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公开(公告)号：US11343879B2
公开(公告)日：2022-05-24
申请号：US16196820
申请日：2018-11-20
发明人： Kevin Ptasienski , Stanton Hopkins Breitlow , Mohammad Nosrati , Kevin Smith , Brittany Phillips , Ken Ames , Patrick Margavio , Kurt English
IPC分类号： H05B3/28 , H05B3/06 , H01L23/48 , H01L23/52 , F27B5/14 , H05B1/02 , H01L21/67 , H01L23/522 , H01L23/485 , C23C16/458 , H01L21/687
摘要： A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.
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公开(公告)号：US11382180B2
公开(公告)日：2022-07-05
申请号：US16196699
申请日：2018-11-20
发明人： Kevin Ptasienski , Stanton Hopkins Breitlow , Mohammad Nosrati , Kevin Smith , Brittany Phillips , Ken Ames , Patrick Margavio , Kurt English
IPC分类号： H05B3/06 , H05B3/28 , H05B1/02 , H01L21/67 , H01L23/522 , H01L23/485 , C23C16/458 , H01L21/687
摘要： The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.
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公开(公告)号：US10908196B2
公开(公告)日：2021-02-02
申请号：US16401937
申请日：2019-05-02
发明人： Stanton Hopkins Breitlow , James Hentges , William Bohlinger , Matthew Yender , Keith Ness , Kurt Peterson , Eric Meech , Brittany Phillips , Larry Walters , Geoffrey Rozek
IPC分类号： H05B1/02 , G01R19/22 , F24D11/02 , G01R19/165 , H01L21/67 , G01R19/257
摘要： The present disclosure is directed toward a control system for controlling a heater that includes at least one heating element. The control system includes a power converter operable to supply an adjustable voltage output to the heater, a sensor circuit that measures an electrical characteristic of the heating element of the heater, a reference temperature sensor that measures a reference temperature of a reference at the heater, and a controller. The controller is configured to calculate a primary temperature of a heater element based on the electrical characteristic and determines the voltage output to be applied to the heater based on at least one of the reference temperature and the primary temperature. The controller is configured to operate in at least one of an operation mode and a learn mode, and execute protection protocols when voltage is being supplied to the heater.
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公开(公告)号：US10908195B2
公开(公告)日：2021-02-02
申请号：US16100585
申请日：2018-08-10
发明人： Stanton Hopkins Breitlow , James Hentges , William Bohlinger , Matthew Yender , Keith Ness , Kurt Peterson , Eric Meech , Brittany Phillips , Larry Walters , Geoffrey Rozek
IPC分类号： H05B1/02 , G01R19/22 , F24D11/02 , G01R19/165 , H01L21/67 , G01R19/257
摘要： A control system for controlling a heater includes a power converter, a sensor circuit, and a controller. The power converter supplies an adjustable power to the heater, and the sensor circuit is configured to measure an electrical characteristic of the heater. The controller is coupled to the power converter to control the power to the heater, and is configured to select a state model control, as an operation state of the heater, from among a plurality of defined state model controls. The controller controls the power supplied to the heater based on the operation state of the heater and on the electrical characteristics of the heater.
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公开(公告)号：US10448458B2
公开(公告)日：2019-10-15
申请号：US15790301
申请日：2017-10-23
发明人： Jeremy Ohse , Jake Spooler , Phillip S. Schmidt , Patrick Margavio , Melissa Lanham , Paul Valachovic , Brittany Phillips , Mark Denis Everly
摘要： A heater includes at least one resistive element. The at least one resistive element includes a material having a high temperature coefficient of resistance (TCR) such that the resistive element functions as a heater and as a temperature sensor, the resistive element being a material selected from the group consisting of greater than about 95% nickel, a nickel copper alloy, stainless steel, a molybdenum-nickel alloy, niobium, a nickel-iron alloy, tantalum, zirconium, tungsten, molybdenum, Nisil, and titanium. In one form, the heater is a tubular heater with compacted MgO insulation and a metal sheath.
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公开(公告)号：US20180124870A1
公开(公告)日：2018-05-03
申请号：US15790301
申请日：2017-10-23
发明人： Jeremy Ohse , Jake Spooler , Phillip S. Schmidt , Patrick Margavio , Melissa Lanham , Paul Valachovic , Brittany Phillips , Mark Denis Everly
摘要： A heater includes at least one resistive element. The at least one resistive element includes a material having a high temperature coefficient of resistance (TCR) such that the resistive element functions as a heater and as a temperature sensor, the resistive element being a material selected from the group consisting of greater than about 95% nickel, a nickel copper alloy, stainless steel, a molybdenum-nickel alloy, niobium, a nickel-iron alloy, tantalum, zirconium, tungsten, molybdenum, Nisil, and titanium. In one form, the heater is a tubular heater with compacted MgO insulation and a metal sheath.
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公开(公告)号：US12127310B2
公开(公告)日：2024-10-22
申请号：US17696486
申请日：2022-03-16
发明人： Kevin Ptasienski , Stanton Hopkins Breitlow , Mohammad Nosrati , Kevin Smith , Brittany Phillips , Ken Ames , Patrick Margavio , Kurt English
IPC分类号： H05B3/28 , C23C16/458 , F27B5/14 , H01L21/67 , H01L21/687 , H01L23/48 , H01L23/485 , H01L23/52 , H01L23/522 , H05B1/02 , H05B3/06
CPC分类号： H05B3/06 , C23C16/4586 , H01L21/67103 , H01L21/67109 , H01L21/67248 , H01L21/68735 , H01L21/68757 , H01L23/485 , H01L23/522 , H05B1/0202 , H05B1/0233 , H05B3/28 , H05B2203/005 , H05B2203/007 , H05B2203/014 , H05B2203/016 , H05B2203/035
摘要： A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.
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公开(公告)号：US11895741B2
公开(公告)日：2024-02-06
申请号：US17832890
申请日：2022-06-06
发明人： Kevin Ptasienski , Stanton Hopkins Breitlow , Mohammad Nosrati , Kevin Smith , Brittany Phillips , Ken Ames , Patrick Margavio , Kurt English
IPC分类号： H05B3/06 , H05B3/28 , H05B1/02 , H01L21/67 , H01L23/522 , H01L23/485 , C23C16/458 , H01L21/687
CPC分类号： H05B3/06 , C23C16/4586 , H01L21/67103 , H01L21/67109 , H01L21/67248 , H01L21/68735 , H01L21/68757 , H01L23/485 , H01L23/522 , H05B1/0202 , H05B1/0233 , H05B3/28 , H05B2203/005 , H05B2203/007 , H05B2203/014 , H05B2203/016 , H05B2203/035
摘要： A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.
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公开(公告)号：US11622421B2
公开(公告)日：2023-04-04
申请号：US16600742
申请日：2019-10-14
发明人： Jeremy Ohse , Jake Spooler , Philip S. Schmidt , Patrick Margavio , Melissa Lanham , Paul Valachovic , Brittany Phillips , Mark Denis Everly
摘要： A heater system is provided. The system includes a resistive element with a temperature coefficient of resistance (TCR) of at least about 1,000 ppm such that the resistive element functions as a heater and as a temperature sensor and the resistive element is a material having greater than about 95% nickel. The system also includes a heater control module including a two-wire controller with a power control module that is configured to periodically compare a measured resistance value of the resistive element against a reference temperature to adjust for resistance drift over time during operation such that a temperature drift of the resistive element is less than about 1% over a temperature range of about 500° C.-1,000° C.
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