Invention Grant
- Patent Title: Laser-sustained plasma light source
- Patent Title (中): 激光持续等离子体光源
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Application No.: US14814622Application Date: 2015-07-31
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Publication No.: US09526158B1Publication Date: 2016-12-20
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Yanming Zhao , Gildardo R. Delgado
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- Main IPC: H02J1/02
- IPC: H02J1/02 ; H05H1/24 ; H01J61/09 ; H01J1/02 ; H01J23/033
Abstract:
A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.
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