US12459685

申请日：2009-07-06

申请人： David Kurt Neumann ,  Nicholas J. Miller ,  Boris R. Nizamov ,  Thomas Lee Henshaw ,  Andrew R. Awtry ,  Jason K. Brasseur ,  Keith R. Hobbs ,  Jason A. Tobias ,  William E. McDermott

发明人： David Kurt Neumann ,  Nicholas J. Miller ,  Boris R. Nizamov ,  Thomas Lee Henshaw ,  Andrew R. Awtry ,  Jason K. Brasseur ,  Keith R. Hobbs ,  Jason A. Tobias ,  William E. McDermott

IPC分类号： B01D53/18 ,  B01F3/04

CPC分类号： B01D53/1475 ,  B01D53/1493 ,  B01D53/18 ,  B01D53/62 ,  B01D53/78 ,  B01D2251/106 ,  B01D2251/2065 ,  B01D2251/30 ,  B01D2251/40 ,  B01D2251/402 ,  B01D2251/404 ,  B01D2251/502 ,  B01D2251/80 ,  B01D2252/20447 ,  B01D2257/302 ,  B01D2257/304 ,  B01D2257/404 ,  B01D2257/406 ,  B01D2257/504 ,  B01D2257/602 ,  B01D2259/124 ,  B01D2259/126 ,  C10L3/10 ,  C10L3/102 ,  H01S3/095 ,  H01S3/2215 ,  Y02C10/04 ,  Y02C10/06

摘要： The invention relates to a gas liquid contactor and effluent cleaning system and method and more particularly to an array of nozzles configured to produce uniformly spaced flat liquid jets shaped to minimize disruption from a gas. An embodiment of the invention is directed towards a gas liquid contactor module including a liquid inlet and outlet and a gas inlet and outlet. An array of nozzles is in communication with the liquid inlet and the gas inlet. The array of nozzles is configured to produce uniformly spaced flat liquid jets shaped to minimize disruption from a gas flow and maximize gas flow and liquid flow interactions while rapidly replenishing the liquid.

摘要翻译： 本发明涉及一种气液接触器和流出物清洁系统和方法，更具体地涉及一种喷嘴阵列，其被配置成产生均匀间隔开的平坦的液体射流成形为使气体的破坏最小化。 本发明的一个实施例涉及一种包括液体入口和出口以及气体入口和出口的气液接触器模块。 喷嘴阵列与液体入口和气体入口连通。 喷嘴阵列被配置成产生均匀间隔开的扁平液体射流，其形状最小化气流的破坏，并最大化气体流动和液体流动相互作用，同时快速补充液体。

公开(公告)号：US20070180990A1

公开(公告)日：2007-08-09

申请号：US10591856

申请日：2005-03-21

申请人： William Downs ,  George Farthing

发明人： William Downs ,  George Farthing

IPC分类号： B01D53/02

CPC分类号： B01D53/10 ,  B01D53/64 ,  B01D2251/10 ,  B01D2251/502 ,  B01D2253/102 ,  B01D2257/602

摘要： A halogen-containing gas is injected into a flowing transport air/sorbent stream at a point close to the point where the sorbent and transport air first mix to maximize the residence time available for the halogen-containing compound to be adsorbed onto the sorbent surface prior to the sorbent being injected into a flue gas containing mercury. This process maximizes the benefit and utilization of the halogen-containing reagent by placing it exactly where it is needed to facilitate elemental mercury removal—on the surface of the sorbent. The sorbent particles with their loading of adsorbed halogen-containing reagent enter the flue gas with a high reactivity for the removal of elemental mercury.

摘要翻译： 在接近吸附剂和运输空气首先混合的点处将含卤素的气体注入流动的输送空气/吸附剂流中，以最大限度地提供可用于含卤素化合物吸附到吸附剂表面上的停留时间 将吸附剂注入含有汞的烟道气中。 该方法通过将其确切地置于吸附剂表面上以便促进元素汞去除所需的位置，使得含卤试剂的益处和利用最大化。 具有吸附的含卤素试剂负载的吸附剂颗粒进入具有高反应性的烟道气以去除元素汞。