公开(公告)号：US20170199463A1

公开(公告)日：2017-07-13

申请号：US15326207

申请日：2015-07-09

申请人： USHIO DENKI KABUSHIKI KAISHA

发明人： Tatsushi OWADA ,  Shinji SUZUKI

IPC分类号： G03F7/20 ,  H01J61/16 ,  H01J61/90 ,  H01L21/027 ,  H05B41/34

CPC分类号： G03F7/2004 ,  G03F7/0002 ,  G03F7/165 ,  G03F7/168 ,  G03F7/70016 ,  G03F7/70041 ,  G03F7/7015 ,  G03F7/7035 ,  G03F7/70466 ,  G03F7/70933 ,  H01J61/16 ,  H01J61/368 ,  H01J61/545 ,  H01J61/86 ,  H01J61/90 ,  H01L21/0274 ,  H01S3/225 ,  H01S3/2253 ,  H01S3/2255 ,  H05B41/34

摘要： Disclosed herein a vacuum ultra violet light source device that is capable of suppressing an amount of ozone generation when the vacuum ultra violet light is emitted into an atmosphere containing oxygen, a light irradiation device incorporating the vacuum ultra violet light device, and a method of patterning a self-assembled monolayer employing the light irradiation device. The light irradiation device is configured to irradiate a self-assembled monolayer (SAM) formed on a workpiece with light containing vacuum ultra violet light through a mask M on which a prescribed pattern is formed so as to perform a patterning process of the SAM. The light containing the vacuum ultra violet light to be irradiated onto the SAM is light that is pulsed light and has a duty ratio of light emission equal to or greater than 0.00001 and equal to or less than 0.01.

公开(公告)号：US09526158B1

公开(公告)日：2016-12-20

申请号：US14814622

申请日：2015-07-31

申请人： KLA-Tencor Corporation

发明人： Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Gildardo R. Delgado

IPC分类号： H02J1/02 ,  H05H1/24 ,  H01J61/09 ,  H01J1/02 ,  H01J23/033

CPC分类号： H05H1/24 ,  H01J1/025 ,  H01J23/033 ,  H01J61/09 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54 ,  H01J61/545 ,  H01J65/042

摘要： A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.

摘要翻译： 一种激光持续等离子体光源，其具有包含在电池内的气体体积的电池。 至少一个激光器被引导到气体体积中，用于维持等离子体产生光的气体体积内的等离子体。 提供了用于在层流中连续地向等离子体提供气体体积的装置。 反射器收集光并将光提供到期望的位置。

公开(公告)号：US20160360600A1

公开(公告)日：2016-12-08

申请号：US15168634

申请日：2016-05-31

申请人： SEIKO EPSON CORPORATION

发明人： Shun SATO ,  Junichi SUZUKI ,  Satoshi KITO

IPC分类号： H05B41/288 ,  G03B21/00 ,  H04N9/31 ,  H01J61/02 ,  H01J61/54 ,  H01J61/073 ,  H05B41/392 ,  G03B21/20

CPC分类号： H05B41/2887 ,  G03B21/006 ,  G03B21/2026 ,  G03B21/2053 ,  H01J61/025 ,  H01J61/073 ,  H01J61/545 ,  H04N9/3105 ,  H04N9/3197 ,  H05B41/2883 ,  H05B41/392

摘要： A discharge lamp driving device according to one aspect of the invention includes a discharge lamp driving section configured to supply a driving current to a discharge lamp including electrodes and a control section configured to control the discharge lamp driving section. The control section controls the discharge lamp driving section such that a mixed period is provided in which a first period in which an alternating current having a first frequency is supplied to the discharge lamp and a second period in which a direct current is supplied to the discharge lamp are alternately repeated. The first frequency includes a plurality of frequencies different from one another. The control section temporally changes the length of the first period.

摘要翻译： 根据本发明的一个方面的放电灯驱动装置包括：放电灯驱动部，被配置为向包括电极的放电灯提供驱动电流;以及控制部，被配置为控制放电灯驱动部。 控制部分控制放电灯驱动部分，使得提供混合周期，其中将具有第一频率的交流电被提供给放电灯的第一周期和向放电灯提供直流电流的第二周期 灯交替重复。 第一频率包括彼此不同的多个频率。 控制部分暂时改变第一周期的长度。

公开(公告)号：US20140239795A1

公开(公告)日：2014-08-28

申请号：US14151166

申请日：2014-01-09

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： WOOK-RAE KIM ,  Hashimoto Kohei ,  Won-Don Joo ,  Kwang-Soo Kim ,  Byeong-Hwan Jeon ,  Sue-Jin Cho

IPC分类号： H01J61/02

CPC分类号： H01J61/025 ,  G03F7/70016 ,  G03F7/70175 ,  H01J61/545 ,  H01J61/86 ,  H01J65/042

摘要： Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.

摘要翻译： 提供一种光源装置和包括该光源装置的半导体制造装置。 光源装置包括发光灯。 光源装置包括：激光发生器，被配置为产生并将激光束定向到发光灯。 光源装置包括被配置为将激光束重定向到发光灯的再循环光学元件。 回收光学元件包括被配置为改变激光束的相位的第一再循环光学调制器。

公开(公告)号：US20130329204A1

公开(公告)日：2013-12-12

申请号：US13902285

申请日：2013-05-24

申请人： ASML Netherlands B.V.

发明人： Henricus Petrus Maria PELLEMANS ,  Pavel Stanislavovich ANTSIFEROV ,  Vladimir Mihailovitch KRIVTSUN ,  Johannes Matheus Marie DE WIT ,  Ralph Jozef Johannes Gerardus Anna Maria SMEETS ,  Gerbrand VAN DER ZOUW

IPC分类号： H05H1/24 ,  G03F7/20

CPC分类号： H05H1/24 ,  G01N21/956 ,  G01N2201/061 ,  G03F7/20 ,  G03F7/70033 ,  G03F7/70483 ,  G03F7/70616 ,  G03F7/70641 ,  H01J61/02 ,  H01J61/54 ,  H01J61/545 ,  H01J65/04 ,  H05B41/38 ,  H05G2/003 ,  H05G2/008

摘要： A laser driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a container containing a gas (e.g., Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. Plasma has an elongate form (L>d) and collecting optics is configured to collect photons emerging in the longitudinal direction from the plasma. The brightness of the plasma is increased compared with sources which collect radiation emerging transversely from the plasma. A metrology apparatus using the light source can achieve greater accuracy and/or throughput as a result of the increased brightness. Back reflectors may be provided. Microwave radiation may be used instead of laser radiation to form the plasma.

公开(公告)号：US20120119637A1

公开(公告)日：2012-05-17

申请号：US12947500

申请日：2010-11-16

申请人： Lei Deng

发明人： Lei Deng

IPC分类号： H01J61/52 ,  H01K1/26

CPC分类号： F21V7/00 ,  H01J61/025 ,  H01J61/34 ,  H01J61/54 ,  H01J61/545 ,  H01J61/827

摘要： A light assembly includes a metal halide light source having an arc tube with first and second legs extending from a discharge chamber. A light transmissive capsule surrounds the light source. A reflector is received in the capsule and has a large diameter, annular first portion that receives light from the discharge chamber and is dimensioned to operatively engage an inner surface of the capsule to mount the reflector assembly and light source relative to the capsule. In addition, a small diameter portion of the reflector assembly is received around the first leg. By electrically interconnecting the reflector with the second electrode assembly, namely the support leg, and positioning the small diameter portion closer to the first electrode assembly than the dimension between the electrode terminal ends allows the reflector to also serve as an ignition aid. The reflector is formed of a material that serves as a heat shield for the seal glass in the first leg and also serves as a heat shield for the capsule seal region.

摘要翻译： 一种灯组件包括具有电弧管的金属卤化物光源，第一和第二支柱从放电室延伸。 透光胶囊围绕光源。 反射器被容纳在胶囊中并且具有大直径的环形第一部分，其接收来自排出室的光并且尺寸设计成可操作地接合胶囊的内表面以相对于胶囊安装反射器组件和光源。 此外，反射器组件的小直径部分被接收在第一支腿周围。 通过将反射器与第二电极组件（即支撑腿）电互连，并且将小直径部分定位成比电极端部端部之间的尺寸更靠近第一电极组件，允许反射器也用作点火助燃剂。 反射器由用作第一腿部中的密封玻璃的隔热罩的材料形成，并且还用作胶囊密封区域的隔热罩。

公开(公告)号：US07663318B2

公开(公告)日：2010-02-16

申请号：US11901532

申请日：2007-09-18

申请人： William D Koenigsberg ,  Adam Scotch ,  Walter P Lapatovich ,  Victor Perez

发明人： William D Koenigsberg ,  Adam Scotch ,  Walter P Lapatovich ,  Victor Perez

IPC分类号： H01J61/54 ,  H01J17/30

CPC分类号： H01J61/545 ,  H01J61/82

摘要： The restrike time for re-light up of an arc discharge lamp may be decreased by including at least one refractory bimetallic start up electrode that provides a shorter arc path intermediate the main arc path in a cool state, but when heated withdraws to have a relatively longer arc path. The longer arc path in the hot state results in a relatively higher path impedance that can be used by itself or in combination with a supplemental impedance device to extinguish the starting arc in favor of the main arc. The withdrawn bimetallic starting electrode then does not interfere with the main arc function.

摘要翻译： 可以通过包括至少一个难熔双金属启动电极来降低电弧放电灯重新点亮的重启时间，该耐火双金属启动电极在冷却状态下在主电弧路径之间提供较短的电弧路径，但是当加热时， 较长的弧径。 在热状态下的较长的电弧路径导致相对较高的路径阻抗，其可以自身使用或与补充阻抗装置组合以消除起弧电弧以有利于主电弧。 撤出的双金属起始电极不会干扰主电弧功能。

公开(公告)号：US20090072740A1

公开(公告)日：2009-03-19

申请号：US11901532

申请日：2007-09-18

申请人： William D. Koenigsberg ,  Adam Scotch ,  Walter P. Lapatovich ,  Victor Perez

发明人： William D. Koenigsberg ,  Adam Scotch ,  Walter P. Lapatovich ,  Victor Perez

IPC分类号： H01J61/54

CPC分类号： H01J61/545 ,  H01J61/82

摘要： The restrike time for re-light up of an arc discharge lamp may be decreased by including at least one refractory bimetallic start up electrode that provides a shorter arc path intermediate the main arc path in a cool state, but when heated withdraws to have a relatively longer arc path. The longer arc path in the hot state results in a relatively higher path impedance that can be used by itself or in combination with a supplemental impedance device to extinguish the starting arc in favor of the main arc. The withdrawn bimetallic starting electrode then does not interfere with the main arc function.

摘要翻译： 可以通过包括至少一个难熔双金属启动电极来降低电弧放电灯重新点亮的重启时间，该耐火双金属启动电极在冷却状态下在主电弧路径之间提供较短的电弧路径，但是当加热时， 较长的弧径。 在热状态下的较长的电弧路径导致相对较高的路径阻抗，其可以自身使用或与补充阻抗装置组合以消除起弧电弧以有利于主电弧。 撤出的双金属起始电极不会干扰主电弧功能。

公开(公告)号：US07358677B2

公开(公告)日：2008-04-15

申请号：US10566964

申请日：2004-07-20

申请人： Herman Johannes Gertrudis Gielen

发明人： Herman Johannes Gertrudis Gielen

IPC分类号： H01Q1/26 ,  H01J17/04 ,  H01J17/20

CPC分类号： H01J61/72 ,  H01J61/0672 ,  H01J61/0675 ,  H01J61/0677 ,  H01J61/54 ,  H01J61/542 ,  H01J61/545

摘要： Low-pressure mercury vapor discharge lamp has a discharge vessel (10) enclosing, in a gastight manner, a discharge space (13) provided with a filling of mercury and an inert gas in a gastight manner. The discharge vessel comprising electrodes (20a; 20b) arranged in the discharge space for maintaining a discharge in the discharge space. According to the invention, the probability of failure of the low-pressure mercury vapor discharge lamp being substantially determined by one of the electrodes. As upon igniting the low-pressure mercury vapor discharge lamp the ignition-related events influence the electrodes, preferably, the ignition-related events substantially are prevented affecting the one electrode.

摘要翻译： 低压汞蒸汽放电灯具有以气密方式包围以气密方式设置有汞和惰性气体填充物的放电空间（13）的放电容器（10）。 放电容器包括布置在放电空间中用于保持放电空间中的放电的电极（20A; 20b）。 根据本发明，低压汞蒸气放电灯的故障概率基本由电极之一确定。 在点燃低压汞蒸气放电灯时，点火相关事件影响电极，优选地，防止点火相关事件影响一个电极。

公开(公告)号：US20060290267A1

公开(公告)日：2006-12-28

申请号：US11407703

申请日：2006-04-20

申请人： Ki-Woong Whang ,  Ju-Kwang Lee

发明人： Ki-Woong Whang ,  Ju-Kwang Lee

IPC分类号： H01J1/62

CPC分类号： C09K11/7797 ,  C09K11/595 ,  C09K11/7734 ,  G09G3/2022 ,  G09G3/293 ,  G09G3/294 ,  G09G3/2983 ,  G09G3/2986 ,  H01J61/305 ,  H01J61/545 ,  H01J65/04

摘要： Disclosed are a new Mercury-free flat light source structure capable of enhancing and adjusting brightness, maintaining stable and uniform discharge, and improving luminous efficiency, and a large flat light source apparatus using the same Mercury-free flat light source structure as a unit cell capable of adjusting the brightness and causing local discharges in selected areas, and a driving method thereof. The flat light source structure according to the present invention includes an upper substrate made of a light transmitting material; a lower substrate separated from the upper substrate by a distance; a barrier rib for maintaining the distance, thereby defining a discharge space filled with a discharge gas with a predetermined pressure; a phosphor coated on at least one of the inner surfaces of the upper substrate and the lower substrate, respectively; a pair of main electrodes disposed at predetermined positions on the surface of the upper or lower substrate and applied with a predetermined driving voltage, frequency and duty ratio to excite the phosphor by plasma generated due to electric field induced in the discharge space; an auxiliary electrode formed at a predetermined position on the lower and/or upper substrate(s) to have a parallel component which is parallel with any one of the main electrodes when viewing the discharge space from the upper substrate and a perpendicular component which traverses the electrodes across the pair of main electrodes.

摘要翻译： 公开了一种能够增强和调节亮度，保持稳定均匀放电并提高发光效率的新型无汞平板光源结构，以及使用相同的无汞平板光源结构作为单位电池的大型平面光源装置 能够调整亮度并导致选定区域的局部放电及其驱动方法。 根据本发明的平面光源结构包括由透光材料制成的上基板; 下基板与上基板分离一段距离; 用于保持距离的隔壁，从而限定了填充有预定压力的排出气体的放电空间; 分别涂覆在上基板和下基板的至少一个内表面上的荧光体; 一对主电极设置在上基板或下基板的表面上的预定位置，并施加预定的驱动电压，频率和占空比以通过由放电空间中引起的电场产生的等离子体激发荧光体; 形成在下基板和/或上基板上的预定位置处的辅助电极，以在从上基板观察放电空间时观察平行部件，该平行部件与主电极中的任何一个平行，并且横向穿过该基板的垂直部件 电极穿过该对主电极。