公开(公告)号：US08796652B2

公开(公告)日：2014-08-05

申请号：US13790084

申请日：2013-03-08

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Alan Panzer

IPC: H05G2/00

CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

Abstract translation: 晶片检查系统包括激光持续等离子体（LSP）光源，其产生具有足够辐射度的光以实现明场检查。 通过将一定量的水引入到含有产生等离子体的气体混合物的灯泡中来提高LSP光源的可靠性。 由等离子体产生的辐射包括在低于约190纳米的波长范围内的实质辐射，这导致用于构建灯泡的材料的损坏。 水蒸汽作为在等离子体产生的辐射的吸收体，在波长范围内引起损伤。 在一些实例中，将预定量的水引入灯泡以提供足够的吸收。 在一些其它实施例中，调节包含一定量冷凝水的灯泡的一部分的温度以产生灯泡中期望的水分压。

公开(公告)号：US20140042336A1

公开(公告)日：2014-02-13

申请号：US13790084

申请日：2013-03-08

Applicant: KLA-TENCOR CORPORATION

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Alan Panzer

IPC: H01J61/02

CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

Abstract translation: 晶片检查系统包括激光持续等离子体（LSP）光源，其产生具有足够辐射度的光以实现明场检查。 通过将一定量的水引入到含有产生等离子体的气体混合物的灯泡中来提高LSP光源的可靠性。 由等离子体产生的辐射包括在低于约190纳米的波长范围内的实质辐射，这导致用于构建灯泡的材料的损坏。 水蒸汽作为在等离子体产生的辐射的吸收体，在波长范围内引起损伤。 在一些实例中，将预定量的水引入灯泡以提供足够的吸收。 在一些其它实施例中，调节包含一定量冷凝水的灯泡的一部分的温度以产生灯泡中期望的水分压。