STRESS REDUCTION LAYER BASED ON COATING TECHNIQUE

    公开(公告)号:US20230165162A1

    公开(公告)日:2023-05-25

    申请号:US18058426

    申请日:2022-11-23

    CPC classification number: H01L43/065 H01L23/562 H01L23/3107

    Abstract: An integrated sensor and method for manufacturing the sensor includes a first component having a first material with a predetermined first value of coefficient of thermal expansion (CTE), and a second component over the first component. The second component includes a second material with a predetermined second value of CTE different from the first value. An interlayer is provided by molecular layer deposition, for minimizing stress caused by coefficient of thermal expansion mismatch between the first and second components. The interlayer includes an organic-inorganic hybrid polymer compound.

    Semiconductor device
    5.
    发明授权

    公开(公告)号:US10060991B2

    公开(公告)日:2018-08-28

    申请号:US15814986

    申请日:2017-11-16

    CPC classification number: G01R33/077 H01L43/04 H01L43/065

    Abstract: Provided is a semiconductor device including a vertical Hall element with improved sensitivity. The vertical Hall element includes: a semiconductor layer of a second conductivity type formed on the semiconductor substrate; a plurality of electrodes aligned along a straight line on a surface of the semiconductor layer and being impurity regions of the second conductivity type being higher in concentration than the semiconductor layer; a plurality of electrode isolation diffusion layers of the first conductivity type respectively arranged between adjacent electrodes of the plurality of electrodes on the surface of the semiconductor layer to isolate the plurality of electrodes from one another; and embedded layers being an impurity region of the second conductivity type which is higher in concentration than the semiconductor layer and being respectively provided substantially right below one of the plurality of electrode isolation diffusion layers between the semiconductor substrate and the semiconductor layer.

Patent Agency Ranking