Pellicle and mask adhesive agent for use in same
    1.
    发明授权
    Pellicle and mask adhesive agent for use in same 有权
    防护薄膜和面膜粘合剂用于其中

    公开(公告)号:US08945799B2

    公开(公告)日:2015-02-03

    申请号:US13805460

    申请日:2011-06-29

    Abstract: A pellicle which has a mask adhesive layer that can be plastic-deformed readily particularly at a temperature at which exposure to light is carried out, rarely provides a residue of an adhesive agent upon the removal of the mask adhesive layer from a mask and has good handling properties, and which can prevent the position gap of a pattern. The pellicle comprises a pellicle frame, a pellicle membrane and a mask adhesive layer containing a mask adhesive agent. The mask adhesive agent comprises 100 parts by mass of a thermoplastic elastomer (A) having a tan δ peak temperature of −20 to 30 DEG C and 20 to 150 parts by mass of an adhesiveness-imparting resin (B).

    Abstract translation: 具有掩模粘合剂层的防护薄膜,特别是在进行曝光的温度下易于塑性变形,在从掩模上去除掩模粘合剂层时很少提供粘合剂残留物,并且具有良好的 处理性能,并且可以防止图案的位置间隙。 防护薄膜组件包括防护薄膜框架,防护薄膜和含有掩模粘合剂的掩模粘合剂层。 掩模粘合剂包含100质量份tanδ峰值温度为-20〜30℃的热塑性弹性体(A)和20〜150质量份粘合性赋予树脂(B)。

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