公开(公告)号：US12125695B2

公开(公告)日：2024-10-22

申请号：US17795775

申请日：2021-01-26

Applicant: Cymer, LLC

Inventor： Thomas Dickson Steiger

IPC: H01S3/036 ,  F16C19/06 ,  F16C35/04 ,  H01J61/02 ,  H01J61/16 ,  H01J61/30 ,  H01J61/52 ,  H01S3/225

CPC classification number: H01J61/30 ,  F16C19/06 ,  F16C35/04 ,  H01J61/025 ,  H01J61/16 ,  H01J61/52 ,  H01S3/036 ,  H01S3/225

Abstract: A light source apparatus (100) includes: a chamber (101) having a chamber wall (103) defining an opening (107); and a support apparatus (110) including a support device (111) positioned within the opening of the chamber wall. The support device includes: a cup (112) having an inner surface (114) configured to retain a movable apparatus and an outer surface (116) having a first outer diameter; and a plurality of rods (118) arranged at the outer surface of the cup such that the arrangement of the plurality of rods defines a second outer diameter, the second outer diameter greater than the first outer diameter. The chamber wall is configured to hold the support device such that the chamber wall contacts the plurality of rods when the support device is positioned within the opening of the chamber wall, and the outer surface of the cup does not contact the chamber wall.

公开(公告)号：US09972484B2

公开(公告)日：2018-05-15

申请号：US15519095

申请日：2015-10-07

Applicant: NovStream LLC

Inventor： Vitaly Vladimirovich Lazorin ,  Anatoly Isaakovich Pipko ,  Nikolay Igorevich Skripkin

IPC: H01J61/52 ,  H01J65/04 ,  H01J61/30 ,  H01J61/36

CPC classification number: H01J65/044 ,  H01J61/30 ,  H01J61/34 ,  H01J61/36 ,  H01J61/52

Abstract: The present disclosure describes a plasma illumination device with microwave pumping, comprising: a hermetically sealed casing, a magnetron, a microwave resonator containing a rotatable electrodeless plasma lamp, a coaxial coupling line running parallel to the casing axis, for transmitting microwave power from the magnetron to the microwave resonator, at least one heat sink located on the inner walls of the casing and providing heat transfer through the casing to the external environment, and a light-transmitting hermetically sealed hollow cylinder fitted in a hermetically sealed way on the casing above the microwave resonator. This results in an illumination device with microwave pumping, which may be used to illuminate objects located in unfavorable environmental conditions, particularly those in which there is a high content of dust or other contaminants, or in an aqueous environment at great depths.

公开(公告)号：US09666424B1

公开(公告)日：2017-05-30

申请号：US15044103

申请日：2016-02-15

Applicant: Peter Veloz ,  Ashish Mathur ,  Aleksandr Shostak ,  Richard Hayes ,  David Witham ,  Mitch Babkes ,  Filiberto Betancourt ,  Lev Rotkop ,  Stuart Tyrrell ,  Walt Maclay ,  Dan Brown

Inventor： Peter Veloz ,  Ashish Mathur ,  Aleksandr Shostak ,  Richard Hayes ,  David Witham ,  Mitch Babkes ,  Filiberto Betancourt ,  Lev Rotkop ,  Stuart Tyrrell ,  Walt Maclay ,  Dan Brown

IPC: A61L2/10 ,  A61L9/20 ,  H05K7/20 ,  H01J61/52 ,  H04W4/00

CPC classification number: H01J61/52 ,  A61L2/10 ,  A61L9/20 ,  H04W4/80

Abstract: This invention employs a programmable logic controller (computer) with a specific wireless communication protocol (BLE) to allow for remote connectivity of the germicidal UV device to display the status of the disinfection cycle and to operate the device and send and transfer data wirelessly to the Cloud via the BLE interface.

公开(公告)号：US20170117131A1

公开(公告)日：2017-04-27

申请号：US15317965

申请日：2015-07-06

Applicant: NORDSON CORPORATION

Inventor： James M. KHOURY

IPC: H01J65/04 ,  H01R4/04 ,  H05B41/36 ,  H01R13/15 ,  H01J61/52 ,  H01J61/56

CPC classification number: H01J65/042 ,  H01J61/52 ,  H01J61/56 ,  H01J65/044 ,  H01R4/04 ,  H01R13/05 ,  H01R13/15 ,  H05B41/36

Abstract: A UV system for irradiating a substrate includes a RF source capable of generating RF energy, a UV lamp capable of emitting UV energy when excited by the RF energy generated by the RF source, and a monitor coupled to the RF source. The monitor includes data relating to the RF source. The UV system further includes a controller capable of communication with the monitor, and the controller determines if the RF source is suitable for operation with the UV system based on the data of the monitor and/or the end of its useful life.

公开(公告)号：US09516733B1

公开(公告)日：2016-12-06

申请号：US14814636

申请日：2015-07-31

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Gildardo R. Delgado

IPC: H01J1/02 ,  H05H1/24 ,  H01J61/09 ,  H01J23/033

CPC classification number: H05H1/24 ,  H01J1/025 ,  H01J23/033 ,  H01J61/09 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54 ,  H01J61/545 ,  H01J65/042

Abstract: A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location.

Abstract translation: 一种通过将至少一个激光引入气体体积并点燃产生光的等离子体来产生激光持续等离子体光的方法。 从等离子体中除去气体体积的加热部分并冷却。 气体体积的冷却部分以层流返回到等离子体。 光被反射器收集并提供到期望的位置。

公开(公告)号：US20160064204A1

公开(公告)日：2016-03-03

申请号：US14843939

申请日：2015-09-02

Applicant: iUNU, LLC

Inventor： Adam Phillip Takla Greenberg ,  Kyle Terrence James Rooney ,  Travis Anthony Conrad

IPC: H01J65/04 ,  H05B37/02 ,  A01G7/04 ,  H01J61/52

CPC classification number: H01J65/042 ,  A01G7/045 ,  H01J61/52 ,  H05B37/0227 ,  H05B37/0245 ,  H05B41/24 ,  H05B41/2806 ,  Y02P60/146

Abstract: The user of plasma light technology and remote lighting control techniques may enable a single master controller to control a large number of lighting fixtures. Multiple lighting fixtures may be equipped with control applications. Each control application may control the radio frequency driver of a lighting fixture that drives the plasma bulbs of the lighting fixture to produce light output for growing plants. The master controlled may execute on one or more computing devices. The master controller may send input instructions to the control applications of the lighting fixtures via a network. The instructions may be implemented by the control applications to command the radio frequency drivers to regulate a spectral distribution and/or intensity of the light output of the lighting fixtures.

Abstract translation: 等离子体光技术和远程照明控制技术的用户可以使单个主控制器能够控制大量的照明装置。 多个照明灯具可能配备有控制应用。 每个控制应用可以控制驱动照明器具的等离子体灯泡的照明器具的射频驱动器以产生用于生长植物的光输出。 被控制的主机可以在一个或多个计算设备上执行。 主控制器可以通过网络向照明灯具的控制应用发送输入指令。 指令可以由控制应用来实现，以指示射频驱动器调节照明器具的光输出的光谱分布和/或强度。

公开(公告)号：US09197869B2

公开(公告)日：2015-11-24

申请号：US13920233

申请日：2013-06-18

Applicant: Sony Corporation

Inventor： Yoshiro Asano

IPC: G03B21/16 ,  H04N9/31 ,  F28F1/00 ,  G06F1/20 ,  H01J61/02 ,  H01J61/52

CPC classification number: H04N9/3144 ,  F28F1/00 ,  G03B21/16 ,  G06F1/206 ,  H01J61/025 ,  H01J61/52 ,  H04N9/3105

Abstract: A video display device includes: a video processing unit including a light source and optical components, which generates and displaying video signals; and a cooling mechanism unit cooling the light source and the optical components, wherein the cooling mechanism unit includes an air cooling fan generating cooling air for cooling the optical components to be circulated in the device, a heat exchanger arranged in a flow path of the circulating cooling air, performing heat exchange of the cooling air obtained after the cooling of the optical components from a high temperature to a low temperature, a cooler cooling heat generated in the light source and heat generated in the heat exchanger by a cooling liquid, and a circulating thermal regulator circulating the cooling liquid with respect to the cooler while managing a liquid temperature of the cooling liquid so as to be a constant temperature.

Abstract translation: 视频显示装置包括：视频处理单元，包括产生和显示视频信号的光源和光学部件; 以及冷却所述光源和所述光学部件的冷却机构部，其中，所述冷却机构部包括：空气冷却风扇，其产生用于冷却所述装置中要循环的光学部件的冷却空气;布置在所述循环的流路中的热交换器 冷却空气，在将光学部件从高温冷却到低温后获得的冷却空气进行热交换，在光源中产生的较冷的冷却热和通过冷却液在热交换器中产生的热量，以及 循环热调节器将冷却液相对于冷却器循环，同时管理冷却液的液体温度，使其为恒定温度。

公开(公告)号：US09046748B2

公开(公告)日：2015-06-02

申请号：US13579456

申请日：2011-02-18

Applicant: John-john Pieter Jan Van Den Bergh ,  Ludo Valère Maurice Schreel ,  Stijn Lenni Robbert De Vijlder ,  Kristin Annemie Dirk Gysels ,  Jasper Cuyvers

Inventor： John-john Pieter Jan Van Den Bergh ,  Ludo Valère Maurice Schreel ,  Stijn Lenni Robbert De Vijlder ,  Kristin Annemie Dirk Gysels ,  Jasper Cuyvers

IPC: G03B21/18 ,  G03B21/16 ,  H01J61/52

CPC classification number: G03B21/16 ,  H01J61/52

Abstract: The invention describes a method of cooling a lamp (1) in a projector (2, 2′) independently of an orientation (Pdesk, Pceiling) of the projector (2, 2′), which method comprises directing a cooling airflow (4) symmetrically at a burner (10) of the lamp (1) during operation of the lamp (1); and controlling the cooling airflow (4) alternately between at least a first cooling level (C-I) and a second cooling level (C-II) such that, during cooling at the first cooling level (C-I), the temperature (Tbase) in a base region of the burner (10) drops below a predefined minimum operating temperature (Tmin) to allow a blackening of an inside wall (100) of the burner (10), and during cooling at the second cooling level (C-II), the temperature (Ttop) in an upper region of the burner (10) increases above a predefined maximum operating temperature (Tmax) and the temperature (Tbase) in the base region of the burner (10) increases above the predefined minimum operating temperature (Tmin) to facilitate a cleaning of the burner wall (100). The invention further describes a cooling module controller (31) for use in an orientation-independent cooling arrangement (30) of a projector (2, 2′); an orientation-independent cooling arrangement (30) for cooling a lamp (1) in a projector (2, 2′) independently of an orientation (Pdesk, Pceiling) of the projector (2, 2′); and a projector (2, 2′).

Abstract translation: 本发明描述了一种与投影仪（2,2'）的方位（Pdesk，Pceiling）独立的方式来冷却投影仪（2,2'）中的灯（1）的方法，该方法包括引导冷却气流（4） 在灯（1）的操作期间对称地在灯（1）的燃烧器（10）处; 并且在至少第一冷却水平（CI）和第二冷却水平（C-II）之间交替地控制冷却空气流（4），使得在第一冷却水平（CI）的冷却期间，在 燃烧器（10）的基部区域下降到预定的最小工作温度（Tmin）以下，以允许燃烧器（10）的内壁（100）变黑，并且在第二冷却水平（C-II）的冷却期间， 燃烧器（10）的上部区域中的温度（Ttop）增加到高于预定的最大工作温度（Tmax）并且燃烧器（10）的基部区域中的温度（T base）增加到超过预定的最小工作温度（Tmin ）以便于清洁燃烧器壁（100）。 本发明还描述了一种用于投影仪（2,2'）的朝向不依赖的冷却装置（30）的冷却模块控制器（31）。 独立于投影仪（2,2'）的方位（Pdesk，Pceiling）的用于冷却投影仪（2,2'）中的灯（1）的取向独立冷却装置（30）; 和投影仪（2,2'）。

公开(公告)号：US20140333203A1

公开(公告)日：2014-11-13

申请号：US14364849

申请日：2012-12-04

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： Georg Greuel ,  Thomas Juestel ,  Helga Bettentrup ,  Benjamin Herden ,  David Enseling

IPC: H01J61/52 ,  C09K11/77 ,  H01J61/44 ,  G01J1/42 ,  H01J17/49 ,  H01J17/28

CPC classification number: H01J61/52 ,  C09K11/7706 ,  C09K11/7709 ,  C09K11/7712 ,  C09K11/7737 ,  C09K11/774 ,  C09K2211/182 ,  C09K2211/183 ,  G01J1/42 ,  H01J11/12 ,  H01J11/42 ,  H01J17/28 ,  H01J17/49 ,  H01J61/44 ,  H01J65/042 ,  H01J65/046

Abstract: The invention provides a lighting unit (100) comprising (1) a vacuum ultraviolet (VUV) radiation based source of radiation (10) configured to generate VUV radiation (11), and (2) a luminescent material (20) configured to convert at least part of the VUV radiation into visible luminescent material light (21), wherein the luminescent material comprises a trivalent praseodymium containing material selected from the group consisting of (Zr1-x-yHfxPry)(Si1-yPy)04, (Zr1-x-yHfxPry)3((P1-3/4yS3/4y)04)4, and (Zr1-x-yHxPry)3((B1-3/4yX3/4y))O3)4, with x in the range of 0.0-1.0 and y being larger than 0 and being equal to or smaller than 0.15.

Abstract translation: 本发明提供了一种照明单元（100），包括：（1）被配置为产生VUV辐射（11）的基于真空紫外（VUV）辐射的辐射源（10），以及（2）配置成在 将所述VUV辐射的至少一部分转化为可见光发光材料光（21），其中所述发光材料包含选自（Zr1-x-yHfxPry）（Si1-yPy）04，（Zr1-x- yHfxPry）3（（P1-3 / 4yS3 / 4y）04）4和（Zr1-x-yHxPry）3（（B1-3 / 4yX3 / 4y））O3）4，x在0.0-1.0 并且y大于0并且等于或小于0.15。

公开(公告)号：US08796652B2

公开(公告)日：2014-08-05

申请号：US13790084

申请日：2013-03-08

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Alan Panzer

IPC: H05G2/00

CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

Abstract translation: 晶片检查系统包括激光持续等离子体（LSP）光源，其产生具有足够辐射度的光以实现明场检查。 通过将一定量的水引入到含有产生等离子体的气体混合物的灯泡中来提高LSP光源的可靠性。 由等离子体产生的辐射包括在低于约190纳米的波长范围内的实质辐射，这导致用于构建灯泡的材料的损坏。 水蒸汽作为在等离子体产生的辐射的吸收体，在波长范围内引起损伤。 在一些实例中，将预定量的水引入灯泡以提供足够的吸收。 在一些其它实施例中，调节包含一定量冷凝水的灯泡的一部分的温度以产生灯泡中期望的水分压。