公开(公告)号：US20240087869A1

公开(公告)日：2024-03-14

申请号：US18469517

申请日：2023-09-18

申请人： NOVA MEASURING INSTRUMENTS INC.

发明人： David A. REED ,  Bruno W. SCHUELER ,  Bruce H. NEWCOME ,  Rodney SMEDT ,  Chris BEVIS

IPC分类号： H01J49/14 ,  G01N23/22 ,  G01N23/2258 ,  G01Q10/04 ,  H01J49/12 ,  H01J49/26 ,  H01L21/66

CPC分类号： H01J49/142 ,  G01N23/22 ,  G01N23/2258 ,  G01Q10/04 ,  H01J49/126 ,  H01J49/26 ,  H01L22/12

摘要： Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

公开(公告)号：US20240047188A1

公开(公告)日：2024-02-08

申请号：US17816734

申请日：2022-08-02

申请人： CMP Scientific Corp.

发明人： Joshua Wiley ,  Paul Nurmi ,  Qiangwei Xia

IPC分类号： H01J49/06 ,  H01J49/00 ,  H01J49/26

CPC分类号： H01J49/063 ,  H01J49/0031 ,  H01J49/26

摘要： Systems and methods for analyzing samples are provided. In some embodiments, a mass spectrometer may include a source configured to output one or more ions, a plurality of chambers having different pressures, a detector configured to detect the one or more ions, and a particle guide. The plurality of chambers may include at least a first chamber having a first pressure that is less than atmospheric pressure and a second chamber having a second pressure that is less than the first pressure. In some embodiments, the particle guide may include a conduit through which the one or more ions may travel an entire length of the particle guide. The conduit may be disposed within at least the first chamber and the second chamber, and vents may be disposed to define passages between the chambers and the conduit.

公开(公告)号：US11854780B2

公开(公告)日：2023-12-26

申请号：US17500485

申请日：2021-10-13

申请人： WATERS TECHNOLOGIES IRELAND LIMITED

发明人： Nathaniel Martin ,  Nicola Lumley ,  David S. Douce ,  David Jackson

IPC分类号： H01J49/00 ,  G01N30/72 ,  H01J49/26 ,  G01N30/02

CPC分类号： H01J49/0036 ,  G01N30/7233 ,  H01J49/26 ,  G01N2030/027

摘要： Exemplary embodiments provide methods, mediums, and systems for comparing a sample of interest to a library of known compounds to quickly determine how similar the sample is to the compounds in the library. Peaks of interest in the sample data are compared to corresponding peaks in the library compound data. These peaks may be represented as vectors, and an angle between the sample vector and the library vector may be used as a similarity metric. In some embodiments, a cosine similarity may be calculated for the vectors. If the similarity score for a given library compound/sample pair exceed a threshold, then the system determines that the library compound and the sample are similar and takes appropriate action. Various parameters associated with the comparison can be adjusted in order to improve the quality of the results and/or the efficiency of the process.

公开(公告)号：US11846736B2

公开(公告)日：2023-12-19

申请号：US17617277

申请日：2019-07-10

申请人： Hitachi High-Tech Corporation

发明人： Eri Takahashi ,  Shin Imamura ,  Makoto Suzuki ,  Shunsuke Mizutani

IPC分类号： G01T1/202 ,  H01J37/244 ,  H01J49/02 ,  H01J37/28 ,  H01J49/26

CPC分类号： G01T1/2023 ,  H01J37/244 ,  H01J49/025 ,  H01J37/28 ,  H01J49/26 ,  H01J2237/2443 ,  H01J2237/2448 ,  H01J2237/2803

摘要： The purpose of the present invention is to provide a scintillator for a charged particle beam device and a charged particle beam device which achieve both an increase in emission intensity and a reduction in afterglow intensity. This scintillator for a charged particle beam device is characterized by comprising a substrate (13), a buffer layer (14) formed on a surface of the substrate (13), a stack (12) of a light emitting layer (15) and a barrier layer (16) formed on a surface of the buffer layer (14), and a conductive layer (17) formed on a surface of the stack (12) and by being configured such that the light emitting layer (15) contains InGaN, the barrier layer (16) contains GaN, and the ratio b/a of the thickness b of the barrier layer (16) to the thickness a of the light emitting layer (15) is 11 to 25.

公开(公告)号：US11830717B2

公开(公告)日：2023-11-28

申请号：US18134887

申请日：2023-04-14

申请人： Purdue Research Foundation

发明人： Robert Graham Cooks ,  Zane Baird ,  Wen-Ping Peng

IPC分类号： H01J49/06 ,  H01J49/10 ,  H01J49/16 ,  H01J49/26

CPC分类号： H01J49/067 ,  H01J49/06 ,  H01J49/10 ,  H01J49/165 ,  H01J49/26

摘要： The invention generally relates to apparatuses for focusing ions at or above ambient pressure and methods of use thereof. In certain embodiments, the invention provides an apparatus for focusing ions that includes an electrode having a cavity, at least one inlet within the electrode configured to operatively couple with an ionization source, such that discharge generated by the ionization source is injected into the cavity of the electrode, and an outlet. The cavity in the electrode is shaped such that upon application of voltage to the electrode, ions within the cavity are focused and directed to the outlet, which is positioned such that a proximal end of the outlet receives the focused ions and a distal end of the outlet is open to ambient pressure.

公开(公告)号：US11764050B2

公开(公告)日：2023-09-19

申请号：US17821785

申请日：2022-08-23

申请人： NOVA MEASURING INSTRUMENTS INC.

发明人： David A. Reed ,  Bruno W. Schueler ,  Bruce H. Newcome ,  Rodney Smedt ,  Chris Bevis

IPC分类号： G01N23/2258 ,  G01N23/22 ,  H01J49/14 ,  H01L21/66 ,  H01J49/12 ,  G01Q10/04 ,  H01J49/26

CPC分类号： H01J49/142 ,  G01N23/22 ,  G01N23/2258 ,  G01Q10/04 ,  H01J49/126 ,  H01J49/26 ,  H01L22/12

摘要： Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

公开(公告)号：US11756781B2

公开(公告)日：2023-09-12

申请号：US17221075

申请日：2021-04-02

申请人： Thermo Finnigan LLC

发明人： Christopher Mullen

IPC分类号： H01J49/10 ,  H01J49/04 ,  H01J49/26 ,  H01J49/00

CPC分类号： H01J49/107 ,  H01J49/0072 ,  H01J49/0468 ,  H01J49/0495 ,  H01J49/26

摘要： Disclosed herein is an apparatus for supplying reagent ions, for example ETD or PTR reagent ions, to a mass spectrometer. The apparatus includes a reagent material reservoir, coupled to a carrier gas supply, which delivers an entrained reagent vapor flow to an inlet of a mixing junction through a first flow restrictor. A control gas flow of carrier gas is delivered to another inlet of the mixing junction via a variable pressure regulator and a second flow restrictor. The outlet of the mixing junction is coupled via a third flow restrictor and a reagent transfer junction to an inlet of an ionizer, such as a glow-discharge ionizer. By dynamic adjustment of the output pressure of the variable pressure regulator, the flow rate of reagent vapor may be controlled over a broad range, even for reagent materials of relatively high volatility.

公开(公告)号：US20230260772A1

公开(公告)日：2023-08-17

申请号：US18134887

申请日：2023-04-14

申请人： Purdue Research Foundation

发明人： Robert Graham Cooks ,  Zane Baird ,  Wen-Ping Peng

IPC分类号： H01J49/06 ,  H01J49/10 ,  H01J49/16 ,  H01J49/26

CPC分类号： H01J49/067 ,  H01J49/06 ,  H01J49/10 ,  H01J49/165 ,  H01J49/26

摘要： The invention generally relates to apparatuses for focusing ions at or above ambient pressure and methods of use thereof. In certain embodiments, the invention provides an apparatus for focusing ions that includes an electrode having a cavity, at least one inlet within the electrode configured to operatively couple with an ionization source, such that discharge generated by the ionization source is injected into the cavity of the electrode, and an outlet. The cavity in the electrode is shaped such that upon application of voltage to the electrode, ions within the cavity are focused and directed to the outlet, which is positioned such that a proximal end of the outlet receives the focused ions and a distal end of the outlet is open to ambient pressure.

公开(公告)号：US11728154B2

公开(公告)日：2023-08-15

申请号：US17535452

申请日：2021-11-24

申请人： Thermo Fisher Scientific (Bremen) GmbH

发明人： Peter Komander ,  Heinz Lerche

IPC分类号： H01J49/02 ,  H01J49/26 ,  H03F3/04 ,  G01T1/24

CPC分类号： H01J49/022 ,  G01T1/247 ,  H01J49/025 ,  H01J49/26 ,  H03F3/04

摘要： An ion detection current conversion circuit includes a conversion amplifier coupled with a conversion resistor assembly for converting an ion detection current produced by an ion detector into an ion detection voltage, the conversion resistor assembly comprising a resistor having a high resistance and a capacitive compensation element, and a compensation voltage circuit for deriving a compensation voltage from the ion detection voltage and feeding the compensation voltage to the capacitive compensation element, the compensation voltage circuit comprising a variable resistor for adjusting the compensation voltage.

公开(公告)号：US11710627B2

公开(公告)日：2023-07-25

申请号：US17558925

申请日：2021-12-22

申请人： Micromass UK Limited

发明人： Emrys Jones ,  Steven Derek Pringle ,  Keith Richardson ,  James Ian Langridge ,  Zoltan Takats

IPC分类号： G01N30/72 ,  H01J49/04 ,  A61B10/02 ,  A61B18/00 ,  A61B18/14 ,  A61B18/20 ,  G01N3/00 ,  G01N9/00 ,  G01N33/68 ,  H01J49/00 ,  H01J49/06 ,  H01J49/16 ,  G16B20/50 ,  G01N27/623 ,  A61B90/13 ,  A61B1/04 ,  A61B1/273 ,  A61B5/00 ,  A61B5/01 ,  A61B5/0507 ,  A61B5/055 ,  A61B6/03 ,  A61B8/13 ,  A61B10/00 ,  A61B17/00 ,  A61B18/04 ,  A61B18/18 ,  A61F13/38 ,  C12Q1/02 ,  C12Q1/04 ,  C12Q1/18 ,  C12Q1/24 ,  G01N1/22 ,  G01N27/624 ,  G01N33/487 ,  G01N33/92 ,  H01J49/02 ,  H01J49/10 ,  H01J49/14 ,  H01J49/24 ,  H01J49/26 ,  G16B20/00 ,  A61B17/32 ,  G16H10/40 ,  G16H15/00 ,  G16H50/20 ,  A61B1/00 ,  A61B1/31 ,  A61B5/145

CPC分类号： H01J49/049 ,  A61B1/041 ,  A61B1/2736 ,  A61B5/0066 ,  A61B5/0075 ,  A61B5/015 ,  A61B5/055 ,  A61B5/0507 ,  A61B6/032 ,  A61B6/037 ,  A61B8/13 ,  A61B10/00 ,  A61B10/0041 ,  A61B10/0233 ,  A61B10/0283 ,  A61B17/00 ,  A61B18/00 ,  A61B18/04 ,  A61B18/042 ,  A61B18/14 ,  A61B18/1445 ,  A61B18/1815 ,  A61B18/20 ,  A61B90/13 ,  A61F13/38 ,  C12Q1/025 ,  C12Q1/04 ,  C12Q1/18 ,  C12Q1/24 ,  G01N1/2202 ,  G01N3/00 ,  G01N9/00 ,  G01N27/623 ,  G01N27/624 ,  G01N30/724 ,  G01N33/487 ,  G01N33/6848 ,  G01N33/6851 ,  G01N33/92 ,  G16B20/50 ,  H01J49/0004 ,  H01J49/0027 ,  H01J49/0031 ,  H01J49/0036 ,  H01J49/025 ,  H01J49/044 ,  H01J49/0404 ,  H01J49/0409 ,  H01J49/0422 ,  H01J49/0445 ,  H01J49/0459 ,  H01J49/0463 ,  H01J49/0468 ,  H01J49/061 ,  H01J49/068 ,  H01J49/10 ,  H01J49/14 ,  H01J49/16 ,  H01J49/164 ,  H01J49/24 ,  H01J49/26 ,  A61B1/00013 ,  A61B1/31 ,  A61B5/14542 ,  A61B17/320068 ,  A61B2010/0083 ,  A61B2017/320069 ,  A61B2018/00577 ,  A61B2018/00589 ,  A61B2018/00994 ,  A61B2218/002 ,  A61B2218/008 ,  G01N33/48735 ,  G01N2001/2223 ,  G01N2333/195 ,  G01N2405/00 ,  G01N2405/04 ,  G01N2405/08 ,  G01N2570/00 ,  G01N2800/26 ,  G16B20/00 ,  G16H10/40 ,  G16H15/00 ,  G16H50/20

摘要： A method of analysis using mass spectrometry and/or ion mobility spectrometry is disclosed comprising: (a) using a first device to generate smoke, aerosol or vapour from a target in vitro or ex vivo cell population; (b) mass analysing and/or ion mobility analysing said smoke, aerosol or vapour, or ions derived therefrom, in order to obtain spectrometric data; and (c) analysing said spectrometric data in order to identify and/or characterise said target cell population or one or more cells and/or compounds present in said target cell population.