Invention Grant
- Patent Title: Laser apparatus
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Application No.: US16266189Application Date: 2019-02-04
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Publication No.: US10971886B2Publication Date: 2021-04-06
- Inventor: Takeshi Asayama , Hiroyuki Masuda
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/097
- IPC: H01S3/097 ; H01S3/036 ; H01S3/134 ; H01S3/225 ; H01S3/104 ; H01S3/038 ; H01S3/0971 ; H01S3/10 ; H01S3/08 ; H01S3/23 ; H01S3/00

Abstract:
A laser apparatus includes a chamber accommodating a pair of discharge electrodes, a gas supply and exhaust device configured to supply laser gas to an interior of the chamber and exhaust laser gas from the interior of the chamber, and a controller. The controller performs first control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber at every first number of pulses or first elapsed time, and second control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber before the first control at every second number of pulses less than the first number of pulses or second elapsed time less than the first elapsed time.
Public/Granted literature
- US20190173259A1 LASER APPARATUS Public/Granted day:2019-06-06
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