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公开(公告)号：US20200020716A1
公开(公告)日：2020-01-16
申请号：US16251337
申请日：2019-01-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jun Hyoung KIM , Kwang Soo KIM , Geun Won LIM
IPC: H01L27/11582 , H01L27/11573 , H01L27/1157 , H01L27/11565 , H01L23/522 , H01L23/528 , H01L21/28
Abstract: A semiconductor memory device includes a peripheral circuit structure including a peripheral circuit insulating layer, a middle connection structure on the peripheral circuit insulating layer, the middle connection structure including a middle connection insulating layer, and a bottom surface of the middle connection insulating layer is in contact with a top surface of the peripheral circuit insulating layer, stack structures on sides of the middle connection structure, and channel structures extending vertically through each of the stack structures, wherein at least one side surface of the middle connection insulating layer is an inclined surface, a lateral sectional area of the middle connection insulating layer decreasing in an upward direction oriented away from the peripheral circuit insulating layer.
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2.发明申请公开(公告)号：US20190393240A1
公开(公告)日：2019-12-26
申请号：US16268642
申请日：2019-02-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Kwang Soo KIM , Si Wan Kim , Jun Hyoung Kim , Kyoung Taek Oh , Bong Hyun Choi
IPC: H01L27/11582 , H01L27/11565 , H01L27/11573 , H01L27/1157 , H01L29/06 , H01L29/423
Abstract: A three-dimensional semiconductor memory device includes: a base substrate; a gate stack structure disposed on the base substrate, and including gate electrodes stacked in a direction substantially perpendicular to a top surface of the base substrate; a penetration region penetrating through the gate stack structure and surrounded by the gate stack structure; and vertical channel structures passing through the gate stack structure. The lowermost gate electrodes among the gate electrodes are spaced apart from each other, and a portion of at least one of the lowermost gate electrodes has a shape bent toward the penetration region.
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公开(公告)号：US20180358374A1
公开(公告)日：2018-12-13
申请号：US15868084
申请日：2018-01-11
Applicant: Samsung Electronics Co., Ltd.
Inventor： Kwang Soo KIM , Hyun Suk KIM , Soon Hyuk HONG , Doo Hee HWANG
IPC: H01L27/11582 , H01L29/423 , H01L29/10 , H01L23/532 , H01L23/528 , H01L27/11565 , H01L29/792
CPC classification number: H01L27/11582 , H01L23/5283 , H01L23/53271 , H01L27/11565 , H01L27/11568 , H01L27/11573 , H01L29/1037 , H01L29/4234 , H01L29/7926
Abstract: A vertical memory device includes a gate structure including a plurality of gate electrode layers stacked on a substrate, a plurality of channel structures penetrating through the gate structure and extending in a direction perpendicular to an upper surface of the substrate, a common source line penetrating the gate structure and extending in a first direction, a metal line extended above the common source line in the first direction, and a plurality of connection portions interposed between the metal line and the common source line.
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公开(公告)号：US20180164227A1
公开(公告)日：2018-06-14
申请号：US15800338
申请日：2017-11-01
Applicant: Samsung Electronics Co., Ltd.
Inventor： Taejoong KIM , Kwang Soo KIM , lwa YOICHIRO , Byeonghwan JEON , Yougduk KIM , Wansung PARK , Tae-Heung AHN , Jaechol JOO
CPC classification number: G01N21/94 , G01B11/06 , G01N21/9501 , G01N21/956
Abstract: Disclosed is a substrate inspection system. The substrate inspection system comprises a substrate inspection apparatus that inspects a substrate by irradiating light thereto. The substrate inspection apparatus comprises a light source to irradiate light onto the substrate, a detector to receive light from the substrate, and a controller to control an inspection mode of the substrate inspection apparatus by controlling the light source and the detector. The inspection mode comprises a first inspection mode to inspect whether a particle is present on the substrate and a second inspection mode to inspect a thickness of the substrate.
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公开(公告)号：US20180144998A1
公开(公告)日：2018-05-24
申请号：US15626302
申请日：2017-06-19
Applicant: Samsung Electronics Co., Ltd.
Inventor： Sung-Won PARK , Jeong-Su HA , Sangbong PARK , Kwang Soo KIM , Byeong Kyu CHA
CPC classification number: H01L22/20 , G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2021/8887 , G06T7/0004 , G06T2207/10056 , G06T2207/30148 , H01L22/12 , H04N7/181
Abstract: Disclosed are an inspection apparatus and a method of manufacturing a semiconductor device using the same. The inspection apparatus includes a stage configured to receive a substrate, an objective lens on the stage and configured to enlarge the substrate optically, an ocular lens on the objective lens and configured to form at its image plane an image of the substrate, and a plurality of sensors above the ocular lens and in the image plane of the ocular lens.
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Patent Agency Ranking
公开(公告)号：US20170258286A1
公开(公告)日：2017-09-14
申请号：US15606497
申请日：2017-05-26
Applicant: SAMSUNG ELECTRONICS CO. LTD.
Inventor： Kwang Soo KIM , Deok Jin Kim , Myung Bae Bang , Sung Gu Lee , Byung Ryel In , Young Kwan Kim
Abstract: A motor apparatus having a high efficiency and reducing manufacturing cost by using a cost effective ferrite permanent magnet includes a rotatable shaft, a fan connected to one side of the shaft to generate a flow of air, a stator including stator cores arranged in a circumferential direction, and a coil wound around the stator core, and a rotor disposed at an inside of the stator and provided in a form of a cylinder having a passage allowing the shaft to pass through the rotor includes a rotor core provided with a protrusion structure and one or more ferrite magnets coupled to the rotor core to provide a magnetic force. By using a ferrite magnet, when compared to a conventional universal motor, a superior efficiency is obtained, and when compared to a BLDC motor using a Nd magnet, a low cost BLDC motor is implemented.
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公开(公告)号：US20150357871A1
公开(公告)日：2015-12-10
申请号：US14729466
申请日：2015-06-03
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Young Kwan KIM , Byung Ryel IN , Deok Jin KIM , Kwang Soo KIM , Jong Jin PARK , Myung Bae BANK , Keung Young YOON
Abstract: A motor assembly having an internal channel passing an interior of a rotor, and a method for producing the same are provided. The motor assembly includes an adhesive flowing along the internal channel, and the rotor can be firmly coupled and improving durability and production efficiency of the rotor.
Abstract translation: 提供具有通过转子内部的内部通道的电动机组件及其制造方法。 马达组件包括沿着内部通道流动的粘合剂，并且转子可以牢固地联接并提高转子的耐久性和生产效率。
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8.发明公开公开(公告)号：US20230184535A1
公开(公告)日：2023-06-15
申请号：US17969200
申请日：2022-10-19
Applicant: Samsung Electronics Co., Ltd.
Inventor： Seung Woo LEE , Wook Rae KIM , Kwang Soo KIM , Myung Jun LEE , Seo Yeon JEONG , Sung Ho JANG
IPC: G01B9/02055 , G01B9/02015 , G01B9/02 , G01B9/02001
CPC classification number: G01B9/02063 , G01B9/0203 , G01B9/02083 , G01B9/02011 , H01L22/12
Abstract: A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.
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公开(公告)号：US20170116727A1
公开(公告)日：2017-04-27
申请号：US15247537
申请日：2016-08-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Kwang Soo KIM , Sangbong Park , Byeonghwan Jeon , Youngduk Kim
IPC: G06T7/00 , G02B13/00 , G02B27/14 , H01L21/66 , G01N21/95 , G01N21/956 , H01L21/67 , G02B27/09 , H04N5/247
CPC classification number: G06T7/0008 , G01N21/9501 , G01N21/95623 , G01N2201/061 , G02B13/0095 , G02B27/0988 , G02B27/14 , G06T7/001 , G06T2207/20224 , G06T2207/30148 , H01L21/67276 , H01L22/12 , H04N5/247
Abstract: An inspection apparatus includes a light source device providing incident light to a substrate, an objective lens receiving reflection light reflected from the substrate, a light splitting device disposed over the objective lens, first and second optical sensors disposed at both sides of the light splitting device, respectively, and first and second spatial filters disposed between the first optical sensor and the substrate and between the second optical sensor and the substrate, respectively. The first and second spatial filters transmit the reflection light in different forms from each other.
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公开(公告)号：US20190139985A1
公开(公告)日：2019-05-09
申请号：US16015702
申请日：2018-06-22
Applicant: Samsung Electronics Co., Ltd.
Inventor： Kwang Soo KIM , Young Jin JUNG , Jae Duk LEE
IPC: H01L27/11597 , H01L29/423 , H01L27/02 , H01L29/10 , H01L27/1159
CPC classification number: H01L27/11597 , H01L21/0337 , H01L21/31144 , H01L27/0207 , H01L27/11519 , H01L27/11521 , H01L27/11526 , H01L27/11548 , H01L27/11551 , H01L27/11556 , H01L27/1156 , H01L27/11565 , H01L27/11568 , H01L27/11575 , H01L27/11578 , H01L27/11582 , H01L27/1159 , H01L27/11595 , H01L29/1037 , H01L29/4234 , H01L29/66545 , H01L29/66833 , H01L29/7926
Abstract: A three-dimensional semiconductor device is provided including main separation structures disposed on a substrate, and extending in a first direction, parallel to a surface of the substrate; gate electrodes disposed between the main separation structures; a first secondary separation structure penetrating through the gate electrodes, between the main separation structures, and including a first linear portion and a second linear portion, having end portions opposing each other; and second secondary separation structures disposed between the first secondary separation structure and the main separation structures, and penetrating through the gate electrodes. The second secondary separation structures have end portions opposing each other between the second linear portion and the main separation structures.
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