APPARATUS AND METHOD FOR GENERATING A HIGH POWER ENERGY BEAM BASED LASER

    公开(公告)号:US20200280160A1

    公开(公告)日:2020-09-03

    申请号:US16874367

    申请日:2020-05-14

    摘要: A system for generating an energy beam based laser includes an apparatus for receiving an energy beam and for generating an energy beam based laser. The apparatus is configurable or controllable for tuning an output wavelength of the laser generated by the apparatus using the energy beam. The apparatus includes a first component for producing a first magnetic field oriented in a first direction and a second component for producing a second magnetic field oriented in a second direction substantially opposite to the first direction. A channel through the apparatus is defined by the first component and the second component through which the energy beam passes to generate the laser at an output of the apparatus. The apparatus is configurable or controllable for modifying at least one of the first magnetic field and the second magnetic field for tuning the output wavelength of the laser.

    SYSTEM AND METHOD FOR REDUCING GAS FLOW BIAS IN AN RF-EXCITED RING LASER GYRO
    4.
    发明申请
    SYSTEM AND METHOD FOR REDUCING GAS FLOW BIAS IN AN RF-EXCITED RING LASER GYRO 审中-公开
    用于减少RF射频激光陀螺中的气体流量的系统和方法

    公开(公告)号:US20150204669A1

    公开(公告)日:2015-07-23

    申请号:US13962224

    申请日:2013-08-08

    摘要: A ring laser gyroscope comprising: a ring laser gyroscope block comprising an optical cavity filled with a gain medium, the optical cavity having at least three legs that form an optical path; a radio frequency coupler positioned along the optical path, wherein the radio frequency coupler is configured to transmit radio frequency energy which causes two counter-propagating laser beams to form from the gain medium, the laser beams propagating around the optical cavity through the optical path formed by the at least three legs of the optical cavity; a gas flow bypass configured to connect at least one of the at least three legs to at least one other leg of the at least three legs.

    摘要翻译: 一种环形激光陀螺仪,包括:环形激光陀螺仪块,包括填充有增益介质的光学腔,所述光学腔具有形成光路的至少三条腿; 射频耦合器,沿着光路定位,其中射频耦合器被配置为发射射频能量,其使得从增益介质形成两个反向传播的激光束,激光束通过形成的光路在光腔周围传播 通过光腔的至少三个腿; 气流旁路,其被配置为将至少三个腿中的至少一个腿连接到所述至少三个腿中的至少一个其他腿。

    Gas laser device and gas reservoir
    5.
    发明授权
    Gas laser device and gas reservoir 有权
    气体激光装置和气藏

    公开(公告)号:US09077141B2

    公开(公告)日:2015-07-07

    申请号:US14342508

    申请日:2012-07-19

    CPC分类号: H01S3/03 H01S3/076 H01S3/0975

    摘要: The invention refers to a laser device comprising a tubular space formed by at least two resonator tubes (12) for a gas to be excited, excitation means (50) for each of the at least two resonator tubes for exciting the gas in the resonator tube for generating laser light, a partially reflecting output coupler (42) for coupling out a laser beam, and at least one gas reservoir container (60) which forms a gas reservoir, the gas reservoir container being free of excitation means and in fluidic communication with the tubular space, wherein the gas reservoir container is arranged between the at least two resonator tubes and connected to the tubular space at two separate connecting portions (20).

    摘要翻译: 本发明涉及一种激光装置,其包括由用于待激发的气体的至少两个谐振管(12)形成的管状空间,用于至少两个谐振管中的每一个用于激励谐振器管中的气体的激励装置(50) 用于产生激光的部件反射输出耦合器(42),用于耦合输出激光束;以及至少一个形成气体储存器的储气容器(60),所述储气容器没有激励装置并与 所述管状空间,其中所述储气容器布置在所述至少两个谐振器管之间并且在两个分离的连接部分(20)处连接到所述管状空间。

    Gas laser apparatus for lithography
    6.
    发明授权
    Gas laser apparatus for lithography 有权
    用于光刻的气体激光装置

    公开(公告)号:US06922428B2

    公开(公告)日:2005-07-26

    申请号:US10394473

    申请日:2003-03-20

    摘要: The present invention relates to a long pulse gas laser apparatus for lithography further improved in the laser oscillation efficiency and stability increased by addition of xenon gas. A gas laser apparatus for lithography has a pair of discharge electrodes 2 provided in a laser chamber 1 and emits laser beam having a laser pulse width (Tis) of not less than 40 ns by exciting a laser gas sealed in the laser chamber 1 by electric discharge between the pair of discharge electrodes 2, the laser gas containing xenon in an amount not less than 2 ppm and not more than 100 ppm in partial pressure ratio. The laser gas has been heated at least when the laser beam is emitted.

    摘要翻译: 本发明涉及一种用于光刻的长脉冲气体激光装置,其进一步提高了通过添加氙气的激光振荡效率和稳定性。 用于光刻的气体激光装置具有设置在激光室1中的一对放电电极2,通过激发激光气体发射具有不小于40ns的激光脉冲宽度(T SUB)的激光束 通过一对放电电极2之间的放电密封在激光室1中,含有氙的激光气体的分压比不小于2ppm且不大于100ppm。 激光气体至少在激光束发射时被加热。

    High frequency excitation system
    10.
    发明申请
    High frequency excitation system 有权
    高频励磁系统

    公开(公告)号:US20050088855A1

    公开(公告)日:2005-04-28

    申请号:US10868535

    申请日:2004-06-15

    摘要: A power module is adapted to be connected to a voltage source and to supply power to a load. The power module includes a switching bridge that includes a first power transistor and a second power transistor, a first gate controller for driving the first power transistor and a second gate controller for driving the second power transistor. The first gate controller includes a first gate transformer, and a leakage inductance of the first gate transformer forms a resonant circuit with an input capacitance of the first power transistor. The second gate controller includes a second gate transformer, and a leakage inductance of the second gate transformer forms a resonant circuit with an input capacitance of the second power transistor.

    摘要翻译: 电源模块适于连接到电压源并向负载供电。 功率模块包括开关桥,其包括第一功率晶体管和第二功率晶体管,用于驱动第一功率晶体管的第一栅极控制器和用于驱动第二功率晶体管的第二栅极控制器。 第一栅极控制器包括第一栅极变压器,并且第一栅极互感器的漏电感形成具有第一功率晶体管的输入电容的谐振电路。 第二栅极控制器包括第二栅极变压器,并且第二栅极变压器的漏电感形成具有第二功率晶体管的输入电容的谐振电路。