Method of making a polymer-metal compound having a predetermined
electrical conductivity by depositing on a substrate from a glow
discharge zone
    25.
    发明授权
    Method of making a polymer-metal compound having a predetermined electrical conductivity by depositing on a substrate from a glow discharge zone 失效
    通过从辉光放电区沉积在基板上制备具有预定导电性的聚合物 - 金属化合物的方法

    公开(公告)号:US5013581A

    公开(公告)日:1991-05-07

    申请号:US561934

    申请日:1990-08-02

    摘要: The method of making an electrically conductive polymer-metal compound having a predetermined electrical conductivity on a substrate includes the steps of preparing a reaction mixture of a gaseous metallo-organic compound, a metal-free gaseous organic compound and a carrier gas such as argon or mixtures of argon and hydrogen, producing a glow discharge zone in the reaction mixture and exposing the substrate to action of the gaseous metallo-organic compound and the metal-free gaseous organic compound in the glow discharge zone in such a way as to produce a film or layer of the polymer-metal compound with a predetermined electrical conductivity. The selection of the electrical conductivity can be made by setting at least one of a number of parameters of the process including the pressure and temperature of the glow discharge zone, the power density in the glow discharge and particularly the ratio of the amount of metal-free gaseous organic compound to carrier gas. The substrate may be a plastic such as polyimide, an aluminum or silicon oxide ceramics or glass.

    摘要翻译: 在衬底上制备具有预定导电性的导电聚合物 - 金属化合物的方法包括以下步骤:制备气态金属有机化合物,不含金属的气态有机化合物和载气如氩气的反应混合物,或 在氩气和氢气的混合物中,在反应混合物中产生辉光放电区,并使得衬底暴露于辉光放电区中的气态金属 - 有机化合物和无金属气态有机化合物的作用,从而产生膜 或具有预定导电性的聚合物 - 金属化合物层。 电导率的选择可以通过设定包括辉光放电区的压力和温度,辉光放电中的功率密度,特别是金属 - 氧化物的量的比例的多个工艺参数中的至少一个来进行, 游离气态有机化合物与载气。 衬底可以是诸如聚酰亚胺,铝或氧化硅陶瓷或玻璃的塑料。

    Cascade arc plasma torch and a process for plasma polymerization
    26.
    发明授权
    Cascade arc plasma torch and a process for plasma polymerization 失效
    级联电弧等离子体焰炬和等离子体聚合法

    公开(公告)号:US4948485A

    公开(公告)日:1990-08-14

    申请号:US274775

    申请日:1988-11-23

    摘要: The present invention is directed to an arrangement of cascade arc plasma torches in a process for plasma polymerization. The arrangement is utilized in low temperature plasma polymerization coating and utilizes a plasma reactor with concentric electroconductive rings separated by insulator rings. The rings are positioned between electrode connectors and form a central passage through the plasma reactor. A voltage supply source provides a voltage across the plasma reactor so as to initiate and continue the polymerization coating process. Downstream of the plasma reactor, an arrangement is provided by which monomeric gas is fed into a passage at a downstream end of the reactor so as to enable plasma polymerization.

    摘要翻译: 本发明涉及一种用于等离子体聚合的级联电弧等离子体炬的布置。 该装置用于低温等离子体聚合涂层,并且利用具有由绝缘体环隔开的同心导电环的等离子体反应器。 环位于电极连接器之间并形成通过等离子体反应器的中心通道。 电压源提供等离子体反应器两端的电压,以引发和继续聚合涂覆过程。 在等离子体反应器的下游,提供了将单体气体供给到反应器下游端的通道中以进行等离子体聚合的装置。

    Method for plasma-initiated polymerization
    27.
    发明授权
    Method for plasma-initiated polymerization 失效
    等离子体引发聚合的方法

    公开(公告)号:US4705612A

    公开(公告)日:1987-11-10

    申请号:US826579

    申请日:1986-02-06

    IPC分类号: C08F2/52

    CPC分类号: C08F2/52

    摘要: In a method for plasma-initiated polymerization by the steps of exposing a vapor phase containing monomer vapor to a plasma and introducing a polymerization initiating active seed consequently produced into a condensate phase of monomer thereby effecting chain-growth polymerization of the monomer, the improvement which comprises effecting the production of the polymer while keeping a radical polymerization initiator present at least in the aforementioned vapor phase.

    摘要翻译: 在通过以下步骤进行等离子体引发聚合的方法中,所述方法是将含有单体蒸气的气相暴露于等离子体,并引入所引发的活性种子的聚合引发到单体的冷凝物相中,从而进行单体的链增长聚合, 包括在保持自由基聚合引发剂至少存在于上述气相中的同时实现聚合物的制备。

    Optical product having a thin film on the surface
    28.
    发明授权
    Optical product having a thin film on the surface 失效
    表面上具有薄膜的光学产品

    公开(公告)号:US4632844A

    公开(公告)日:1986-12-30

    申请号:US694996

    申请日:1985-01-25

    CPC分类号: C08F2/52 G02B1/10

    摘要: An optical product having a thin film on the surface which is obtained by subjecting a mixed gas of oxygen and a hydrocarbon compound having a double bond to plasma polymerization in the presence of an optical product, thereby forming on the surface of the optical product a thin film of a reaction product of said plasma polymerization. Said optical product having a thin film on the surface has excellent resistance to fogging due to adhesion of water drops when used in gas phase, excellent resistance to adhesion of air bubbles when used in liquid phase, high resistance to being stained by oils and fats and an excellent removability of stains due to oils and fats.

    摘要翻译: 表面上具有薄膜的光学产品是通过在光学产品的存在下使氧和具有双键的烃化合物的混合气体进行等离子体聚合而获得的,从而在光学产品的表面上形成薄的 所述等离子体聚合的反应产物的膜。 表面上具有薄膜的所述光学产品在气相中使用时由于水滴的附着而具有优异的抗起雾性,当在液相中使用时具有优异的气泡粘合性,耐油性和耐油脂性高抗性, 由油脂引起的污渍的极好的去除性。

    Process for forming film of fluoroalkyl acrylate polymer on substrate
and process for preparing patterned resist from the film
    29.
    发明授权
    Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film 失效
    在基材上形成丙烯酸氟烷基酯聚合物的膜和从膜制备图案化抗蚀剂的方法

    公开(公告)号:US4382985A

    公开(公告)日:1983-05-10

    申请号:US310407

    申请日:1981-10-09

    摘要: A process for forming a fluoroalkyl acrylate polymer film on a substrate by plasma polymerization. The fluoroalkyl acrylate polymer film has a high sensitivity to high energy rays and an excellent resolving power, and is very useful as a resist film. The plasma polymerized film of the invention has little pinholes, and is endurable to dry etching. A patterned resist film is prepared by irradiating the film with high energy rays to form a latent pattern and developing the latent pattern by either a wet process using a solvent or an oxygen or oxygen-containing gas plasma etching. Also, a pattern can be formed in the film by only electron beam irradiation. The pattern formation can be attained by electron beam delineation without development treatment. The pattern formation by electron beam delineation is promoted by heat treating the delineated film at a temperature not less than the glass transition temperature of the polymer under reduced pressure or by treating the delineated film with hydrogen or an inert gas plasma.

    摘要翻译: 通过等离子体聚合在基材上形成丙烯酸氟烷基酯聚合物膜的方法。 氟烷基丙烯酸酯聚合物膜对高能量射线具有高灵敏度并具有优异的分辨能力,并且作为抗蚀剂膜是非常有用的。 本发明的等离子体聚合膜具有很少的针孔,并且能耐干蚀刻。 通过用高能射线照射薄膜以形成潜在图案并通过使用溶剂或含氧或含氧气体等离子体蚀刻的湿法显影潜像,来制备图案化的抗蚀剂膜。 此外,仅通过电子束照射可以在膜中形成图案。 图案形成可以通过没有显影处理的电子束描绘来实现。 通过电子束描绘的图案形成通过在不低于聚合物的玻璃化转变温度的温度下在减压下热处理所描绘的膜或通过用氢气或惰性气体等离子体处理所描绘的膜来促进。

    Apparatus for forming organic polymer thin films utilizing microwave
induced plasmas
    30.
    发明授权
    Apparatus for forming organic polymer thin films utilizing microwave induced plasmas 失效
    利用微波诱导等离子体形成有机聚合物薄膜的装置

    公开(公告)号:US4365587A

    公开(公告)日:1982-12-28

    申请号:US191242

    申请日:1980-03-24

    摘要: An apparatus for forming a thin organic film on a substrate which includes a reaction chamber for receiving a substrate on which a thin organic film is to be formed; a microwave discharge tube for supplying the reaction chamber with a carrier gas activated by microwave discharge; a microwave-generating mechanism provided with a hollow resonator for a microwave discharge; and a mechanism for supplying a carrier gas to the microwave discharge tube and a mechanism for supplying the reaction chamber with an organic compound monomer to be polymerized. That region of the microwave discharge tube where a plasma is produced by discharge does not extend to the reaction chamber, but is completely separated therefrom.

    摘要翻译: PCT No.PCT / JP79 / 00193 Sec。 371日期1980年3月24日 102(e)1980年3月24日PCT PCT。1979年7月25日PCT公布。 出版物WO80 / 日本1980年3月6日。一种用于在基板上形成薄有机膜的设备,其包括用于接收要在其上形成有机薄膜的基板的反应室; 微波放电管,用于向反应室供应由微波放电激活的载气; 微波发生机构,其设置有用于微波放电的中空谐振器; 以及用于向微波放电管提供载气的机构以及用于向反应室供给待聚合的有机化合物单体的机构。 通过放电产生等离子体的微波放电管的区域不延伸到反应室,而是完全分离。