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公开(公告)号:US11158989B2
公开(公告)日:2021-10-26
申请号:US16846103
申请日:2020-04-10
发明人: Henry Yee-Shian Tong , Wen-Chih Wang , Hsin-Liang Chen , Louis Chun-Lin Chang , Cheng-Chieh Chen , Li-Jui Chen , Po-Chung Cheng , Jeng-Yann Tsay
摘要: A device includes a laser source, an amplifier, an optical sensor and a spectrometer. The laser source is configured to produce a seed laser beam. The amplifier includes gain medium and a discharging unit. The discharging unit is configured to pump the gain medium for amplifying power of the seed laser beam. The optical sensor is coupled to the amplifier and configured for sensing an optical emission generated in the amplifier while the gain medium is discharging. The spectrometer is coupled with the optical sensor and configured to measure a spectrum of the optical emission.
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公开(公告)号:US10971886B2
公开(公告)日:2021-04-06
申请号:US16266189
申请日:2019-02-04
申请人: Gigaphoton Inc.
发明人: Takeshi Asayama , Hiroyuki Masuda
IPC分类号: H01S3/097 , H01S3/036 , H01S3/134 , H01S3/225 , H01S3/104 , H01S3/038 , H01S3/0971 , H01S3/10 , H01S3/08 , H01S3/23 , H01S3/00
摘要: A laser apparatus includes a chamber accommodating a pair of discharge electrodes, a gas supply and exhaust device configured to supply laser gas to an interior of the chamber and exhaust laser gas from the interior of the chamber, and a controller. The controller performs first control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber at every first number of pulses or first elapsed time, and second control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber before the first control at every second number of pulses less than the first number of pulses or second elapsed time less than the first elapsed time.
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公开(公告)号:US10816905B2
公开(公告)日:2020-10-27
申请号:US14681675
申请日:2015-04-08
申请人: Cymer, LLC
发明人: Rahul Ahlawat
IPC分类号: H01S3/137 , H01S3/13 , G03F7/20 , H01S3/0971
摘要: A wavelength error for each pulse in a first subset of pulses emitted from an optical source is determined, the wavelength error being the difference between a wavelength for a particular pulse and a target wavelength; a pulse-by-pulse correction signal is determined based on the determined wavelength error, the pulse-by-pulse correction signal including a correction signal associated with each pulse in the first subset of pulses; and a correction based on the determined pulse-by-pulse correction signal is applied to each pulse in a second subset of pulses emitted from the optical source, where applying a correction to a pulse in the second subset of pulses reduces the wavelength error of the pulse in the second subset of pulses.
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公开(公告)号:US10777962B2
公开(公告)日:2020-09-15
申请号:US16181526
申请日:2018-11-06
申请人: Rofin-Sinar UK Ltd
摘要: A polarisation and mode selection technique for a gas waveguide laser is described in which a surface of the waveguide is formed to be substantially dielectric with a localised metallic region therein. The metallic region provides linear polarisation while the dielectric surface provides for low order mode selection. Embodiments are described to channel and planar waveguides with various resonator configurations. Ranges are provided for the size and location of the metallic region on the waveguide surface.
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公开(公告)号:US10763070B2
公开(公告)日:2020-09-01
申请号:US16070785
申请日:2017-01-12
发明人: Paul Ceccato , Hervé Besaucèle
摘要: Disclosed is a low pressure wire ion plasma discharge source including an elongated ionization chamber housing at least two parallel anode wires extending longitudinally within the ionization chamber. A first of the at least two anode wires is connected to a DC voltage supply and a second of the at least two anode wires is connected to a pulsed voltage supply.
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公开(公告)号:US10447001B2
公开(公告)日:2019-10-15
申请号:US15858219
申请日:2017-12-29
申请人: GIGAPHOTON INC.
IPC分类号: H01S3/038 , H01S3/086 , H01S3/104 , H01S3/134 , H01S3/08 , H01S3/136 , H01S3/0971 , H01S3/223 , H01S3/225 , H01S3/23 , H01S3/00
摘要: A laser unit may include a laser chamber including a pair of discharge electrodes that are opposed to each other in a first direction with an electrode gap interposed in between and are configured to provide a discharge width in a second direction, orthogonal to the first direction, smaller than the electrode gap; and an optical resonator including a first optical member and a second optical member that are opposed to each other in a third direction orthogonal to both the first direction and the second direction with the discharge electrodes interposed in between, and configured to amplify laser light generated between the discharge electrodes and output amplified laser light, the optical resonator satisfying the following expression to configure a stable resonator in the second direction: 0
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公开(公告)号:US20190103720A1
公开(公告)日:2019-04-04
申请号:US15721900
申请日:2017-09-30
发明人: Dustin H. Froula , Terry Kessler
IPC分类号: H01S3/00 , H01S3/097 , H01S3/0971 , H01S3/104
摘要: Methods and systems are disclosed for using a chromatic lens system to provide a “flying focus”—i.e., an advanced focusing scheme enabling spatiotemporal control of a focal location. In a method, a photon beam is emitted from a source at a wavelength. The photon beam may have more than one wavelength. The photon beam is focused to a focal location using a chromatic lens system. The focal location is at a first longitudinal distance along an optical axis from the chromatic lens system. The wavelength of the photon beam is changed as a function of time to change the focal location as a function of time. The wavelength may be changed such that the focal location changes with a focal velocity.
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公开(公告)号:US20190081451A1
公开(公告)日:2019-03-14
申请号:US16185542
申请日:2018-11-09
申请人: GIGAPHOTON INC.
发明人: Akihiko KUROSU , Takashi MATSUNAGA , Hiroyuki MASUDA , Osamu WAKABAYASHI , Hiroaki TSUSHIMA , Masanori YASHIRO , Takeshi OHTA
IPC分类号: H01S3/036 , H01S3/04 , H01S3/0971 , H01S3/104 , H01S3/097 , H01S3/225 , H01S3/041 , H01S3/134 , H01S3/13 , H01S3/08 , H01S3/03
摘要: There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.
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公开(公告)号:US10218147B2
公开(公告)日:2019-02-26
申请号:US15457600
申请日:2017-03-13
申请人: Cymer, LLC
发明人: Tanuj Aggarwal
IPC分类号: H01S3/08 , H01S3/13 , H01S3/036 , H01S3/23 , H01S3/134 , H01S3/225 , H01S3/104 , H01S3/038 , H01S3/097 , H01S3/0971
摘要: In a method, energy is supplied to a first gas discharge chamber of a first stage until a pulsed amplified light beam is output from the first stage and directed toward a second stage. While the energy is supplied to the first gas discharge chamber: a value of an operating parameter of the first gas discharge chamber is measured; it is determined whether to adjust an operating characteristic of the first gas discharge chamber based on the measured value; and, the operating characteristic of the first gas discharge chamber is adjusted if it is determined that the operating characteristic of the first gas discharge chamber should be adjusted. After it is determined that the operating characteristic of the first gas discharge chamber no longer should be adjusted, then an adjustment procedure is applied to an operating characteristic of a second gas discharge chamber of the second stage.
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公开(公告)号:US20180233876A1
公开(公告)日:2018-08-16
申请号:US15950267
申请日:2018-04-11
发明人: Robert Schulz , Torsten Beck
摘要: Methods, devices, and apparatus for generating plasma or laser pulses by radio frequency (RF) excitation pulses are provided. In one aspect, a method includes specifying radio frequency (RF) excitation pulses at least partially as a function of a preceding RF excitation of a medium and outputting a signal to a RF pulse generator, the signal configured to cause the RF pulse generator to generate the specified RF excitation pulses for exciting the medium to generate plasma or laser pulses. The RF excitation pulses is specified to become more strongly reduced in energy when a remaining excitation of the medium by the preceding RF excitation is higher.
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