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    Substrate processing including correction for deposition location
    1.
    发明授权
    Substrate processing including correction for deposition location 有权
    基板处理包括对沉积位置的校正

    公开(公告)号：US08882917B1

    公开(公告)日：2014-11-11

    申请号：US12651172

    申请日：2009-12-31

    申请人： Jeremy Cheng ,  Ho Yin Owen Fong ,  Dan Wang ,  Zhendong Hong ,  Indranil De

    发明人： Jeremy Cheng ,  Ho Yin Owen Fong ,  Dan Wang ,  Zhendong Hong ,  Indranil De

    IPC分类号： C23C16/00 ,  C23C14/54

    CPC分类号： G05B19/402 ,  B01J19/0046 ,  B01J2219/00326 ,  B01J2219/0043 ,  B01J2219/00443 ,  B01J2219/00536 ,  B01J2219/00612 ,  B01J2219/00689 ,  B01J2219/00693 ,  B01J2219/00695 ,  C23C14/042 ,  C23C14/505 ,  C23C14/54 ,  G05B2219/45031

    摘要： Substrate processing including correction for deposition location is described, including a combinatorial processing chamber that incorporates the correction. The combinatorial processing chamber can be used to process multiple regions of a substrate using different processing parameters on different regions. For example, one region can have one material deposited on it and another region can have a different material deposited on it, although other combinations and variations are possible. The combinatorial processing chamber uses a rotating and revolving substrate pedestal to be able to deposit on all locations or positions on a substrate. The combinatorial processing chamber uses a correction factor that accounts for variations in alignment and/or configuration of the processing chamber so that the actual location of deposition of a region is approximately the same as a desired location of deposition.

    摘要翻译： 描述包括用于沉积位置的校正的衬底处理，包括结合了校正的组合处理室。 组合处理室可用于在不同区域上使用不同的处理参数处理衬底的多个区域。 例如，一个区域可以具有沉积在其上的一个材料，而另一个区域可以具有沉积在其上的不同材料，尽管其它组合和变化是可能的。 组合处理室使用旋转和旋转的基板基座能够沉积在基板上的所有位置或位置上。 组合处理室使用考虑处理室的对准和/或配置变化的校正因子，使得区域的实际沉积位置与期望的沉积位置大致相同。

    Multi-well rotary synthesizer
    5.
    发明申请
    Multi-well rotary synthesizer 有权
    多孔旋转合成器

    公开(公告)号：US20090263289A1

    公开(公告)日：2009-10-22

    申请号：US12154880

    申请日：2008-05-27

    申请人： Gary R. McLuen ,  Richard J. Hanney ,  Daniel W. Hugens

    发明人： Gary R. McLuen ,  Richard J. Hanney ,  Daniel W. Hugens

    IPC分类号： B01L9/00

    CPC分类号： B01J19/00 ,  B01J19/0046 ,  B01J2219/00286 ,  B01J2219/00308 ,  B01J2219/00326 ,  B01J2219/00351 ,  B01J2219/00353 ,  B01J2219/00423 ,  B01J2219/00585 ,  B01J2219/0059 ,  B01J2219/00596 ,  B01J2219/00689 ,  B01J2219/0072 ,  C40B60/14 ,  G01N35/025 ,  Y10T436/11 ,  Y10T436/111666 ,  Y10T436/113332 ,  Y10T436/114165 ,  Y10T436/114998 ,  Y10T436/25375 ,  Y10T436/255 ,  Y10T436/25625 ,  Y10T436/2575

    摘要： An apparatus for synthesizing polymer chains includes a controller, a plurality of precision fit vials circularly arranged in multiple banks on a cartridge, a drain corresponding to each bank of vials, a chamber bowl, a plurality of valves for delivering reagents to selective vials, and a waste tube system for purging material from the vials. A purging operation can be selectively performed on one or more of the banks of vials. The multiple banks of valves provide an additional number of reagent choices while operating in a serial mode and faster reagent distribution while operating in a parallel mode. The plurality of vials are stored in the cartridge and are divided among individual banks wherein each bank of vials has a corresponding drain. There is at least one waste tube system for expelling the reagent solution from vials within a particular bank of vials when the waste tube system is coupled to the corresponding drain. The cartridge holding the plurality of vials rotates relative to the stationary banks of valves and the waste tube system. The controller rotates the cartridge and operates the banks of valves and the waste tube system in response to the required sequence of dispensing various reagent solutions and flushing appropriate vials in order to form the desired polymer chain within each vial.

    摘要翻译： 一种用于合成聚合物链的装置包括一个控制器，多个精确配合的小瓶，圆形布置在药筒上的多个组中，对应于每一组小瓶的排水口，室碗，用于将试剂输送到选择性小瓶的多个阀以及 用于从小瓶中清除材料的废物管系统。 清洗操作可以选择性地在一个或多个小瓶组上执行。 当以并行模式运行时，多组阀门在串行模式下运行，并提供更快的试剂分配，可提供额外的试剂选择。 多个小瓶被存储在盒中并且被划分成各个组，其中每一组小瓶具有相应的排水管。 当废物管系统耦合到相应的排水管时，存在至少一个废物管系统，用于将试剂溶液从小瓶中的小瓶中排出。 保持多个小瓶的盒相对于静止的阀组和废物管系统旋转。 响应于分配各种试剂溶液所需的顺序并且冲洗合适的小瓶以便在每个小瓶中形成所需的聚合物链，控制器旋转墨盒并操作阀组和废液管系统。