Invention Grant
- Patent Title: Reducing fretting corrosion in a gas discharge chamber support device
-
Application No.: US17795775Application Date: 2021-01-26
-
Publication No.: US12125695B2Publication Date: 2024-10-22
- Inventor: Thomas Dickson Steiger
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- International Application: PCT/US2021/015114 2021.01.26
- International Announcement: WO2021/167760A 2021.08.26
- Date entered country: 2022-07-27
- Main IPC: H01S3/036
- IPC: H01S3/036 ; F16C19/06 ; F16C35/04 ; H01J61/02 ; H01J61/16 ; H01J61/30 ; H01J61/52 ; H01S3/225

Abstract:
A light source apparatus (100) includes: a chamber (101) having a chamber wall (103) defining an opening (107); and a support apparatus (110) including a support device (111) positioned within the opening of the chamber wall. The support device includes: a cup (112) having an inner surface (114) configured to retain a movable apparatus and an outer surface (116) having a first outer diameter; and a plurality of rods (118) arranged at the outer surface of the cup such that the arrangement of the plurality of rods defines a second outer diameter, the second outer diameter greater than the first outer diameter. The chamber wall is configured to hold the support device such that the chamber wall contacts the plurality of rods when the support device is positioned within the opening of the chamber wall, and the outer surface of the cup does not contact the chamber wall.
Public/Granted literature
- US20230087803A1 REDUCING FRETTING CORROSION IN A GAS DISCHARGE CHAMBER SUPPORT DEVICE Public/Granted day:2023-03-23
Information query