GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE

    公开(公告)号:US20170237224A1

    公开(公告)日:2017-08-17

    申请号:US15457600

    申请日:2017-03-13

    申请人: Cymer, LLC

    发明人: Tanuj Aggarwal

    摘要: In a method, energy is supplied to a first gas discharge chamber of a first stage until a pulsed amplified light beam is output from the first stage and directed toward a second stage. While the energy is supplied to the first gas discharge chamber: a value of an operating parameter of the first gas discharge chamber is measured; it is determined whether to adjust an operating characteristic of the first gas discharge chamber based on the measured value; and, the operating characteristic of the first gas discharge chamber is adjusted if it is determined that the operating characteristic of the first gas discharge chamber should be adjusted. After it is determined that the operating characteristic of the first gas discharge chamber no longer should be adjusted, then an adjustment procedure is applied to an operating characteristic of a second gas discharge chamber of the second stage.

    TUNABLE OPTICAL PARAMETRIC OSCILLATOR
    4.
    发明申请
    TUNABLE OPTICAL PARAMETRIC OSCILLATOR 有权
    光电参数振荡器

    公开(公告)号:US20160111848A1

    公开(公告)日:2016-04-21

    申请号:US14894686

    申请日:2014-05-26

    申请人: COBOLT AB

    IPC分类号: H01S3/108 G02F1/39

    摘要: A new principle for a tunable optical parametric oscillator (OPO) and a related method are disclosed. An OPO is tuned by setting the temperature of a non-linear element to select a desired signal/idler combination, and narrow-band operation is effected by tuning a birefringent filter in the OPO to a temperature setting at which the filter matches the selected signal/idler combination, wherein broad and stable tunability is obtained by virtue of at least two different temperature settings of the non-linear element being matched to a single common temperature setting of the birefringent filter.

    摘要翻译: 公开了一种可调谐光参量振荡器(OPO)的新原理和相关方法。 通过设置非线性元件的温度来选择期望的信号/空闲器组合来调节OPO,并且通过将OPO中的双折射滤波器调谐到滤波器与所选信号匹配的温度设置来实现窄带操作 /惰轮组合,其中通过非线性元件的至少两个不同温度设置与双折射滤光器的单个共同温度设置相匹配来获得宽而稳定的可调性。

    Method and apparatus for locking and scanning the output frequency from a laser cavity
    5.
    发明授权
    Method and apparatus for locking and scanning the output frequency from a laser cavity 有权
    用于锁定和扫描来自激光腔的输出频率的方法和装置

    公开(公告)号:US09083145B2

    公开(公告)日:2015-07-14

    申请号:US14404687

    申请日:2013-05-22

    发明人: William Miller

    摘要: A system and method that can be employed to lock and scan the output of a laser cavity (2) is described. The system and method involves the use of a signal generator for generating an error signal between an output of the laser cavity (28) and the transmission (28) of the laser through a tunable external reference cavity (3). A dual piezo-actuated mirror (6b) permits processing of the error signal (26) with separate signal processing circuits (29a, 29b) used to provide an electrical feedback signal to the two piezo-electric crystals (22, 23b). When incorporated within a laser cavity the described system and methodology can be used to lock and scan the output of the laser cavity while providing the laser output with a reduced linewidth.

    摘要翻译: 描述了可用于锁定和扫描激光腔(2)的输出的系统和方法。 该系统和方法涉及使用信号发生器,用于通过可调外部参考腔(3)在激光腔(28)的输出与激光的透射(28)之间产生误差信号。 双压电致动反射镜(6b)允许用用于向两个压电晶体(22,23b)提供电反馈信号的分离的信号处理电路(29a,29b)处理误差信号(26)。 当结合在激光腔内时,可以使用所描述的系统和方法来锁定和扫描激光腔的输出,同时为激光输出提供减小的线宽。

    External cavity tunable laser with an air gap etalon comprising wedges
    6.
    发明授权
    External cavity tunable laser with an air gap etalon comprising wedges 有权
    具有包括楔形件的气隙标准具的外部可调谐激光器

    公开(公告)号:US08929409B2

    公开(公告)日:2015-01-06

    申请号:US12747674

    申请日:2008-12-22

    摘要: A tunable narrow linewidth laser is provided, wherein an adjustable etalon structure is employed to simultaneously tune the wavelength of the laser transmission and the length of the laser cavity. The etalon structure is an effective, relatively thick shear plate comprised of transparent matched wedge-shaped substrates and a pair of parallel, partially transmissive mirrors with a space therebetween. Rotation of the etalon structure relative to the laser input changes the angle of incidence to the first substrate and the etalon angle, thereby changing the wavelength of the laser light and also changing the length of the external laser cavity. Thus, reliable frequency tuning is achieved, without mode hopping.

    摘要翻译: 提供了可调谐的窄线宽激光器,其中采用可调标准具结构来同时调谐激光传输的波长和激光腔的长度。 标准具结构是一种有效的,相对较厚的剪切板,其包括透明匹配的楔形基板和一对平行的,部分透射的反射镜,其间具有空间。 标准具结构相对于激光输入的旋转改变了与第一衬底的入射角和标准角,从而改变了激光的波长,并且改变了外部激光腔的长度。 因此,可实现可靠的频率调谐,无需跳频。

    MICROCHIP LASER WITH SINGLE SOLID ETALON AND INTERFACIAL COATING
    7.
    发明申请
    MICROCHIP LASER WITH SINGLE SOLID ETALON AND INTERFACIAL COATING 有权
    微型激光与单固体ETALON和界面涂层

    公开(公告)号:US20140086268A1

    公开(公告)日:2014-03-27

    申请号:US13627633

    申请日:2012-09-26

    申请人: RAYTHEON COMPANY

    IPC分类号: H01S3/11

    摘要: A microchip laser includes a microchip laser base comprising a gain region and a passive Q-switch region. The microchip laser also includes a solid etalon coupled to the microchip laser base, and an interfacial coating disposed between the microchip laser base and the solid etalon. In some embodiments, the microchip laser further includes a dichroic coating disposed on a surface of the microchip laser base opposite the interfacial coating.

    摘要翻译: 微芯片激光器包括包括增益区域和无源Q开关区域的微芯片激光器基座。 微芯片激光器还包括耦合到微芯片激光器基座的固体标准具和设置在微芯片激光基座和固体标准具之间的界面涂层。 在一些实施例中,微芯片激光器还包括设置在与界面涂层相对的微芯片激光器基底的表面上的二向色涂层。

    Wavelength conversion laser light source and image display device
    9.
    发明授权
    Wavelength conversion laser light source and image display device 有权
    波长转换激光光源和图像显示装置

    公开(公告)号:US08456734B2

    公开(公告)日:2013-06-04

    申请号:US13380340

    申请日:2011-04-20

    IPC分类号: G02F1/37

    摘要: A wavelength conversion laser light source having: a laser medium which generates a fundamental wave light; a laser resonator for causing laser oscillation of the fundamental wave light; a wavelength convertor which is provided with a wavelength converting region to convert the fundamental wave light under the laser oscillation by means of the laser resonator into converted light of a different wavelength; and an excitation laser light source for exciting the laser medium, wherein the laser resonator has at least one reflecting surface which reflects the fundamental wave, and a first reflecting element which is provided on an end surface of the wavelength convertor to reflect the fundamental wave light; the wavelength converting region is situated between the at least one reflecting surface and the first reflecting element; the wavelength convertor has a periodic first polarization reversal structure formed in the wavelength converting region, and a non-converting region formed between the first reflecting element and the wavelength converting region; and the non-converting region does not convert the fundamental wave light into the converted light.

    摘要翻译: 一种波长转换激光光源,具有:产生基波光的激光介质; 用于引起基波激光振荡的激光谐振器; 波长转换器,其设置有波长转换区域,以通过激光谐振器将激光振荡下的基波光转换成不同波长的转换光; 以及用于激发激光介质的激发激光光源,其中所述激光谐振器具有至少一个反射所述基波的反射表面,以及设置在所述波长转换器的端面以反射所述基波光的第一反射元件 ; 波长转换区域位于至少一个反射表面和第一反射元件之间; 所述波长转换器具有形成在所述波长转换区域中的周期性第一极化反转结构和形成在所述第一反射元件与所述波长转换区域之间的非转换区域; 并且非转换区域不将基波光转换成转换的光。

    Green laser generation device, and portable electronic machine having laser projection display using the said device
    10.
    发明授权
    Green laser generation device, and portable electronic machine having laser projection display using the said device 有权
    绿色激光产生装置以及具有使用所述装置的激光投射显示的便携式电子机器

    公开(公告)号:US08275009B2

    公开(公告)日:2012-09-25

    申请号:US12812443

    申请日:2008-10-13

    IPC分类号: H01S3/10

    摘要: The present invention relates to a green laser generation device which can be applied to a cellular phone, and more particularly to a green laser generation device which is ultra compact in size having volume of 1 cc or less, despite having a built-in thermo electric cooler, and has sufficient output power, despite having low power consumption, and a portable electronic machine having a laser projection display using the said device. The present invention provides a green laser generation device comprising an LD pump constituted by a photo diode; a fundamental generator generating infrared light laser according to the driving of the LD pump; a second harmonic generator generating green light using the generated infrared light laser; a polarization maintenance unit inserted between the fundamental generator and the second harmonic generator to maintain the polarization of the laser; and a temperature controller controlling an internal temperature of the green laser generation device.

    摘要翻译: 本发明涉及一种可应用于蜂窝电话的绿色激光产生装置,更具体地说,涉及体积小于等于1cc的超小尺寸的绿色激光产生装置,尽管内置热电 冷却器,并且具有足够的输出功率,尽管具有低功耗,以及具有使用所述装置的激光投影显示的便携式电子机器。 本发明提供了一种绿色激光产生装置,包括由光电二极管构成的LD泵; 根据LD泵的驱动产生红外光激光器的基本发生器; 使用所产生的红外光激光器产生绿光的二次谐波发生器; 偏振维持单元插入在基波发生器和二次谐波发生器之间以保持激光器的极化; 以及控制绿色激光产生装置的内部温度的温度控制器。