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公开(公告)号：US11062892B2
公开(公告)日：2021-07-13
申请号：US16070790
申请日：2017-01-25
IPC分类号： G01T1/20 , H01J49/02 , H01J37/244 , G01T1/24
摘要： The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the present invention proposes: a charged particle detector provided with a light-emitting unit including a laminated structure obtained by laminating a GaInN-containing layer and a GaN layer, and provided with a conductive layer that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device.
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公开(公告)号：US11955327B2
公开(公告)日：2024-04-09
申请号：US17433133
申请日：2020-01-22
IPC分类号： H01J49/42 , G01N27/623 , G01T1/20 , G01T1/28
CPC分类号： H01J49/42 , G01N27/623 , G01T1/2018 , G01T1/28
摘要： The present invention implements an ion detector with which it is possible to avoid direct collisions of negative ions with a scintillator, prevent degradation of the scintillator, prolong life of the scintillator, reduce the need for maintenance, and perform highly sensitive detection of both positive and negative ions. With respect to a reference line 65 connecting a central point 63 of a positive ion CD 52 and a central point 64 of a counter electrode 54, a central point 66 of a negative ion CD 53 is provided in a region of a side opposite to a region of a side of a central point 67 of a scintillator 56. Positive ions entering from an ion entrance 62 receive a deflection force and collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 to generate light. The generated light passes through a light guide 59 and is detected by a photomultiplier tube 58. A negative potential barrier is generated along the reference line 65. Negative ions entering form the ion entrance 62 are attracted to and collide with the negative ion CD 53 to generate positive ions. The generated positive ions collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 and are detected by the photomultiplier tube 58.
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公开(公告)号：US11846736B2
公开(公告)日：2023-12-19
申请号：US17617277
申请日：2019-07-10
发明人： Eri Takahashi , Shin Imamura , Makoto Suzuki , Shunsuke Mizutani
IPC分类号： G01T1/202 , H01J37/244 , H01J49/02 , H01J37/28 , H01J49/26
CPC分类号： G01T1/2023 , H01J37/244 , H01J49/025 , H01J37/28 , H01J49/26 , H01J2237/2443 , H01J2237/2448 , H01J2237/2803
摘要： The purpose of the present invention is to provide a scintillator for a charged particle beam device and a charged particle beam device which achieve both an increase in emission intensity and a reduction in afterglow intensity. This scintillator for a charged particle beam device is characterized by comprising a substrate (13), a buffer layer (14) formed on a surface of the substrate (13), a stack (12) of a light emitting layer (15) and a barrier layer (16) formed on a surface of the buffer layer (14), and a conductive layer (17) formed on a surface of the stack (12) and by being configured such that the light emitting layer (15) contains InGaN, the barrier layer (16) contains GaN, and the ratio b/a of the thickness b of the barrier layer (16) to the thickness a of the light emitting layer (15) is 11 to 25.
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公开(公告)号：US11906420B2
公开(公告)日：2024-02-20
申请号：US17594895
申请日：2020-01-31
发明人： Yoshifumi Sekiguchi , Shin Imamura , Takahiro Ando , Tomoto Kawamura , Yuya Matsuoka , Sakuichiro Adachi , Yasuhiro Keta , Eiichiro Takada
CPC分类号： G01N21/01 , G01N21/59 , G01N21/63 , G01N2021/0106 , G01N2201/061
摘要： This invention is capable of improving performance of a biochemical analyzer and facilitating the maintenance. A light source includes: a first LED that emits ultraviolet light and a second LED that has a light emission spectrum different from that of the first LED, the first LED and the second LED being disposed in parallel; a reflection surface that is opposite to the first LED and reflects light of the first LED; and a dichroic surface that is opposite to the second LED, reflects light of the first LED, and allows light of the second LED to penetrate. When an optical member including the dichroic surface is made to be the dichroic prism, the reflection surface reflects light of the first LED to the second LED side, and by using light source of a configuration having a light shielding unit between a light emission surface of the second LED and a dichroic prism, entering of a light emitted from the plural LEDs as a one light beam (beam) to an optical system of latter stage of the biochemical analyzer is enabled.
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公开(公告)号：US11754493B2
公开(公告)日：2023-09-12
申请号：US17289358
申请日：2019-10-09
发明人： Tomoto Kawamura , Takahiro Ando , Shin Imamura , Masaaki Komatsu , Yuya Matsuoka , Takeshi Ishida , Sakuichiro Adachi
IPC分类号： G01N21/25 , G01N21/31 , G01N21/64 , H01L25/075 , H01L33/50
CPC分类号： G01N21/255 , G01N21/314 , G01N21/6428 , H01L25/0753 , G01N2021/3181 , G01N2201/062 , H01L33/502
摘要： A broadband light source device in a biochemical analyzing device, and facilitates maintenance thereof, including an LED substrate that is provided with an LED chip generating a light beam having a first wavelength band and including a fluorescent substance in the light beam having a first wavelength band and that is provided with an LED chip generating a light beam having a second wavelength band, in which the fluorescent substance includes at least alumina and at least one of Fe, Cr, Bi, Tl, Ce, Tb, Eu, and Mn and is produced by calcining a raw material that contains sodium at 6.1 to 15.9 wt. % in the whole raw material. The broadband light source device further includes an optical system including a light pipe that color-mixes the light beam passing through the fluorescent substance of the LED chip and the light beam emitted from the LED chip, and a flat dichroic prism.
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公开(公告)号：US11348757B2
公开(公告)日：2022-05-31
申请号：US17260494
申请日：2018-07-19
发明人： Shuhei Yabu , Michio Hatano , Shin Imamura , Masaaki Komatsu
IPC分类号： H01J37/244 , G02B1/04 , G02B19/00 , H01J37/22
摘要： In order to improve a yield of light generated by a collision between secondary electrons and gas molecules, the invention provides a charged particle beam device including: a charged particle beam source configured to irradiate a sample with a charged particle beam; a sample chamber configured to hold the sample and a gas molecule; a positive electrode configured to form an electric field that accelerates a secondary electron emitted from the sample; a photodetector configured to detect light generated by a collision between the accelerated secondary electron and the gas molecule; and a light condensing unit disposed between the sample and the photodetector, having a light emitting space in which the light is generated, and configured to condense the light generated in the light emitting space on a photodetector side.
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公开(公告)号：US12072454B2
公开(公告)日：2024-08-27
申请号：US17787617
申请日：2020-11-19
CPC分类号： G01T1/2018 , H01J49/025
摘要： Provided are a scintillator and the like capable of improving emission intensity. A scintillator (S) comprises a sapphire substrate (6), a GaN layer (4) that is provided on the incident side to the sapphire substrate (6) and includes GaN, a quantum well structure (3) provided on the incident side to the GaN layer (4), and a conductive layer (2) provided on the incident side to the quantum well structure (3), wherein a plurality of emitting layers (21) including InGaN and a plurality of barrier layers (22) including GaN are alternatively stacked in the quantum well structure (3), and an oxygen-containing layer (23) including oxygen is provided between the quantum well structure (3) and the conductive layer (2).
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公开(公告)号：US11694873B2
公开(公告)日：2023-07-04
申请号：US17962915
申请日：2022-10-10
IPC分类号： H01J37/244 , G01N23/2251 , G02B6/42
CPC分类号： H01J37/244 , G01N23/2251 , G02B6/4214 , G01N2223/07 , G01N2223/418 , G01N2223/505 , G01N2223/507
摘要： A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.
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公开(公告)号：US11515120B2
公开(公告)日：2022-11-29
申请号：US17269424
申请日：2018-09-21
IPC分类号： H01J37/244 , G01N23/2251 , G02B6/42
摘要： A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.
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