公开(公告)号：US20230184535A1

公开(公告)日：2023-06-15

申请号：US17969200

申请日：2022-10-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Woo LEE ,  Wook Rae KIM ,  Kwang Soo KIM ,  Myung Jun LEE ,  Seo Yeon JEONG ,  Sung Ho JANG

IPC: G01B9/02055 ,  G01B9/02015 ,  G01B9/02 ,  G01B9/02001

CPC classification number: G01B9/02063 ,  G01B9/0203 ,  G01B9/02083 ,  G01B9/02011 ,  H01L22/12

Abstract: A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.