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公开(公告)号：US12100603B2
公开(公告)日：2024-09-24
申请号：US18096711
申请日：2023-01-13
发明人： Kevin Smith , Paul Valachovic
IPC分类号： H01L21/67 , H01L21/687
CPC分类号： H01L21/67103 , H01L21/67248 , H01L21/68785
摘要： A heater assembly includes a substrate, a plurality of resistive heating elements disposed along a perimeter of the substrate, and a common ground electrical lead connected to at least some of the plurality of resistive heating elements and having a portion extending along the perimeter of the substrate. The plurality of resistive heating elements are independently controllable to provide azimuthal temperature control of the heater assembly.
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公开(公告)号：US10448458B2
公开(公告)日：2019-10-15
申请号：US15790301
申请日：2017-10-23
发明人： Jeremy Ohse , Jake Spooler , Phillip S. Schmidt , Patrick Margavio , Melissa Lanham , Paul Valachovic , Brittany Phillips , Mark Denis Everly
摘要： A heater includes at least one resistive element. The at least one resistive element includes a material having a high temperature coefficient of resistance (TCR) such that the resistive element functions as a heater and as a temperature sensor, the resistive element being a material selected from the group consisting of greater than about 95% nickel, a nickel copper alloy, stainless steel, a molybdenum-nickel alloy, niobium, a nickel-iron alloy, tantalum, zirconium, tungsten, molybdenum, Nisil, and titanium. In one form, the heater is a tubular heater with compacted MgO insulation and a metal sheath.
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公开(公告)号：US20180124870A1
公开(公告)日：2018-05-03
申请号：US15790301
申请日：2017-10-23
发明人： Jeremy Ohse , Jake Spooler , Phillip S. Schmidt , Patrick Margavio , Melissa Lanham , Paul Valachovic , Brittany Phillips , Mark Denis Everly
摘要： A heater includes at least one resistive element. The at least one resistive element includes a material having a high temperature coefficient of resistance (TCR) such that the resistive element functions as a heater and as a temperature sensor, the resistive element being a material selected from the group consisting of greater than about 95% nickel, a nickel copper alloy, stainless steel, a molybdenum-nickel alloy, niobium, a nickel-iron alloy, tantalum, zirconium, tungsten, molybdenum, Nisil, and titanium. In one form, the heater is a tubular heater with compacted MgO insulation and a metal sheath.
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公开(公告)号：US11622421B2
公开(公告)日：2023-04-04
申请号：US16600742
申请日：2019-10-14
发明人： Jeremy Ohse , Jake Spooler , Philip S. Schmidt , Patrick Margavio , Melissa Lanham , Paul Valachovic , Brittany Phillips , Mark Denis Everly
摘要： A heater system is provided. The system includes a resistive element with a temperature coefficient of resistance (TCR) of at least about 1,000 ppm such that the resistive element functions as a heater and as a temperature sensor and the resistive element is a material having greater than about 95% nickel. The system also includes a heater control module including a two-wire controller with a power control module that is configured to periodically compare a measured resistance value of the resistive element against a reference temperature to adjust for resistance drift over time during operation such that a temperature drift of the resistive element is less than about 1% over a temperature range of about 500° C.-1,000° C.
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公开(公告)号：US11562913B2
公开(公告)日：2023-01-24
申请号：US16856634
申请日：2020-04-23
发明人： Kevin Smith , Paul Valachovic
IPC分类号： H01L21/67 , H01L21/687
摘要： A heater assembly and method of controlling the heater assembly is provided. The heater assembly includes a resistive heater and a substrate, and the resistive heater comprises a plurality of heating zones disposed along a perimeter of the substrate. Each of the plurality of heating zones are independently controllable such that azimuthal temperature control of the heater assembly is provided. The plurality of resistive heating elements may be connected in series and have a common ground electrical lead. In the alternative, the plurality of resistive heating elements may each have a ground electrical lead and be isolated from each other.
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