Transistor and method of fabricating the same
    13.
    发明授权
    Transistor and method of fabricating the same 有权
    晶体管及其制造方法

    公开(公告)号:US08901608B2

    公开(公告)日:2014-12-02

    申请号:US13908076

    申请日:2013-06-03

    CPC classification number: H01L29/778 H01L29/402 H01L29/42316 H01L29/66431

    Abstract: A high electron mobility transistor includes a T-type gate electrode disposed on a substrate between source and drain electrodes and insulating layers disposed between the substrate and the T-type gate electrode. The insulating layers include first, second, and third insulating layers. The third insulating layer is disposed between the substrate and a head portion of the T-type gate electrode such that a portion of the third insulating layer is in contact with a foot portion of the T-type gate electrode. The second insulating layer is disposed between the substrate and the head portion of the T-type gate electrode to be in contact with the third insulating layer. The first insulating layer and another portion of the third insulating layer are sequentially stacked between the substrate and the head portion of the T-type gate electrode to be in contact with the second insulating layer.

    Abstract translation: 高电子迁移率晶体管包括设置在源极和漏极之间的衬底上的T型栅电极和设置在衬底和T型栅电极之间的绝缘层。 绝缘层包括第一绝缘层,第二绝缘层和第三绝缘层。 第三绝缘层设置在基板和T型栅电极的头部之间,使得第三绝缘层的一部分与T型栅极的脚部接触。 第二绝缘层设置在基板与T型栅电极的头部之间以与第三绝缘层接触。 所述第一绝缘层和所述第三绝缘层的另一部分依次层叠在所述基板与所述T型栅电极的头部之间,以与所述第二绝缘层接触。

    Method of manufacturing field effect type compound semiconductor device
    17.
    发明授权
    Method of manufacturing field effect type compound semiconductor device 有权
    制造场效应型化合物半导体器件的方法

    公开(公告)号:US08841154B2

    公开(公告)日:2014-09-23

    申请号:US13916006

    申请日:2013-06-12

    Abstract: Disclosed is a method of manufacturing a field effect type compound semiconductor device in which leakage current of a device is decreased and breakdown voltage is enhanced. The method of manufacturing a field effect type compound semiconductor device includes: stacking an active layer and an ohmic layer on a substrate and forming a first oxide layer on the ohmic layer; forming a mesa region in predetermined regions of the first oxide layer, the ohmic layer, and the active layer; planarizing the mesa region after forming a nitride layer by evaporating a nitride on the mesa region; forming an ohmic electrode on the first oxide layer; forming a minute gate resist pattern after forming a second oxide layer on a semiconductor substrate in which the ohmic electrode is formed and forming a minute gate pattern having a under-cut shaped profile by dry-etching the first oxide layer, the nitride layer, and the second oxide layer; forming a gate recess region by forming a head pattern of a gamma gate electrode on the semiconductor substrate; and forming the gamma gate electrode by evaporating refractory metal on the semiconductor substrate in which the gate recess region is formed.

    Abstract translation: 公开了一种制造场效应型化合物半导体器件的方法,其中器件的漏电流降低并且击穿电压增强。 制造场效应型化合物半导体器件的方法包括:在衬底上堆叠有源层和欧姆层,并在欧姆层上形成第一氧化物层; 在所述第一氧化物层,所述欧姆层和所述有源层的预定区域中形成台面区域; 通过在台面区域上蒸发氮化物,在形成氮化物层之后使台面区域平坦化; 在所述第一氧化物层上形成欧姆电极; 在形成欧姆电极的半导体衬底上形成第二氧化物层之后形成微小栅极抗蚀剂图案,并通过干蚀刻第一氧化物层,氮化物层和形成具有下切形状轮廓的微小栅极图案 第二氧化物层; 通过在所述半导体衬底上形成伽马栅电极的头部图形来形成栅极凹部区域; 以及通过在形成有所述栅极凹部的所述半导体衬底上蒸发难熔金属而形成所述γ栅电极。

    SEMICONDUCTOR DEVICE TESTING APPARATUS
    18.
    发明申请
    SEMICONDUCTOR DEVICE TESTING APPARATUS 审中-公开
    半导体器件测试装置

    公开(公告)号:US20140167806A1

    公开(公告)日:2014-06-19

    申请号:US14020931

    申请日:2013-09-09

    CPC classification number: G01R1/0466 G01R1/0458

    Abstract: Provided is a semiconductor device testing apparatus including a first socket configured to load a package, on which a semiconductor device to be tested may be mounted, and a second socket coupled to the first socket. The first socket may include an upper part including a hole configured to accommodate the package and a terminal pad provided at both side edges of the hole to hold input and output terminals of the package, and a lower part including a heating room, in which a heater and a temperature sensing part may be provided, the heater being configured to heat the semiconductor device and the temperature sensing part being configured to measure temperature of the semiconductor device. The second socket may include a probe card with a pattern that may be configured to receive test signals from an external power source.

    Abstract translation: 提供一种半导体器件测试装置,包括:第一插座,被配置为加载可以安装待测试的半导体器件的封装,以及耦合到第一插座的第二插座。 第一插座可以包括上部,其包括被配置为容纳封装的孔和设置在孔的两个侧边缘处的端子垫,以保持封装的输入和输出端子,以及包括加热室的下部,其中 加热器和温度检测部件,加热器被配置为加热半导体器件,并且温度检测部分被配置为测量半导体器件的温度。 第二插座可以包括具有可被配置为从外部电源接收测试信号的模式的探针卡。

    METHOD OF MANUFACTURING FIELD EFFECT TYPE COMPOUND SEMICONDUCTOR DEVICE
    19.
    发明申请
    METHOD OF MANUFACTURING FIELD EFFECT TYPE COMPOUND SEMICONDUCTOR DEVICE 有权
    制备场效应型化合物半导体器件的方法

    公开(公告)号:US20140017885A1

    公开(公告)日:2014-01-16

    申请号:US13916006

    申请日:2013-06-12

    Abstract: Disclosed is a method of manufacturing a field effect type compound semiconductor device in which leakage current of a device is decreased and breakdown voltage is enhanced. The method of manufacturing a field effect type compound semiconductor device includes: stacking an active layer and an ohmic layer on a substrate and forming a first oxide layer on the ohmic layer; forming a mesa region in predetermined regions of the first oxide layer, the ohmic layer, and the active layer; planarizing the mesa region after forming a nitride layer by evaporating a nitride on the mesa region; forming an ohmic electrode on the first oxide layer; forming a minute gate resist pattern after forming a second oxide layer on a semiconductor substrate in which the ohmic electrode is formed and forming a minute gate pattern having a under-cut shaped profile by dry-etching the first oxide layer, the nitride layer, and the second oxide layer; forming a gate recess region by forming a head pattern of a gamma gate electrode on the semiconductor substrate; and forming the gamma gate electrode by evaporating refractory metal on the semiconductor substrate in which the gate recess region is formed.

    Abstract translation: 公开了一种制造场效应型化合物半导体器件的方法,其中器件的漏电流降低并且击穿电压增强。 制造场效应型化合物半导体器件的方法包括:在衬底上堆叠有源层和欧姆层,并在欧姆层上形成第一氧化物层; 在所述第一氧化物层,所述欧姆层和所述有源层的预定区域中形成台面区域; 通过在台面区域上蒸发氮化物,在形成氮化物层之后使台面区域平坦化; 在所述第一氧化物层上形成欧姆电极; 在形成欧姆电极的半导体衬底上形成第二氧化物层之后形成微小栅极抗蚀剂图案,并通过干蚀刻第一氧化物层,氮化物层和形成具有下切形状轮廓的微小栅极图案 第二氧化物层; 通过在所述半导体衬底上形成伽马栅电极的头部图形来形成栅极凹部区域; 以及通过在形成有所述栅极凹部的所述半导体衬底上蒸发难熔金属而形成所述γ栅电极。

    AUTOMATIC GAIN CONTROL FEEDBACK AMPLIFIER
    20.
    发明申请
    AUTOMATIC GAIN CONTROL FEEDBACK AMPLIFIER 有权
    自动增益控制反馈放大器

    公开(公告)号:US20130169365A1

    公开(公告)日:2013-07-04

    申请号:US13670016

    申请日:2012-11-06

    CPC classification number: H03G1/0082 H03G1/0088 H03G3/3084

    Abstract: Disclosed is an automatic gain control feedback amplifier that can arbitrarily control a gain even when a difference in input signal is large. The automatic gain control feedback amplifier includes: an amplification circuit unit configured to amplify voltage input from an input terminal and output the amplified voltage to an output terminal; a feedback circuit unit connected between the input terminal and the output terminal and including a feedback resistor unit of which a total resistance value is determined by one or more control signals and a feedback transistor connected to the feedback resistor unit in parallel; and a bias circuit unit configured to supply predetermined bias voltage to the feedback transistor.

    Abstract translation: 公开了一种自动增益控制反馈放大器,即使当输入信号的差异大时也可以任意地控制增益。 自动增益控制反馈放大器包括:放大电路单元,被配置为放大从输入端输入的电压,并将放大的电压输出到输出端; 连接在输入端子和输出端子之间的反馈电路单元,包括反馈电阻器单元,其总电阻值由一个或多个控制信号确定,反馈晶体管并联连接到反馈电阻器单元; 以及偏置电路单元,被配置为向所述反馈晶体管提供预定的偏置电压。

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