摘要:
A resist film made of thiocarbonyl fluoride polymers which has excellent sensitivity, resolving power and adhesion property to a substrate and can provide a fine resist pattern. The resist pattern is produced by forming the resist film on a substrate, irradiating an ionizing radiation and developing with an organic solvent.
摘要:
An etchant composition comprising(a) a cerium (IV) salt,(b) a nonionic or anionic fluorine-containing surfactant,(c) water, and(d) optionally, at least one compound selected from the group consisting of perchloric acid, acetic acid, sulfuric acid, nitric acid and hydrochloric acid and salts thereof, which can homogeneously etch a resist pattern having thin gaps as well as wide gaps on a chrome layer.
摘要:
A resist material of positive type having a high sensitivity, a high resolving power and an excellent adhesion property to substrates, which comprises a copolymer of a fluoroalkyl acrylate having the general formula: ##STR1## wherein R.sub.1 is methyl group, ethyl group, a halogen-substituted methyl or ethyl group, a halogen atom or hydrogen atom, R.sub.2 is a bivalent hydrocarbon group having 1 to 6 carbon atoms, and R.sub.f is a fluoroalkyl group having 1 to 15 carbon atoms, with an acrylic comonomer selected from the group consisting of a glycidyl acrylate, an acrylic acid, an acrylamide and an .alpha.-cyanoacrylate.
摘要:
A resist material of positive type having a high sensitivity, a high resolving power and an excellent adhesion property to substrates, which comprises a copolymer of a fluoroalkyl acrylate having the general formula: ##STR1## wherein R.sub.1 is methyl group, ethyl group, a halogen-substituted methyl or ethyl group, a halogen atom or hydrogen atom, R.sub.2 is a bivalent hydrocarbon group having 1 to 6 carbon atoms, and R.sub.f is a fluoroalkyl group having 1 to 15 carbon atoms, with an acrylic comonomer selected from the group consisting of a glycidyl acrylate, an acrylic acid, an acrylamide and an .alpha.-cyanoacrylate.
摘要:
A female connector including: a cylindrical core member having a luer taper on a distal inner surface thereof and a tube bonding portion formed on a proximal end inner surface and being formed with a flange at a distal extremity thereof; a cylindrical housing having a male screw formed on an outer surface thereof and mounted to an outer periphery of the core member without being fixed, and a stopper fixed at a position apart from the flange of the core member, wherein the distance (L1) between the flange and the stopper is larger than the length (L2) of the housing in the axial direction when a male connector is connected to the female connector.
摘要:
A female connector including: a cylindrical core member having a luer taper on a distal inner surface thereof and a tube bonding portion formed on a proximal end inner surface and being formed with a flange at a distal extremity thereof; a cylindrical housing having a male screw formed on an outer surface thereof and mounted to an outer periphery of the core member without being fixed, and a stopper fixed at a position apart from the flange of the core member, wherein the distance (L1) between the flange and the stopper is larger than the length (L2) of the housing in the axial direction when a male connector is connected to the female connector.
摘要:
A dry cleaning composition comprising as effective components a fluorine-containing hydrocarbon solvent and at least one surfactant selected from the group consisting of organic acid salts of monoamines represented by the formula ##STR1## wherein R.sub.1 is alkyl having 6 to 20 carbon atoms, R.sub.2 is hydrogen atom or CH.sub.3, m and n are each zero or an integer of 1 to 20, and are further defined by 3.ltoreq.m + n.ltoreq.20, R.sub.3 is hydrogen atom or alkyl having 6 to 20 carbon atoms when n is zero and R.sub.3 is hydrogen atom when m is 1 to 20, and organic acid salts of diamines represented by the formula ##STR2## wherein R.sub.2 is as defined above, R.sub.4 is alkyl having 6 to 20 carbon atoms, R.sub.5 is alkylene having 2 to 6 carbon atoms, l is zero or an integer of 1 to 20, m and n are as defined above, and 3.ltoreq.l + m + n.ltoreq.20.
摘要翻译:一种干洗组合物,含有含氟烃溶剂和至少一种表面活性剂作为有效成分,所述表面活性剂选自由式(I)表示的单胺的有机酸盐,其中R 1是具有6至20个碳原子的烷基 ,R 2为氢原子或CH 3,m和n各自为0或1〜20的整数,进一步由3≤m+n≤20定义,R3为氢原子或碳原子数为6〜20的烷基 当n为0并且当m为1至20时R 3为氢原子,并且由式(II)表示的二胺的有机酸盐,其中R 2如上所定义,R 4为具有6至20个碳原子的烷基, R5是具有2至6个碳原子的亚烷基,l是0或1至20的整数,m和n如上所定义,并且3 i + m + n <20。