公开(公告)号：US08456186B2

公开(公告)日：2013-06-04

申请号：US11769432

申请日：2007-06-27

申请人： Kiyoshi Takekoshi ,  Hisatomi Hosaka ,  Junichi Hagihara ,  Kunihiko Hatsushika ,  Takamasa Usui ,  Hisashi Kaneko ,  Nobuo Hayasaka ,  Yoshiyuki Ido

发明人： Kiyoshi Takekoshi ,  Hisatomi Hosaka ,  Junichi Hagihara ,  Kunihiko Hatsushika ,  Takamasa Usui ,  Hisashi Kaneko ,  Nobuo Hayasaka ,  Yoshiyuki Ido

IPC分类号： G01R31/02 ,  G01R31/00

CPC分类号： G01R31/2862 ,  G01R1/0433 ,  G01R1/0491 ,  G01R31/2831 ,  G01R31/286 ,  G01R31/2865 ,  G01R31/2867 ,  G01R31/287 ,  G01R31/2886

摘要： A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each other. The wafer storage section transmits/receives a test signal to/from a measurement section and has a hermetic and heat insulating structure. The wafer storage section has a pressure mechanism which presses the contactor and a heating mechanism which directly heats the wafer totally in contact with the contactor to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.

摘要翻译： 本发明的可靠性评价试验装置包括晶片存储部，其以形成在晶片上的多个器件的电极焊盘和接触器的凸块完全电接触的状态存储晶片。 晶片存储部分向/从测量部分发送/接收测试信号，并具有密封和隔热结构。 晶片存储部分具有压力接触器的压力机构和将与接触器完全接触的晶片直接加热到预定高温的加热机构。 在加速条件下评估形成在半导体晶片上的互连膜和绝缘膜的可靠性。

公开(公告)号：US08232197B2

公开(公告)日：2012-07-31

申请号：US12585238

申请日：2009-09-09

申请人： Makoto Honda ,  Kaori Yomogihara ,  Kazuhiro Murakami ,  Masanori Numano ,  Takahito Nagamatsu ,  Hideaki Harakawa ,  Hideto Matsuyama ,  Hirokazu Ezawa ,  Hisashi Kaneko

发明人： Makoto Honda ,  Kaori Yomogihara ,  Kazuhiro Murakami ,  Masanori Numano ,  Takahito Nagamatsu ,  Hideaki Harakawa ,  Hideto Matsuyama ,  Hirokazu Ezawa ,  Hisashi Kaneko

IPC分类号： H01L21/4763 ,  H01L21/28

CPC分类号： H01L21/76802 ,  H01L21/02063 ,  H01L21/31116 ,  H01L21/76814

摘要： An insulating film formed on a conducting layer is dry-etched so as to make a connection hole in the insulating film to expose the conducting layer. Plasma is supplied onto the exposed conducting layer to dry-clean a damage layer produced in the connection hole. A product produced in the connection hole as a result of the dry cleaning is removed by a wet process. An oxide film formed in the connection hole as a result of the wet process is etched by a chemical dry process using a gas including either NF3 or HF. A thermally decomposable reaction product produced as a result of the etching is removed by heat treatment.

摘要翻译： 对形成在导电层上的绝缘膜进行干蚀刻，以在绝缘膜上形成连接孔，使导电层露出。 将等离子体供应到暴露的导电层上以干燥在连接孔中产生的损伤层。 作为干式清洗的连接孔中产生的产品通过湿法除去。 通过使用包括NF 3或HF的气体的化学干法，蚀刻形成在连接孔中的作为湿法处理的结果的氧化膜。 通过热处理除去作为蚀刻结果产生的可热分解的反应产物。

公开(公告)号：US07667332B2

公开(公告)日：2010-02-23

申请号：US11265231

申请日：2005-11-03

申请人： Masaaki Hatano ,  Motoya Okazaki ,  Junichi Wada ,  Takeshi Nishioka ,  Hisashi Kaneko ,  Takeshi Fujimaki ,  Kazuyuki Higashi ,  Kenji Yoshida ,  Noriaki Matsunaga

发明人： Masaaki Hatano ,  Motoya Okazaki ,  Junichi Wada ,  Takeshi Nishioka ,  Hisashi Kaneko ,  Takeshi Fujimaki ,  Kazuyuki Higashi ,  Kenji Yoshida ,  Noriaki Matsunaga

IPC分类号： H01L23/52 ,  H01L23/48 ,  H01L29/40

CPC分类号： G06F17/5068

摘要： A method for generating a pattern includes reading out an interconnect layout and a hole layout, the interconnect layout prescribing interconnect patterns, the hole layout prescribing hole patterns configured to connect to the interconnect patterns; extracting one of the hole patterns to be connected within the same interconnect layer level to one of the interconnect patterns in a pattern processing area; extracting a first processing area including the extracted hole pattern; calculating a first pattern density of the interconnect patterns included in the first processing area; and generating first additional patterns in the first processing area based on the first pattern density.

摘要翻译： 一种用于产生图案的方法包括：读出互连布局和孔布局;布置规定互连图案的布局布局;布置配置为连接到互连图案的孔图案的孔布局; 在图案处理区域中将在相同互连层级中连接的孔图案中的一个提取到所述互连图案之一; 提取包括所提取的孔图案的第一处理区域; 计算包括在第一处理区域中的互连图案的第一图案密度; 以及基于所述第一图案密度在所述第一处理区域中生成第一附加图案。

公开(公告)号：US20090290261A1

公开(公告)日：2009-11-26

申请号：US12358094

申请日：2009-01-22

申请人： Hisashi Kaneko ,  Keiji Aruga

发明人： Hisashi Kaneko ,  Keiji Aruga

IPC分类号： G11B21/16

CPC分类号： G11B5/486

摘要： A carriage block body is coupled to a support shaft for relative rotation. A carriage arm extends from the carriage block body along an imaginary plane perpendicular to the longitudinal axis of the support shaft. A head suspension is attached to the tip end of the carriage arm. A wiring extends outside the contour of the head suspension along the side of the carriage arm. A projection protrudes from the side of the carriage arm. An adhesive is utilized to bond the wiring to the projection. Even though airflow generated along the surface of a rotating disk medium collides against the carriage arm, the wiring is reliably prevented from fluttering outside the contour of the head suspension. The vibration of the wiring is thus significantly suppressed. The carriage arm is prevented from vibrating.

摘要翻译： 滑架主体联接到支撑轴以进行相对旋转。 滑架臂沿着与支撑轴的纵向轴线垂直的假想平面从滑架块体延伸。 头悬挂装在托架臂的末端。 布线沿着支架臂的侧面延伸到头部悬架的轮廓之外。 突出部从支架臂的侧面突出。 使用粘合剂将布线粘合到突起。 即使沿着旋转盘介质的表面产生的气流与托架臂碰撞，也可以可靠地防止布线在头部悬架的轮廓外部飘动。 因此，显着地抑制了布线的振动。 防止支架臂振动。

公开(公告)号：US20090067086A1

公开(公告)日：2009-03-12

申请号：US12175051

申请日：2008-07-17

申请人： Hisashi Kaneko ,  Yoshiharu Matsuda

发明人： Hisashi Kaneko ,  Yoshiharu Matsuda

IPC分类号： G11B5/012

CPC分类号： G11B33/148 ,  G11B5/40 ,  G11B5/6005 ,  G11B25/043 ,  G11B33/08

摘要： A storage device includes plural recording media, a housing configured to accommodate the plural recording media, a plate that is fixed and extends round between two adjacent recording media in the housing, plural sliders each of which is mounted with a magnetic head that is configured to record information in or reproduce the information from a corresponding one of the plural recording media, and plural arms, each of which is mounted with one of the plural sliders only on a single surface, and configured to move the one of the plural sliders.

摘要翻译： 存储装置包括多个记录介质，被配置为容纳多个记录介质的壳体，在壳体中的两个相邻的记录介质之间固定并延伸的板，多个滑块，每个滑块被安装有磁头，该磁头被配置为 将信息记录在多个记录介质中的相应一个记录介质中，或者从多个记录介质中的相应一个记录介质再现信息，以及多个臂，其中每个臂仅在单个表面上安装有多个滑块中的一个，并且构造成移动多个滑块中的一个。

公开(公告)号：US20080237863A1

公开(公告)日：2008-10-02

申请号：US12081818

申请日：2008-04-22

申请人： Hiroshi Toyoda ,  Mitsuhiro Nakao ,  Masahiko Hasunuma ,  Hisashi Kaneko ,  Atsuko Sakata ,  Toshiaki Komukai

发明人： Hiroshi Toyoda ,  Mitsuhiro Nakao ,  Masahiko Hasunuma ,  Hisashi Kaneko ,  Atsuko Sakata ,  Toshiaki Komukai

IPC分类号： H01L23/49

CPC分类号： H01L21/76846 ,  H01L21/76834 ,  H01L21/76849 ,  H01L21/76858 ,  H01L21/76886 ,  H01L21/76888 ,  H01L22/32 ,  H01L23/53233 ,  H01L23/53238 ,  H01L23/53295 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/02166 ,  H01L2224/0392 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05009 ,  H01L2224/05017 ,  H01L2224/05082 ,  H01L2224/05083 ,  H01L2224/05093 ,  H01L2224/05147 ,  H01L2224/05166 ,  H01L2224/05181 ,  H01L2224/05187 ,  H01L2224/05546 ,  H01L2224/05552 ,  H01L2224/05557 ,  H01L2224/05558 ,  H01L2224/05559 ,  H01L2224/05567 ,  H01L2224/05605 ,  H01L2224/05611 ,  H01L2224/05613 ,  H01L2224/05616 ,  H01L2224/0562 ,  H01L2224/05624 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/13099 ,  H01L2224/13105 ,  H01L2224/13109 ,  H01L2224/13111 ,  H01L2224/13113 ,  H01L2224/13116 ,  H01L2224/1312 ,  H01L2224/13124 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/45105 ,  H01L2224/45109 ,  H01L2224/45111 ,  H01L2224/45113 ,  H01L2224/45116 ,  H01L2224/4512 ,  H01L2224/45124 ,  H01L2224/45139 ,  H01L2224/45144 ,  H01L2224/45147 ,  H01L2224/4807 ,  H01L2224/48453 ,  H01L2224/48463 ,  H01L2224/48505 ,  H01L2224/48611 ,  H01L2224/48616 ,  H01L2224/48624 ,  H01L2224/48639 ,  H01L2224/48644 ,  H01L2224/48647 ,  H01L2224/48711 ,  H01L2224/48716 ,  H01L2224/48724 ,  H01L2224/48739 ,  H01L2224/48747 ,  H01L2224/48799 ,  H01L2224/48805 ,  H01L2224/48811 ,  H01L2224/48813 ,  H01L2224/48816 ,  H01L2224/4882 ,  H01L2224/48824 ,  H01L2224/48839 ,  H01L2224/48844 ,  H01L2224/48847 ,  H01L2224/85375 ,  H01L2924/0002 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01031 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/01042 ,  H01L2924/01044 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01072 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01083 ,  H01L2924/01327 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/00014 ,  H01L2924/04941 ,  H01L2224/05609 ,  H01L2924/00 ,  H01L2224/48744 ,  H01L2224/48713 ,  H01L2224/48705 ,  H01L2224/4872 ,  H01L2224/48605 ,  H01L2224/48613 ,  H01L2224/4862 ,  H01L2924/00015

摘要： A semiconductor device, which is comprised of a copper wiring layer which is formed above a semiconductor substrate, a pad electrode layer which conducts electrically to the copper wiring layer and has an alloy, which contains copper and a metal whose oxidation tendency is higher than copper, formed to extend to the bottom surface, and an insulating protective film which has an opening extended to the pad electrode layer, is provided.

摘要翻译： 一种半导体器件，其由形成在半导体衬底上的铜布线层构成，该电极层与铜布线层电连接并具有合金，所述焊接电极层含有铜和氧化倾向高于铜的金属 形成为延伸到底表面，并且具有延伸到焊盘电极层的开口的绝缘保护膜。

公开(公告)号：US07414815B2

公开(公告)日：2008-08-19

申请号：US11819427

申请日：2007-06-27

申请人： Shinji Fujimoto ,  Masato Shibuya ,  Hisashi Kaneko ,  Tsuneyori Ino ,  Yukihiro Komura ,  Mitsuhiro Izumi ,  Kei Funabashi

发明人： Shinji Fujimoto ,  Masato Shibuya ,  Hisashi Kaneko ,  Tsuneyori Ino ,  Yukihiro Komura ,  Mitsuhiro Izumi ,  Kei Funabashi

IPC分类号： G11B5/55 ,  G11B21/22

CPC分类号： G11B5/5569 ,  G11B5/54

摘要： A magnetic disk device comprises a magnetic disk in which a data zone is formed. An actuator has a voice coil and a head slider carrying a magnetic head, the actuator being swung to move the magnetic head over the disk between an innermost position of the data zone and an outermost position of the data zone. A magnet has a magnetization center and is opposed to the voice coil so that a voice coil motor which swings the actuator is formed, the magnet having a north pole and a south pole confronting each other via the magnetization center. The magnetic disk device is provided so that a deviation of a center of the voice coil from the magnetization center when the magnetic head is in the innermost position of the data zone is substantially equal to a deviation of the center of the voice coil from the magnetization center when the magnetic head is in the outermost position of the data zone.

摘要翻译： 磁盘装置包括形成数据区的磁盘。 致动器具有音圈和携带磁头的磁头滑块，所述致动器摆动以使磁头在数据区的最内位置和数据区的最外位置之间的磁盘上移动。 磁体具有磁化中心并且与音圈相对，从而形成摆动致动器的音圈电动机，磁体具有通过磁化中心彼此相对的北极和南极。 提供磁盘装置，使得当磁头处于数据区的最内位置时，音圈的中心与磁化中心的偏差基本上等于音圈的中心与磁化的偏差 当磁头位于数据区的最外侧位置时居中。

公开(公告)号：US07387717B2

公开(公告)日：2008-06-17

申请号：US10631726

申请日：2003-08-01

申请人： Junji Kunisawa ,  Mitsuko Odagaki ,  Natsuki Makino ,  Koji Mishima ,  Kenji Nakamura ,  Hiroaki Inoue ,  Norio Kimura ,  Tetsuo Matsuda ,  Hisashi Kaneko ,  Nobuo Hayasaka ,  Katsuya Okumura ,  Manabu Tsujimura ,  Toshiyuki Morita

发明人： Junji Kunisawa ,  Mitsuko Odagaki ,  Natsuki Makino ,  Koji Mishima ,  Kenji Nakamura ,  Hiroaki Inoue ,  Norio Kimura ,  Tetsuo Matsuda ,  Hisashi Kaneko ,  Nobuo Hayasaka ,  Katsuya Okumura ,  Manabu Tsujimura ,  Toshiyuki Morita

IPC分类号： C25D7/12

CPC分类号： H01L21/6719 ,  C25D7/123 ,  C25D17/001 ,  C25D17/12 ,  C25D17/14 ,  H01L21/2885 ,  H01L21/67046 ,  H01L21/67051 ,  H01L21/6708 ,  H01L21/6715 ,  H01L21/6723 ,  H01L21/76877 ,  H01L21/76879 ,  H01L2924/0002 ,  H05K3/423 ,  H01L2924/00

摘要： A plating method and apparatus for a substrate fills a metal, e.g., copper, into a fine interconnection pattern formed in a semiconductor substrate. The apparatus has a substrate holding portion 36 horizontally holding and rotating a substrate with its surface to be plated facing upward. A seal material 90 contacts a peripheral edge portion of the surface, sealing the portion in a watertight manner. A cathode electrode 88 passes an electric current upon contact with the substrate. A cathode portion 38 rotates integrally with the substrate holding portion 36. An electrode arm portion 30 is above the cathode portion 38 and movable horizontally and vertically and has an anode 98 face-down. Plating liquid is poured into a space between the surface to be plated and the anode 98 brought close to the surface to be plated. Thus, plating treatment and treatments incidental thereto can be performed by a single unit.

摘要翻译： 用于衬底的电镀方法和装置将诸如铜的金属填充到形成在半导体衬底中的精细互连图案中。 该装置具有基板保持部分36，其水平地保持并旋转基板，其表面被面向上。 密封材料90接触表面的周缘部分，以水密的方式密封该部分。 阴极电极88在与基板接触时通过电流。 阴极部38与基板保持部36一体地旋转。电极臂部30在阴极部38的上方，水平且垂直地移动，阳极98面朝下。 将电镀液注入被镀表面与接近待镀表面的阳极98之间的空间中。 因此，电镀处理和附带的处理可以通过单个单元进行。

公开(公告)号：US07308395B2

公开(公告)日：2007-12-11

申请号：US10757415

申请日：2004-01-15

申请人： Hisashi Kaneko ,  Motoya Okazaki ,  Hiroyuki Toshima

发明人： Hisashi Kaneko ,  Motoya Okazaki ,  Hiroyuki Toshima

IPC分类号： G06F17/50 ,  G06F9/455 ,  H01L21/66 ,  G01R31/26

CPC分类号： G06F17/5068

摘要： According to an aspect of the present invention, there is provided a simulation circuit pattern evaluation method including: designing an aggregate of simulation circuit patterns, which simulate a circuit pattern of a semiconductor integrated circuit, by combining plural geometrical structure defining parameters respectively having at least two states in such a manner that the respective states appear the same number of times in the respective geometrical structure defining parameters; forming the aggregate of the simulation circuit patterns on a substrate; and evaluating the formed aggregate of the simulation circuit patterns.

摘要翻译： 根据本发明的一个方面，提供了一种仿真电路图案评估方法，包括：通过组合多个几何结构来设计模拟电路图案的集合，模拟电路图案模拟半导体集成电路的电路图案， 两种状态使得各个状态在相应的几何结构定义参数中出现相同的次数; 在基板上形成模拟电路图案的集合体; 并对所形成的仿真电路图案进行评估。

公开(公告)号：US20070253114A1

公开(公告)日：2007-11-01

申请号：US11819427

申请日：2007-06-27

申请人： Shinji Fujimoto ,  Masato Shibuya ,  Hisashi Kaneko ,  Tsuneyori Ino ,  Yukihiro Komura ,  Mitsuhiro Izumi ,  Kei Funabashi

发明人： Shinji Fujimoto ,  Masato Shibuya ,  Hisashi Kaneko ,  Tsuneyori Ino ,  Yukihiro Komura ,  Mitsuhiro Izumi ,  Kei Funabashi

IPC分类号： G11B5/55

CPC分类号： G11B5/5569 ,  G11B5/54

摘要： A magnetic disk device comprises a magnetic disk in which a data zone is formed. An actuator has a voice coil and a head slider carrying a magnetic head, the actuator being swung to move the magnetic head over the disk between an innermost position of the data zone and an outermost position of the data zone. A magnet has a magnetization center and is opposed to the voice coil so that a voice coil motor which swings the actuator is formed, the magnet having a north pole and a south pole confronting each other via the magnetization center. The magnetic disk device is provided so that a deviation of a center of the voice coil from the magnetization center when the magnetic head is in the innermost position of the data zone is substantially equal to a deviation of the center of the voice coil from the magnetization center when the magnetic head is in the outermost position of the data zone.

摘要翻译： 磁盘装置包括形成数据区的磁盘。 致动器具有音圈和携带磁头的磁头滑块，所述致动器摆动以使磁头在数据区的最内位置和数据区的最外位置之间的磁盘上移动。 磁体具有磁化中心并且与音圈相对，从而形成摆动致动器的音圈电动机，磁体具有通过磁化中心彼此相对的北极和南极。 提供磁盘装置，使得当磁头处于数据区的最内位置时，音圈的中心与磁化中心的偏差基本上等于音圈的中心与磁化的偏差 当磁头位于数据区的最外侧位置时居中。