公开(公告)号：US20230091625A1

公开(公告)日：2023-03-23

申请号：US17821785

申请日：2022-08-23

Applicant: NOVA MEASURING INSTRUMENTS INC.

Inventor： David A. REED ,  Bruno W. SCHUELER ,  Bruce H. NEWCOME ,  Rodney SMEDT ,  Chris BEVIS

IPC: H01J49/14 ,  H01L21/66 ,  H01J49/12 ,  G01N23/2258 ,  G01N23/22 ,  G01Q10/04 ,  H01J49/26

Abstract: Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

公开(公告)号：US11289299B2

公开(公告)日：2022-03-29

申请号：US16972384

申请日：2020-10-23

Applicant: Arizona Board of Regents on behalf of Arizona State University

Inventor： Peter Williams

IPC: H01J27/10 ,  H01J49/12 ,  H01J9/14

Abstract: A duoplasmatron ion source with a partially ferromagnetic anode can be used in multiple applications, including the production of negative ions for secondary ion mass spectrometers and particle accelerators. A partially ferromagnetic anode, which may be embodied in a partially ferromagnetic anode insert, includes a ferromagnetic and non-ferromagnetic portions joined together at a juncture, with an ion extraction aperture defined in the ferromagnetic portion and the juncture being laterally offset from the aperture. An asymmetric magnetic field produced by the partially ferromagnetic region facilitates extraction of charged ions from the central, most intense region of a source plasma in the duoplasmatron ion source. A ferromagnetic conical portion of the anode defines the ion extraction aperture in order to maximize the magnetic field in the vicinity of this aperture.

公开(公告)号：US20210305037A1

公开(公告)日：2021-09-30

申请号：US17164499

申请日：2021-02-01

Applicant: NOVA MEASURING INSTRUMENTS INC.

Inventor： David A. REED ,  Bruno W. SCHUELER ,  Bruce H. NEWCOME ,  Rodney SMEDT ,  Chris BEVIS

IPC: H01J49/14 ,  H01L21/66 ,  H01J49/12 ,  G01N23/22 ,  G01Q10/04 ,  H01J49/26

Abstract: Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

公开(公告)号：US11133170B2

公开(公告)日：2021-09-28

申请号：US16997061

申请日：2020-08-19

Applicant: Indiana University Research and Technology Corporation ,  Kent State University

Inventor： Jacob T. Shelley ,  Kelsey L. Williams ,  Gary M. Hieftje ,  Andrew J. Schwartz

IPC: H01J49/14 ,  G01N27/68 ,  G01N30/72 ,  G01N21/67 ,  H01J13/16 ,  H01J15/00 ,  H01J37/32 ,  H01J37/04 ,  H01J49/16 ,  H01J49/12 ,  G01N27/622

Abstract: A solution-cathode glow discharge mass spectrometry (SCGD-MS) apparatus comprises a SCGD source and a mass spectrometer. The SCGD source may comprise conductive rods, a power source, and a capillary. A method for ionizing an analyte comprises flowing an electrically conductive liquid onto a conductive rod, applying an electric potential to a second conductive rod such that a plasma discharge forms between the first conductive rod and the electrically conductive liquid to produce ions, and separating the ions in a mass spectrometer. The analyte may be a polypeptide that may be contacted with trypsin. The analyte may be a solid, liquid, gas, chemical complex, or ion in solution. The method may comprise sequencing the polypeptide.

公开(公告)号：US10714325B2

公开(公告)日：2020-07-14

申请号：US15357461

申请日：2016-11-21

Applicant: Micromass UK Limited

Inventor： Jeffery Mark Brown ,  Martin Raymond Green ,  Steven Derek Pringle

IPC: H01J49/12 ,  H01J49/00 ,  H01J49/10 ,  H01J49/16 ,  G01N24/00 ,  H01J49/04

Abstract: A mass spectrometer is disclosed comprising a glow discharge device within the initial vacuum chamber of the mass spectrometer. The glow discharge device may comprise a tubular electrode located within an isolation valve, which is provided in the vacuum chamber. Reagent vapour may be provided through the tubular electrode, which is then subsequently ionised by the glow discharge. The resulting reagent ions may be used for Electron Transfer Dissociation of analyte ions generated by an atmospheric pressure ion source. Other embodiments are contemplated wherein the ions generated by the glow discharge device may be used to reduce the charge state of analyte ions by Proton Transfer Reaction or may act as lock mass or reference ions.

公开(公告)号：US20190355565A1

公开(公告)日：2019-11-21

申请号：US16408680

申请日：2019-05-10

Applicant: PERKINELMER HEALTH SCIENCES CANADA, INC.

Inventor： Mehrnaz Sarrafzadeh ,  Gholamreza Javahery ,  Charles Jolliffe ,  Lisa Cousins

IPC: H01J49/12

Abstract: Certain configurations of plasma discharge chambers and plasma ionization sources comprising a plasma discharge chamber are described. In some examples, the discharge chamber comprises a conductive area and is configured to sustain a plasma discharge within the discharge chamber. In other examples, the discharge chamber comprises at least one inlet configured to receive a plasma gas and at least one outlet configured to provide ionized analyte from the discharge chamber. Systems and methods using the discharge chambers are also described.

公开(公告)号：US20190080894A1

公开(公告)日：2019-03-14

申请号：US16186413

申请日：2018-11-09

Applicant: IONSENSE INC.

Inventor： Jordan Krechmer ,  Brian D. Musselman

IPC: H01J49/04 ,  G01N27/62 ,  H01J49/14 ,  H01J49/24 ,  H01J49/10 ,  H01J27/26 ,  H01J49/00 ,  G01N27/64 ,  H01J49/12

Abstract: The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed analyte molecules are ionized with ambient temperature ionizing species. In various embodiments of the invention a current is passed through a mesh upon which the analyte molecules are present. The current heats the mesh and results in desorption of the analyte molecules which then interact with gas phase metastable neutral molecules or atoms to form analyte ions characteristic of the analyte molecules.

公开(公告)号：US08822949B2

公开(公告)日：2014-09-02

申请号：US13364322

申请日：2012-02-02

Applicant: Jordan Krechmer ,  Brian D. Musselman

Inventor： Jordan Krechmer ,  Brian D. Musselman

IPC: H01J49/30 ,  H01J37/08 ,  H01J49/12 ,  H01J49/04 ,  H01J27/26

CPC classification number: H01J49/049 ,  G01N27/622 ,  G01N27/626 ,  G01N27/64 ,  H01J27/26 ,  H01J49/004 ,  H01J49/04 ,  H01J49/0431 ,  H01J49/10 ,  H01J49/126 ,  H01J49/14 ,  H01J49/24 ,  Y10T436/24

Abstract: The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed analyte molecules are ionized with ambient temperature ionizing species. In various embodiments of the invention a current is passed through a mesh upon which the analyte molecules are present. The current heats the mesh and results in desorption of the analyte molecules which then interact with gas phase metastable neutral molecules or atoms to form analyte ions characteristic of the analyte molecules.

Abstract translation: 本发明涉及一种使用热解析分析物以允许分析物分子解吸的方法和装置，其中解吸的分析物分子与环境温度电离物质电离。 在本发明的各种实施方案中，电流通过其上存在分析物分子的网。 电流加热网格并导致分析物分子的解吸，然后分析物分子与气相亚稳态的中性分子或原子相互作用以形成分析物分子特征的分析物离子。

公开(公告)号：US08710434B2

公开(公告)日：2014-04-29

申请号：US13522351

申请日：2011-03-11

Applicant: Shinji Yoshioka ,  Kouhei Mochizuki ,  Masaki Yoshie

Inventor： Shinji Yoshioka ,  Kouhei Mochizuki ,  Masaki Yoshie

IPC: H01J49/12

CPC classification number: H01J49/107 ,  H01J49/145 ,  H01J49/168

Abstract: A mass spectrometer that performs ion-molecule reaction ionization and accurately performs qualitative/quantitative analysis on a sample containing multi-components for a short time is achieved without an increase in the size of the device. A plurality of ion sources (3-1 to 3-4) are connected to each other in series. A controller/analyzer (6) controls supply of a voltage from a high voltage source (7) through a discharge needle (8) to any one or more of the ion sources (3-1 to 3-4). When the plurality of ion sources (3-1 to 3-4) operates, normal APCI is performed by an ion source that is close to a sample loading unit (1), and generated ions are discharged to the outside of the ion source by a discharge electrode (9). A residual neutral molecule that is not ionized is transferred by an extraction electrode (10) to an ion source located on the side of a mass spectrometer. Even when it is difficult for an ion source located at a single stage to detect a component, the component can be detected by a combination of the ion sources (3-1 to 3-4).

Abstract translation: 实现离子分子反应电离的质谱仪，并且在不增加装置尺寸的情况下实现了对包含多组分的样品在短时间内的定性/定量分析。 多个离子源（3-1〜3-4）彼此串联连接。 控制器/分析器（6）控制从高电压源（7）通过放电针（8）到任何一个或多个离子源（3-1至3-4）的电压供应。 当多个离子源（3-1至3-4）操作时，通过靠近样品加载单元（1）的离子源执行正常的APCI，并且产生的离子通过以下方式被排放到离子源的外部： 放电电极（9）。 未离子化的残留中性分子通过提取电极（10）转移到位于质谱仪侧的离子源。 即使位于单一级的离子源难以检测成分，也可以通过离子源（3-1〜3-4）的组合来检测成分。

公开(公告)号：US20120292501A1

公开(公告)日：2012-11-22

申请号：US13574788

申请日：2011-01-21

Applicant: Masuyuki Sugiyama ,  Yuichiro Hashimoto ,  Hideki Hasegawa

Inventor： Masuyuki Sugiyama ,  Yuichiro Hashimoto ,  Hideki Hasegawa

IPC: H01J49/12

CPC classification number: H01J49/105 ,  H01J27/16 ,  H05H1/2406 ,  H05H2001/2443

Abstract: A mass spectrometer of ionizing a sample by a dielectric barrier discharge under a reduced pressure. An ionization with inconsiderable fragmentation can be carried out highly sensitively by the present invention.

Abstract translation: 一种质谱仪，其通过介电阻挡放电在减压下离子化样品。 通过本发明可以高度敏感地进行具有不可忽视的碎裂的电离。