公开(公告)号：US20130329204A1

公开(公告)日：2013-12-12

申请号：US13902285

申请日：2013-05-24

申请人： ASML Netherlands B.V.

发明人： Henricus Petrus Maria PELLEMANS ,  Pavel Stanislavovich ANTSIFEROV ,  Vladimir Mihailovitch KRIVTSUN ,  Johannes Matheus Marie DE WIT ,  Ralph Jozef Johannes Gerardus Anna Maria SMEETS ,  Gerbrand VAN DER ZOUW

IPC分类号： H05H1/24 ,  G03F7/20

CPC分类号： H05H1/24 ,  G01N21/956 ,  G01N2201/061 ,  G03F7/20 ,  G03F7/70033 ,  G03F7/70483 ,  G03F7/70616 ,  G03F7/70641 ,  H01J61/02 ,  H01J61/54 ,  H01J61/545 ,  H01J65/04 ,  H05B41/38 ,  H05G2/003 ,  H05G2/008

摘要： A laser driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a container containing a gas (e.g., Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. Plasma has an elongate form (L>d) and collecting optics is configured to collect photons emerging in the longitudinal direction from the plasma. The brightness of the plasma is increased compared with sources which collect radiation emerging transversely from the plasma. A metrology apparatus using the light source can achieve greater accuracy and/or throughput as a result of the increased brightness. Back reflectors may be provided. Microwave radiation may be used instead of laser radiation to form the plasma.

公开(公告)号：US20150108373A1

公开(公告)日：2015-04-23

申请号：US14548734

申请日：2014-11-20

申请人： ASML Netherlands B.V.

发明人： Henricus Petrus Maria PELLEMANS ,  Pavel Stanislavovich ANTSIFEROV ,  Vladimir Mihailovitch KRIVTSUN ,  Johannes Matheus Marie DE WIT ,  Ralph Jozef Johannes Gerardus Anna Maria SMEETS ,  Gerbrand VAN DER ZOUW

IPC分类号： H05H1/24 ,  G01N21/956 ,  G03F7/20

CPC分类号： H05H1/24 ,  G01N21/956 ,  G01N2201/061 ,  G03F7/20 ,  G03F7/70033 ,  G03F7/70483 ,  G03F7/70616 ,  G03F7/70641 ,  H01J61/02 ,  H01J61/54 ,  H01J61/545 ,  H01J65/04 ,  H05B41/38 ,  H05G2/003 ,  H05G2/008

摘要： A laser driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a container containing a gas (e.g., Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. Plasma has an elongate form (L>d) and collecting optics is configured to collect photons emerging in the longitudinal direction from the plasma. The brightness of the plasma is increased compared with sources which collect radiation emerging transversely from the plasma. A metrology apparatus using the light source can achieve greater accuracy and/or throughput as a result of the increased brightness. Back reflectors may be provided. Microwave radiation may be used instead of laser radiation to form the plasma.

摘要翻译： 激光驱动光源包括激光和聚焦光学元件。 这些产生聚焦在容纳气体（例如Xe）的容器内的等离子体形成区域上的辐射束。 收集光学器件收集由激光辐射维持的等离子体发射的光子以形成输出辐射束。 等离子体具有细长形式（L> d），并且收集光学器件被配置为收集从等离子体沿纵向出现的光子。 与收集从等离子体横向辐射的辐射的源相比，等离子体的亮度增加。 使用光源的计量装置可以由于亮度的增加而获得更高的精度和/或吞吐量。 可以提供背反射器。 可以使用微波辐射代替激光辐射以形成等离子体。