CROSS GUARD-RING STRUCTURE TO PROTECT THE CHIP CRACK IN LOW DIELECTRIC CONSTANT AND COPPER PROCESS
    77.
    发明申请
    CROSS GUARD-RING STRUCTURE TO PROTECT THE CHIP CRACK IN LOW DIELECTRIC CONSTANT AND COPPER PROCESS 失效
    在低介电常数和铜工艺中保护芯片裂纹的交叉护环结构

    公开(公告)号:US20020145196A1

    公开(公告)日:2002-10-10

    申请号:US09835012

    申请日:2001-04-13

    Inventor: Mu-Chun Wang

    Abstract: A structure of a cross guard ring along the edge of a semiconductor chip is disclosed. A first guard ring, a second guard ring and a third guard ring are formed along the edge of a semiconductor chip. Each guard ring comprises several rectangle shaped vias which are positioned along the edge of the chip structure, wherein each rectangle via is separated from an adjacent rectangle via by a gap. Further, each rectangle via of the second guard ring is positioned opposite the said gap of the first guard ring and are crossed over and have some overlay with rectangle vias of the first guard ring which are separated by the said gap as shown in FIG. 2. Similarly the third guard ring is positioned with respect to the second guard ring.

    Abstract translation: 公开了沿着半导体芯片的边缘的十字保护环的结构。 沿着半导体芯片的边缘形成第一保护环,第二保护环和第三保护环。 每个保护环包括沿着芯片结构的边缘定位的几个矩形通孔,其中每个矩形通孔与相邻的矩形通孔间隔开。 此外,第二保护环的每个矩形通孔定位成与第一保护环的所述间隙相对,并与第一保护环的矩形通孔交叉并且具有一些覆盖层,该第二保护环的矩形通孔由所述间隙分开,如图3所示。 类似地,第三保护环相对于第二保护环定位。

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