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    System for electron beam detection
    11.
    发明授权
    System for electron beam detection 有权

    公开(公告)号：US09778186B2

    公开(公告)日：2017-10-03

    申请号：US14686308

    申请日：2015-04-14

    Applicant: KLA-Tencor Corporation

    Inventor： Shinichi Kojima ,  Hamada Wahba ,  Michael R. Gluszczak ,  Joseph A. DiRegolo

    IPC: H01J37/22 ,  G01N21/64 ,  H01J37/244

    CPC classification number: G01N21/64 ,  H01J37/226 ,  H01J37/244 ,  H01J2237/043 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/24578

    Abstract: An electron beam detection apparatus includes a first aperture element including a first set of apertures. The apparatus includes a second aperture element including a second set of apertures. The second set of apertures is arranged in a pattern corresponding with the pattern of the first plurality of apertures. The detection apparatus includes an electron-photon conversion element configured to receive electrons of the electron beam transmitted through the first and second aperture elements. The electron-photon conversion element is configured to generate photons in response to the received electrons. The detection apparatus includes an optical assembly including one or more optical elements. The detection apparatus includes a detector assembly. The optical elements of the optical assembly are configured to direct the generated photons from the electron-photon conversion system to the detector assembly.

    SYSTEM FOR DISCHARGING AN AREA THAT IS SCANNED BY AN ELECTRON BEAM
    14.
    发明申请
    SYSTEM FOR DISCHARGING AN AREA THAT IS SCANNED BY AN ELECTRON BEAM 有权
    用于放电由电子束扫描的区域的系统

    公开(公告)号：US20160336146A1

    公开(公告)日：2016-11-17

    申请号：US14710297

    申请日：2015-05-12

    Applicant: APPLIED MATERIALS ISRAEL LTD.

    Inventor： Alex GOLDENSHTEIN

    IPC: H01J37/22 ,  H01J37/28

    CPC classification number: H01J37/073 ,  H01J37/026 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/0047 ,  H01J2237/04 ,  H01J2237/063 ,  H01J2237/2801 ,  H01J2237/2817

    Abstract: A method and a system for imaging an object, the system may include electron optics that may be configured to scan a first area of the object with at least one electron beam; wherein the electron optics may include a first electrode; and light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object.

    Abstract translation: 一种用于对物体进行成像的方法和系统，该系统可以包括电子光学器件，其可被配置为用至少一个电子束扫描物体的第一区域; 其中所述电子光学器件可包括第一电极; 以及可以被配置为照亮（a）第一电极和（b）物体的至少一个靶的光学元件，从而在第一电极和物体之间引起电子的发射。

    CHARGED PARTICLE BEAM DEVICE, IMAGE GENERATION METHOD, OBSERVATION SYSTEM
    15.
    发明申请
    CHARGED PARTICLE BEAM DEVICE, IMAGE GENERATION METHOD, OBSERVATION SYSTEM 有权
    充电颗粒光束装置，图像生成方法，观察系统

    公开(公告)号：US20160329188A1

    公开(公告)日：2016-11-10

    申请号：US15109481

    申请日：2014-12-24

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Yusuke OMINAMI ,  Junichi KATANE ,  Shinsuke KAWANISHI ,  Sukehiro ITO

    IPC: H01J37/28 ,  H01J37/22 ,  H01J37/244

    CPC classification number: H01J37/28 ,  H01J37/18 ,  H01J37/226 ,  H01J37/244 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2608

    Abstract: Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).

    Abstract translation: 提供了能够以简单的方式观察样品的内部和表面的带电粒子束装置。 该带电粒子束装置以透射带电粒子图像模式和二次带电粒子图像模式工作。 在透射带电粒子图像模式中，透射带电粒子图像是根据与从发射元件（500）发射的光相关联的检测信号（512）产生的，该发光元件（500）在被透射的透射带电粒子照射时发光 样品（6）的内部。 在二次带电粒子图像模式中，基于由来自样品（6）的反射带电粒子或二次带电粒子（517）引起的检测信号（518）产生二次带电粒子图像。

    Hybrid electron microscope
    16.
    发明授权
    Hybrid electron microscope 有权
    混合电子显微镜

    公开(公告)号：US09431211B2

    公开(公告)日：2016-08-30

    申请号：US14827666

    申请日：2015-08-17

    Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

    Inventor： Renu Sharma ,  Stefano Mazzucco

    IPC: H01J37/28 ,  G01N21/64 ,  H01J37/22 ,  H01J37/20 ,  H01J37/26

    CPC classification number: H01J37/226 ,  H01J37/20 ,  H01J37/244 ,  H01J37/261 ,  H01J2237/063 ,  H01J2237/2007 ,  H01J2237/2445 ,  H01J2237/2602

    Abstract: A hybrid electron microscope includes: an electron source to emit an electron beam; a parabolic mirror including: a reflective surface; and an aperture to communicate the electron beam through the parabolic mirror; and a sample holder interposed between the electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder. A process for acquiring hybrid electron microscopy data includes: disposing a parabolic mirror in a chamber, the parabolic mirror including: a reflective surface; and an aperture to communicate an electron beam through the parabolic mirror; disposing a sample on a sample holder; interposing a sample holder between an electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder; producing the electron beam from the electron source; subjecting the sample to the electron beam; communicating the electron beam through the sample and the aperture of the parabolic mirror; and collecting imaging data of the sample in response to the subjecting the sample to the electron beam to acquire the hybrid electron microscopy data.

    Abstract translation: 混合电子显微镜包括：发射电子束的电子源; 抛物面镜包括：反射面; 以及使电子束通过抛物面反射镜传播的孔; 以及插入在电子源和抛物面反射镜之间的样品保持架，使得抛物面镜的反射表面面向电子源和样品保持器。 一种用于获取混合电子显微镜数据的方法包括：在室中设置抛物面镜，所述抛物面镜包括：反射表面; 以及用于将电子束通过抛物面反射镜传播的孔; 将样品放在样品架上; 在电子源和抛物面反射镜之间插入样品架，使得抛物面镜的反射面朝向电子源和样品架; 从电子源产生电子束; 使样品经受电子束; 将电子束通过样品和抛物面镜的孔传播; 以及响应于将样品经受电子束来采集样品的成像数据以获得混合电子显微镜数据。

    Method of detecting electrons, an electron-detector and an inspection system
    17.
    发明授权
    Method of detecting electrons, an electron-detector and an inspection system 有权
    检测电子的方法，电子检测器和检查系统

    公开(公告)号：US09336982B2

    公开(公告)日：2016-05-10

    申请号：US14498290

    申请日：2014-09-26

    Applicant: Carl Zeiss Microscopy GmbH

    Inventor： Dirk Zeidler ,  Jörg Jacobi

    IPC: H01J37/26 ,  H01J37/244 ,  H01J37/22 ,  H01J37/28 ,  H01J37/285

    CPC classification number: H01J37/244 ,  H01J37/226 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/15 ,  H01J2237/2443 ,  H01J2237/24507 ,  H01J2237/2857

    Abstract: An electron-detector comprises a scintillator plate 207, electron optics 204 for directing a plurality of electron beams 9 onto the scintillator plate so that the electron beams are incident onto the scintillator plate at locations of incidence disposed at a distance from each other, a light detector 237 comprising a plurality of light receiving areas 235 disposed at a distance from each other, and light optics for generating a first light-optical image of at least a portion of the scintillator plate at a region 243 where the light receiving areas of the light detector are disposed so that, by the imaging, each of the locations of incidence is associated with a light receiving area; and wherein the electron optics comprise an electron beam deflector 255 for displacing the locations of incidence of the electron beams on the scintillator plate in a direction orthogonal to a normal 249 of a surface 208 of the scintillator plate.

    Abstract translation: 电子检测器包括闪烁体板207，用于将多个电子束9引导到闪烁体板上的电子光学器件204，使得电子束在彼此间隔一定距离的入射位置处入射到闪烁体板上， 检测器237包括彼此间隔设置的多个光接收区域235，以及用于在区域243处产生闪烁体板的至少一部分的第一光学图像的光学光学器件，其中光的光接收区域 检测器被设置成使得通过成像，每个入射位置与光接收区域相关联; 并且其中电子光学器件包括电子束偏转器255，用于将闪烁体板上的电子束的入射位置沿与闪烁体板的表面208的法线249正交的方向移位。

    MATHEMATICAL IMAGE ASSEMBLY IN A SCANNING-TYPE MICROSCOPE
    20.
    发明申请
    MATHEMATICAL IMAGE ASSEMBLY IN A SCANNING-TYPE MICROSCOPE 有权
    扫描型显微镜中的数学图像组件

    公开(公告)号：US20150371815A1

    公开(公告)日：2015-12-24

    申请号：US14743780

    申请日：2015-06-18

    Applicant: FEI Company

    Inventor： Pavel Potocek ,  Cornelis Sander Kooijman ,  Hendrik Nicolaas Slingerland ,  Gerard Anne Nikolaas van Veen ,  Faysal Boughorbel

    IPC: H01J37/22 ,  G02B21/00 ,  H01J37/28

    CPC classification number: H01J37/222 ,  G02B21/0024 ,  G02B21/0048 ,  G02B21/008 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/28 ,  H01J2237/2811

    Abstract: A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps: Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen; Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation; Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position, which method additionally comprises the following steps: In a first sampling session S1gathering detector data from a first collection P1 of sampling points distributed sparsely across the specimen; Repeating this procedure so as to accumulate a set {Pn} of such collections, gathered during an associated set {Sn} of sampling sessions, each set with a cardinality N>1; Assembling an image of the specimen by using the set {Pn} as input to an integrative mathematical reconstruction procedure, wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}.

    Abstract translation: 使用扫描式显微镜对样本的图像进行累积的方法，包括以下步骤：从源极通过照射器提供辐射束，以照射样本; 提供检测器，用于响应于所述照射来检测从样本发出的辐射通量; 使所述光束相对于样本的表面进行扫描运动，并且根据扫描位置记录检测器的输出，该方法另外包括以下步骤：在第一采样会话中，从第一采集器P1聚集检测器数据 抽样点分布稀疏地遍布样本; 重复此过程，以便累积在相关集合{Sn}采样会话期间收集的集合{Pn}，每个集合具有基数N> 1; 通过使用集合{Pn}作为整合数学重建过程的输入来组装样本的图像，其中，作为所述组装过程的一部分，进行数学登记校正以补偿组{Pn的不同成员之间的漂移错配 }。

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