发明授权
- 专利标题: Laser apparatus
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申请号: US16266189申请日: 2019-02-04
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公开(公告)号: US10971886B2公开(公告)日: 2021-04-06
- 发明人: Takeshi Asayama , Hiroyuki Masuda
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 代理机构: Studebaker & Brackett PC
- 主分类号: H01S3/097
- IPC分类号: H01S3/097 ; H01S3/036 ; H01S3/134 ; H01S3/225 ; H01S3/104 ; H01S3/038 ; H01S3/0971 ; H01S3/10 ; H01S3/08 ; H01S3/23 ; H01S3/00
摘要:
A laser apparatus includes a chamber accommodating a pair of discharge electrodes, a gas supply and exhaust device configured to supply laser gas to an interior of the chamber and exhaust laser gas from the interior of the chamber, and a controller. The controller performs first control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber at every first number of pulses or first elapsed time, and second control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber before the first control at every second number of pulses less than the first number of pulses or second elapsed time less than the first elapsed time.
公开/授权文献
- US20190173259A1 LASER APPARATUS 公开/授权日:2019-06-06
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