Electrostatic puck and method of manufacture

    公开(公告)号:US12046502B2

    公开(公告)日:2024-07-23

    申请号:US16565054

    申请日:2019-09-09

    IPC分类号: H01L21/683

    CPC分类号: H01L21/6833

    摘要: A method of constructing an E-puck includes forming at least one trench into a lower substrate, depositing an electrode material onto the lower substrate and into the at least one trench, removing excess electrode material from the lower substrate to leave the electrode material within the at least one trench to form an electrode, and forming a dielectric on the lower substrate and the electrode. The electrode is between the lower substrate and the upper substrate. Forming the at least one trench into the lower substrate forms at least one standoff portion adjacent to the at least one trench and the at least one standoff portion reduces dishing of the electrode material during removal of the excess electrode material from the lower substrate.

    Fiber optic probe with dual sealing and compression element

    公开(公告)号:US12044581B2

    公开(公告)日:2024-07-23

    申请号:US17833030

    申请日:2022-06-06

    发明人: John Bergen

    IPC分类号: G01K11/32 G01K1/143 G01K1/20

    CPC分类号: G01K11/32 G01K1/143 G01K1/20

    摘要: Temperature sensing probes for sensing the temperature of a substrate based on fluorescence are disclosed. The temperature sensing probes include a fiber optic cable having at a cold end an optical interface and at a hot end a temperature sensing element for contacting a substrate. A sheath surrounds at least a portion of the hot end of the fiber optic cable. A retaining member securely and removably engages the sheath with a support member. The sheath forms a vacuum seal around the contact between the temperature sensing element and the substrate.

    System and method for a closed-loop bake-out control

    公开(公告)号:US11950328B2

    公开(公告)日:2024-04-02

    申请号:US16568757

    申请日:2019-09-12

    IPC分类号: H05B1/00 H05B1/02

    CPC分类号: H05B1/0288

    摘要: A control system for operating a heater includes a controller configured to determine an operational power level based on a measured performance characteristic of the heater, a power set-point, and a power control algorithm, determine a bake-out power level based on a measured leakage current at the heater, a leakage current threshold, and a moisture control algorithm, and select a power level to be applied to the heater. The selected power level is the lower power level from among the operational power level and the bake-out power level.

    Continuous helical baffle heat exchanger

    公开(公告)号:US11920878B2

    公开(公告)日:2024-03-05

    申请号:US17954447

    申请日:2022-09-28

    摘要: A heater includes a flow guide and electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis and defines perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid. The first longitudinal length is less than a full longitudinal length of the geometric helicoid. The electrical resistance heating elements extend through the perforations. For each electrical resistance heating element, a length of that electrical resistance heating element and a pitch of the geometric helicoid at a distal end of that electrical resistance heating element are such that the distal end of that electrical resistance heating element is a distance X from the geometric helicoid at the distal end of that electrical resistance heating element. The distance X is less than or equal to 40% of the pitch at the distal end of that electrical resistance heating element.