Process for forming film of fluoroalkyl acrylate polymer on substrate
and process for preparing patterned resist from the film
    3.
    发明授权
    Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film 失效
    在基材上形成丙烯酸氟烷基酯聚合物的膜和从膜制备图案化抗蚀剂的方法

    公开(公告)号:US4382985A

    公开(公告)日:1983-05-10

    申请号:US310407

    申请日:1981-10-09

    摘要: A process for forming a fluoroalkyl acrylate polymer film on a substrate by plasma polymerization. The fluoroalkyl acrylate polymer film has a high sensitivity to high energy rays and an excellent resolving power, and is very useful as a resist film. The plasma polymerized film of the invention has little pinholes, and is endurable to dry etching. A patterned resist film is prepared by irradiating the film with high energy rays to form a latent pattern and developing the latent pattern by either a wet process using a solvent or an oxygen or oxygen-containing gas plasma etching. Also, a pattern can be formed in the film by only electron beam irradiation. The pattern formation can be attained by electron beam delineation without development treatment. The pattern formation by electron beam delineation is promoted by heat treating the delineated film at a temperature not less than the glass transition temperature of the polymer under reduced pressure or by treating the delineated film with hydrogen or an inert gas plasma.

    摘要翻译: 通过等离子体聚合在基材上形成丙烯酸氟烷基酯聚合物膜的方法。 氟烷基丙烯酸酯聚合物膜对高能量射线具有高灵敏度并具有优异的分辨能力,并且作为抗蚀剂膜是非常有用的。 本发明的等离子体聚合膜具有很少的针孔,并且能耐干蚀刻。 通过用高能射线照射薄膜以形成潜在图案并通过使用溶剂或含氧或含氧气体等离子体蚀刻的湿法显影潜像,来制备图案化的抗蚀剂膜。 此外,仅通过电子束照射可以在膜中形成图案。 图案形成可以通过没有显影处理的电子束描绘来实现。 通过电子束描绘的图案形成通过在不低于聚合物的玻璃化转变温度的温度下在减压下热处理所描绘的膜或通过用氢气或惰性气体等离子体处理所描绘的膜来促进。

    Filler for ink jet recording paper
    5.
    发明授权
    Filler for ink jet recording paper 失效
    喷墨记录纸填料

    公开(公告)号:US5720806A

    公开(公告)日:1998-02-24

    申请号:US722830

    申请日:1996-09-27

    摘要: The invention provides a filler for ink jet recording paper which is composed of an amorphous silica containing 0.3-1.0% by weight of Al.sub.2 O.sub.3 and having a BET specific surface area of 250-400 m.sup.2 /g, a mean particle size of 3.6-10.0 .mu.m and a peak position of pore radius as measured by mercury injection method of 37.5-75 angstrom. A coat layer of ink jet recording paper formed of this filler excels not only in true circle property of dots and ink absorbing property when printed by ink jet recording system, but also in surface strength and writing quality. Furthermore, the coating liquid containing this filler has a low viscosity and hence exhibits good coating workability.

    摘要翻译: 本发明提供一种喷墨记录纸用填料,其由含有0.3〜1.0重量%的Al 2 O 3的无定形二氧化硅构成,BET比表面积为250〜400m 2 / g,平均粒径为3.6〜10.0μm m和通过汞注入法测量的孔半径的峰值位置为37.5-75埃。 由该填料形成的喷墨记录纸的涂层不仅在通过喷墨记录系统打印时不但具有点和油墨吸收性的真实圆特性,而且还具有表面强度和书写质量。 此外,含有该填料的涂布液的粘度低,因此具有良好的涂布加工性。

    Water-base liquid preparation
    8.
    发明授权
    Water-base liquid preparation 失效
    水基液体制剂

    公开(公告)号:US06329410B1

    公开(公告)日:2001-12-11

    申请号:US09582291

    申请日:2000-06-23

    IPC分类号: A61K3141

    摘要: An aqueous liquid preparation, which has a pH of from 3 to 5 and comprises (R)-(−)-3-methyl-3-methyl -sulfonyl-1-(1H-1,2,4-triazol-1-yl)-2-[4-(trifluoromethyl)phenyl]butan-2-ol or a pharmaceutically acceptable salt thereof; and an injection for intravenous administration comprising the aqueous liquid preparation.

    摘要翻译: 一种水性液体制剂,其pH为3至5,并且包含(R) - ( - ) - 3-甲基-3-甲基 - 磺酰基-1-(1H-1,2,4-三唑-1-基) )-2- [4-(三氟甲基)苯基]丁-2-醇或其药学上可接受的盐; 和用于静脉内给药的注射剂,其包含含水液体制剂。

    Patterned film of thiocarbonyl fluoride polymer
    9.
    发明授权
    Patterned film of thiocarbonyl fluoride polymer 失效
    硫代羰基氟聚合物图案化膜

    公开(公告)号:US4656108A

    公开(公告)日:1987-04-07

    申请号:US746932

    申请日:1985-06-20

    CPC分类号: G03F7/039 Y10T428/24306

    摘要: A resist film made of thiocarbonyl fluoride polymers which has excellent sensitivity, resolving power and adhesion property to a substrate and can provide a fine resist pattern. The resist pattern is produced by forming the resist film on a substrate, irradiating an ionizing radiation and developing with an organic solvent.

    摘要翻译: 由硫代羰基氟化物聚合物制成的抗蚀剂膜,其具有优异的灵敏度,分辨能力和对基材的粘合性能,并且可以提供精细的抗蚀剂图案。 通过在基板上形成抗蚀剂膜,照射电离辐射并用有机溶剂显影来制造抗蚀剂图案。