公开(公告)号：US07402825B2

公开(公告)日：2008-07-22

申请号：US11168785

申请日：2005-06-28

申请人： Rodney D. Simmons ,  John W. Viatella ,  Jerzy R. Hoffman ,  R. Kyle Webb ,  Alexander N. Bykanov ,  Oleh Khodykin

发明人： Rodney D. Simmons ,  John W. Viatella ,  Jerzy R. Hoffman ,  R. Kyle Webb ,  Alexander N. Bykanov ,  Oleh Khodykin

IPC分类号： G21G4/00

CPC分类号： H05G2/001

摘要： A laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source and method of operating same is disclosed which may comprise an EUV plasma production chamber having a chamber wall; a drive laser entrance window in the chamber wall; a drive laser entrance enclosure intermediate the entrance window and a plasma initiation site within the chamber and comprising an entrance enclosure distal end opening; at least one aperture plate intermediate the distal opening and the entrance window comprising at least one drive laser passage aperture. The at least one aperture plate may comprise at least two aperture plates comprising a first aperture plate and a second aperture plate defining an aperture plate interim space. The at least one drive laser aperture passage may comprise at least two drive laser aperture passages. The laser passage aperture may define an opening large enough to let the drive laser beam pass without attenuation and small enough to substantially reduce debris passing through the laser passage aperture in the direction of the entrance window.

摘要翻译： 公开了一种激光产生的等离子体（“LPP”）极紫外（“EUV”）光源及其操作方法，其可以包括具有室壁的EUV等离子体生产室; 在室壁中的驱动激光入口窗口; 在入口窗口中间的驱动激光入口外壳和腔室内的等离子体起始位置，并且包括入口外壳远端开口; 在远端开口和入口窗之间的至少一个孔板包括至少一个驱动激光通道孔。 至少一个孔板可以包括至少两个孔板，其包括限定孔板中间空间的第一孔板和第二孔板。 至少一个驱动激光孔通道可以包括至少两个驱动激光孔通道。 激光通道孔可以限定足够大的开口，使得驱动激光束通过而不衰减，并且足够小以基本上减少通过入口窗口方向的穿过激光通道孔的碎屑。

公开(公告)号：US06995359B1

公开(公告)日：2006-02-07

申请号：US10457035

申请日：2003-06-11

申请人： Eric A. Hillenbrand ,  Roy Luoma ,  R. Kyle Webb

发明人： Eric A. Hillenbrand ,  Roy Luoma ,  R. Kyle Webb

IPC分类号： G01N21/35

CPC分类号： G01J5/522 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/0286 ,  G01J5/62

摘要： A calibration method for radiometric imaging systems that relies on an absolute measurement of scene radiance (thereby requiring a baseline measurement of zero radiance), and a shutter assembly for taking the baseline measurement of zero radiance which is operable under cryogenic temperatures as low as 80.5K (−192.65° C.) in vacuums measuring

摘要翻译： 用于放射成像系统的校准方法，其依赖于场景辐射的绝对测量（从而需要零辐射的基线测量），以及用于进行零辐射基线测量的快门组件，该低温可在低于80.5K的低温 （-192.65℃）在测量<10 -6乇（mm Hg）的真空中。 快门组件通常包括致动器和快门机构。 致动器优选地是能够在极端环境（例如，<10 -6托的真空度，低于90K的温度）下操作的微型螺线管组件。 快门机构优选地包括单个快门叶片，并且当经受极端环境时也能够操作。 使用快门组件的方法为红外成像系统提供零辐射参考测量，从而提供可以确定绝对场景辐射的基础。

公开(公告)号：US06928093B2

公开(公告)日：2005-08-09

申请号：US10712545

申请日：2003-11-13

申请人： R. Kyle Webb ,  Scot T. Smith ,  Roy Luoma

发明人： R. Kyle Webb ,  Scot T. Smith ,  Roy Luoma

IPC分类号： H01S3/00 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/23 ,  H01S3/10

CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

摘要： A method and apparatus for laser light pulse stretching is disclosed which may comprise a beam splitter in the path of a laser output light pulse beam; selected to pass a first percent of the energy of a first input pulse of the laser output light pulse beam along a laser output light pulse beam output path as a first output pulse and to reflect a second percent of the energy of the laser output light pulse beam into a first delayed beam; an optical delay path receiving the first delayed beam and returning the first delayed beam to the beam splitter in an orientation such that a third percent of the first delayed beam is reflected into the output path as a second output pulse and a fourth percent is passed into the optical delay path as a second delayed beam; the optical delay path receiving the second delayed beam and returning the second delayed beam to the beam splitter in an orientation such that the third percent of the second delayed beam is reflected into the output path as a third output pulse and the fourth percent of the second delayed beam is passed into the optical delay path as a third delayed beam; the optical delay path receiving the third delayed beam and returning the third delayed beam to the beam splitter in an orientation such that the third percent of the third delayed beam is reflected into the output path as a fourth output pulse; the first input pulse being a first pulse in a plurality of pulses output from a prior pulse stretcher, each of a plurality of succeeding input pulses comprising the output of the prior pulse stretcher resulting from the stretching of a narrow band laser light output pulse, forming successive first, second, third and fourth output pulses, the combination of which forms a pulse stretcher having an output with TIS of at least 200 ns. The optical delay path may be formed of a plurality of at least eight reflecting mirrors and contained in an elongated enclosure having first and second end plates mounting a first group of at least four of the at least eight reflecting mirrors mounted on the first mounting surface symmetrically about a center axis of the optical delay path and a second group of at least four of the at least eight reflecting mirrors mounted on the second mounting surface symmetrically about the center axis. The mirrors may be staggered in a predefined pattern, e.g., a circular pattern. The delay path may lie in a plurality of planes. The apparatus may be part of a laser system, part of a beam delivery system or an interface between the two.

公开(公告)号：US06751033B2

公开(公告)日：2004-06-15

申请号：US09976555

申请日：2001-10-12

申请人： Peter Goldstein ,  Carlos G. Suarez ,  Scott A. DeLong ,  R. Kyle Webb ,  Tibor Juhasz

发明人： Peter Goldstein ,  Carlos G. Suarez ,  Scott A. DeLong ,  R. Kyle Webb ,  Tibor Juhasz

IPC分类号： G02B702

CPC分类号： G02B7/28 ,  A61F9/008 ,  A61F9/00802 ,  A61F9/00825 ,  A61F9/009 ,  A61F2009/00844 ,  A61F2009/00855 ,  A61F2009/00872 ,  A61F2009/00891

摘要： A closed-loop focusing system and method positions a focusing assembly to a desired positioned. A feedback positioning device, such as a linear encoder, provides an actual or “read” value for the linear movement of the focusing assembly. The desired position is compared to the actual position of the focusing assembly. If the two values are outside of a predetermined tolerance or valid range, then an audible or visual warning will be given. Furthermore, when a laser source is utilized with the focusing system, then laser operation will be prevented where the two values are outside of tolerance.

摘要翻译： 闭环聚焦系统和方法将聚焦组件定位到期望的位置。 诸如线性编码器的反馈定位装置为聚焦组件的线性运动提供实际或“读取”值。 将所需位置与聚焦组件的实际位置进行比较。 如果两个值超出了预定的公差或有效范围，则会发出声音或视觉警告。 此外，当与聚焦系统一起使用激光源时，在两个值超出公差的情况下，将防止激光操作。

公开(公告)号：US06208675B1

公开(公告)日：2001-03-27

申请号：US09141068

申请日：1998-08-27

申请人： R. Kyle Webb

发明人： R. Kyle Webb

IPC分类号： H01S336

CPC分类号： H01S3/036 ,  H01S3/225

摘要： A blower assembly for circulating gases in a laser chamber. The blower assembly includes a driving assembly operatively engaged to a drive side shaft for rotating a fan assembly. A first bearing assembly supports the drive side shaft. The blower assembly may further include an idle side shaft for supporting the fan assembly and a second bearing assembly circumscribing the idle side shaft. The driving assembly includes a motor disposed over a rotor. The fan assembly includes a pair of hubs supporting a plurality of blades. The first and second bearing assemblies comprise a ceramic compound, such as silicon nitride (Si3N4), and are lubricated with a synthetic oil, such as perfluoropolyalkylether (PFPE).

摘要翻译： 用于在激光室中循环气体的鼓风机组件。 鼓风机组件包括可操作地接合到驱动侧轴的驱动组件，用于旋转风扇组件。 第一轴承组件支撑驱动侧轴。 鼓风机组件还可以包括用于支撑风扇组件的空转侧轴和围绕空转侧轴的第二轴承组件。 驱动组件包括设置在转子上方的电动机。 风扇组件包括支撑多个叶片的一对轮毂。 第一和第二轴承组件包括诸如氮化硅（Si 3 N 4）的陶瓷化合物，并用合成油例如全氟聚烷基醚（PFPE）润滑。

公开(公告)号：US06208674B1

公开(公告)日：2001-03-27

申请号：US09386938

申请日：1999-08-31

申请人： R. Kyle Webb ,  William N. Partlo

发明人： R. Kyle Webb ,  William N. Partlo

IPC分类号： H01S322

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70483 ,  G03F7/70558 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

摘要： A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.

摘要翻译： 气体放电激光室的馈通结构通过密封的气体外壳的壁将电力传导到外壳内的单件电极。 馈通结构包括大于电极的单件集成主绝缘体。 主绝缘体在电极和外壳壁之间被压缩。 在电极和单件绝缘体之间形成界面的表面是绝缘体，并且壁都非常光滑，以允许部件随着室温度变化而膨胀和收缩。 馈通结构还为电极提供机械支撑和对准，并且包括用于防止馈通结构周围的气体泄漏的密封件。

公开(公告)号：US07190707B2

公开(公告)日：2007-03-13

申请号：US10739961

申请日：2003-12-17

申请人： Palash P. Das ,  Khurshid Ahmed ,  Gregory Francis ,  Holger Glatzel ,  Alexei Lukashev ,  Jeremy Tyler ,  R. Kyle Webb

发明人： Palash P. Das ,  Khurshid Ahmed ,  Gregory Francis ,  Holger Glatzel ,  Alexei Lukashev ,  Jeremy Tyler ,  R. Kyle Webb

IPC分类号： H01S3/22

CPC分类号： B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  G01J1/04 ,  G01J1/0418 ,  G01J1/4257 ,  G01J2001/0285 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/7055 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/0943 ,  H01S3/097 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

摘要： A beam delivery unit and method of delivering a laser beam from a laser light source for excimer or molecular fluorine gas discharge laser systems in the DUV and smaller wavelengths is disclosed, which may comprise: a beam delivery enclosure defining an output laser light pulse beam delivery pat from an output of a gas discharge laser to an input of a working apparatus employing the light contained in the output laser light pulse beam; a purge mechanism operatively connected to the beam delivery enclosure; an in-situ beam parameter monitor and adjustment mechanism within the enclosure, comprising a retractable bean redirecting optic; a beam analysis mechanism external to the enclosure; and, a retraction mechanism within the enclosure and operable from outside the enclosure and operative to move the retractable beam redirecting optic from a retracted position out of the beam path to an operative position in the beam path. The BDU may also include a beam attenuator unit contained within the enclosure adjustably mounted within the enclosure for positioning within the beam delivery pat. The BDU may have at least two enclosure isolation mechanisms comprising a first enclosure isolation mechanism on a first side of the enclosure from the at least one optic module and a second enclosure isolation mechanism on a second side of the enclosure from the at least one optic module, each respective enclosure isolation mechanism comprising a flapper valve having a metal to metal seating mechanism and a locking pin assembly. A precision offset ratchet driver operative to manipulate actuator mechanisms in difficult to reach locations may be provided. An external kinematic alignment tool may be provided. A method of contamination control for a BDU is disclosed comprising selection of allowable materials and fabrication processes.

摘要翻译： 公开了一种束传递单元和从DUV和较小波长的准分子或分子氟气体放电激光系统的激光光源传送激光束的方法，其可以包括：限定输出激光光脉冲束传送 从气体放电激光器的输出拍摄到使用包含在输出激光脉冲光束中的光的工作装置的输入; 可操作地连接到射束输送罩的清洗机构; 外壳内的原位波束参数监视和调节机构，包括可伸缩的豆重定向光学元件; 外壳外部的光束分析机构; 以及在所述外壳内的收缩机构，并且可从所述外壳的外部操作，并且可操作地将所述可伸缩的束重定向光学器件从缩回位置移出所述光束路径到所述光束路径中的操作位置。 BDU还可以包括容纳在外壳内的光束衰减器单元，其可调节地安装在外壳内用于定位在光束输送光点内。 BDU可以具有至少两个机壳隔离机构，该机构包括位于外壳的第一侧面上的至少一个光学模块的第一外壳隔离机构和位于外壳的第二侧的第二外壳隔离机构，所述第二外壳隔离机构与所述至少一个光学模块 每个相应的外壳隔离机构包括具有金属对金属安置机构和锁销组件的挡板阀。 可以提供操作来操作难以到达位置的致动器机构的精密偏移棘轮驱动器。 可以提供外部运动学对准工具。 公开了一种用于BDU的污染控制方法，包括选择允许的材料和制造工艺。

公开(公告)号：US07180081B2

公开(公告)日：2007-02-20

申请号：US10742233

申请日：2003-12-18

申请人： John Walker ,  R. Kyle Webb ,  Oleh Khodykin

发明人： John Walker ,  R. Kyle Webb ,  Oleh Khodykin

IPC分类号： H01J65/04

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70175 ,  G03F7/70825 ,  G03F7/70891 ,  G03F7/70908 ,  G03F7/70916 ,  G21K1/06 ,  G21K2201/064 ,  G21K2201/067 ,  H01S3/005 ,  H01S3/225 ,  H05G2/005 ,  H05H1/06

摘要： An DPP EUV source is disclosed which may comprise a debris mitigation apparatus employing a metal halogen gas producing a metal halide from debris exiting the plasma. The EUV source may have a debris shield that may comprise a plurality of curvilinear shield members having inner and outer surfaces connected by light passages aligned to a focal point, which shield members may be alternated with open spaces between them and may have surfaces that form a circle in one axis of rotation and an ellipse in another. The electrodes may be supplied with a discharge pulse shaped to produce a modest current during the axial run out phase of the discharge and a peak occurring during the radial compression phase of the discharge. The light source may comprise a turbomolecular pump having an inlet connected to the generation chamber and operable to preferentially pump more of the source gas than the buffer gas from the chamber. The source may comprise a tuned electrically conductive electrode comprising: a differentially doped ceramic material doped in a first region to at least select electrical conductivity and in a second region at least to select thermal conductivity. The first region may be at or near the outer surface of the electrode structure and the ceramic material may be SiC or alumina and the dopant is BN or a metal oxide, including SiO or TiO2. The source may comprise a moveable electrode assembly mount operative to move the electrode assembly mount from a replacement position to an operating position, with the moveable mount on a bellows. The source may have a temperature control mechanism operatively connected to the collector and operative to regulate the temperature of the respective shell members to maintain a temperature related geometry optimizing the glancing angle of incidence reflections from the respective shell members, or a mechanical positioner to position the shell members. The shells may be biased with a voltage. The debris shield may be fabricated using off focus laser radiation. The anode may be cooled with a hollow interior defining two coolant passages or porous metal defining the passages. The debris shield may be formed of pluralities of large, intermediate and small fins attached either to a mounting ring or hub or to each other with interlocking tabs that provide uniform separation and strengthening and do not block any significant amount of light.

公开(公告)号：US06104735A

公开(公告)日：2000-08-15

申请号：US290851

申请日：1999-04-13

申请人： R. Kyle Webb

发明人： R. Kyle Webb

IPC分类号： F16C32/04 ,  G03F7/20 ,  H01S3/036 ,  H01S3/225 ,  H01S3/00

CPC分类号： G03F7/708 ,  F16C32/047 ,  H01S3/036

摘要： The present invention provides an electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported by an active radial magnetic bearing system and driven by a brushless DC motor in which the rotor of the motor and the rotors of at least two radial bearings are sealed within the gas environment of the laser cavity and the motor stator and the coils of the bearing magnets are located outside the gas environment. No thrust bearing is provided. Axial positioning of the shaft is provided by reluctance centering produced by the at least two radial magnetic bearings and the brushless DC motor. In a preferred embodiment the motor stator is larger in the axial direction than the rotor to increase the magnetic centering effect.

摘要翻译： 本发明提供了一种具有激光腔的放电气体激光器，其中包含激光气体和用于循环激光气体的风扇。 风扇由主动径向磁轴承系统支撑，由无刷直流电动机驱动，其中电动机的转子和至少两个径向轴承的转子被密封在激光腔和电动机定子的气体环境中 轴承磁体的线圈位于气体环境之外。 没有提供推力轴承。 通过由至少两个径向磁轴承和无刷直流电动机产生的磁阻定心来提供轴的轴向定位。 在优选实施例中，电动机定子在轴向上比转子大，以增加磁对中效果。

公开(公告)号：US07018376B2

公开(公告)日：2006-03-28

申请号：US10865165

申请日：2004-06-10

申请人： R. Kyle Webb ,  Michael F. Brownell ,  Christopher Horvath ,  Tibor Juhasz ,  Ronald M. Kurtz ,  Laszlo I. Nagy ,  Mark W. Ross ,  Carlos G. Suarez

发明人： R. Kyle Webb ,  Michael F. Brownell ,  Christopher Horvath ,  Tibor Juhasz ,  Ronald M. Kurtz ,  Laszlo I. Nagy ,  Mark W. Ross ,  Carlos G. Suarez

IPC分类号： A61B18/18

CPC分类号： A61F9/009 ,  A61B2017/306 ,  A61F9/008 ,  A61F2009/00846

摘要： A method for applanating an anterior surface of a cornea and coupling the eye to a surgical laser is disclosed. A interface is provided which has a central orifice and top and bottom surfaces. A suction ring is removably coupled to the bottom surface of the interface. The interface is positioned over an operative area of an eye, such that the suction ring comes into proximate contact with the surface of the eye. A suction is applied to the suction ring to stabilize the position of the interface relative to the operative area of the eye. An applanation lens is positioned in proximate contact with the operative area of the eye. Finally, the applanation lens is coupled to the interface to stabilize the position of the lens relative to the operative area of the eye.

摘要翻译： 公开了一种用于压平角膜的前表面并将眼睛联接到手术激光的方法。 提供了一个具有中心孔和顶部和底部表面的界面。 吸入环可拆卸地联接到界面的底表面。 界面定位在眼睛的操作区域上方，使得吸入环与眼睛的表面接近接触。 吸力被施加到吸入环，以稳定界面相对于眼睛的操作区域的位置。 压平透镜被定位成与眼睛的操作区域紧密接触。 最后，扁平透镜耦合到界面以稳定透镜相对于眼睛的操作区域的位置。