Long life fused silica ultraviolet optical elements
    8.
    发明授权
    Long life fused silica ultraviolet optical elements 有权
    长寿命熔融石英紫外线光学元件

    公开(公告)号:US6058739A

    公开(公告)日:2000-05-09

    申请号:US183220

    申请日:1998-10-29

    摘要: The present invention provides a process for substantially extending the useful life of fused silica elements used in high energy ultraviolet optical systems. The fused silica bulk material is pre-compacted by illuminating it with radiation prior to final mechanical fabrication and polishing to the required final surface figure. When the optical element is subsequently used in a high energy ultraviolet environment, it will continue to be compacted but at a lower effective rate. As a result, the useful life of fused silica optical elements can be increased substantially.In preferred embodiments the fused silica material is precompacted with multiple passes of short-pulse ultraviolet radiation. Multiple passes can reduce precompaction time. In one example useful life of the fused silica is increased from about 150 days to 3.8 years by about 5 days of precompaction.

    摘要翻译: 本发明提供了用于大量延长在高能紫外光学系统中使用的熔融二氧化硅元件的使用寿命的方法。 熔融二氧化硅本体材料通过在最终机械制造和抛光到所需的最终表面图之前用辐射照射来预先压实。 当光学元件随后在高能量紫外线环境中使用时,它将继续被压实,但是在较低的有效速率下。 结果,能够大幅提高熔融石英光学元件的使用寿命。 在优选的实施方案中,熔融二氧化硅材料预先压制多次短脉冲紫外线辐射。 多次通过可以减少预压缩时间。 在一个实例中,熔融二氧化硅的使用寿命从约150天增加到3.8年,约5天的预压实。

    Laser discharge chamber passivation by plasma
    9.
    发明授权
    Laser discharge chamber passivation by plasma 有权
    激光放电室通过等离子体钝化

    公开(公告)号:US06644324B1

    公开(公告)日:2003-11-11

    申请号:US09518970

    申请日:2000-03-06

    IPC分类号: B08B704

    摘要: Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen containing gases. The oxygen based plasma is drawn into the laser discharge chamber, where it reacts with contaminants and cleans internal surfaces. After cleaning, a fluorine based plasma is formed in the plasma source and drawn into the laser discharge chamber to passivate internal surfaces. In another embodiment, cleaning with the oxygen based plasma is not used since some level of cleaning is accomplished with the fluorine based plasma. In another embodiment, oxygen based plasmas and fluorine based plasmas are formed in the laser discharge chamber by applying a radiofrequency signal to a laser discharge chamber electrode. Plasma cleaning and passivation of laser discharge chambers is safer, more efficient, and more effective than conventional thermal cleaning and passivation processes.

    摘要翻译: 提供了用等离子体清洗和钝化激光放电室的方法和装置。 在一个实施例中,通过对含氧气体施加射频信号,在激光放电室外部的等离子体源中形成氧基等离子体。 氧基等离子体被吸入激光放电室,在其中与污染物反应并清洗内表面。 在清洁之后,在等离子体源中形成氟基等离子体并被吸入激光放电室以钝化内表面。 在另一个实施例中,不使用基于氧的等离子体的清洁,因为用氟基等离子体进行一些清洁水平。 在另一个实施例中,通过向激光放电室电极施加射频信号,在激光放电室中形成氧基等离子体和基于氟的等离子体。 激光放电室的等离子体清洁和钝化比传统的热清洗和钝化工艺更安全,更有效,更有效。

    Laser discharge chamber passivation by plasma
    10.
    发明授权
    Laser discharge chamber passivation by plasma 失效
    激光放电室通过等离子体钝化

    公开(公告)号:US06914927B2

    公开(公告)日:2005-07-05

    申请号:US10649186

    申请日:2003-08-26

    摘要: Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen containing gases. The oxygen based plasma is drawn into the laser discharge chamber, where it reacts with contaminants and cleans internal surfaces. After cleaning, a fluorine based plasma is formed in the plasma source and drawn into the laser discharge chamber to passivate internal surfaces. In another embodiment, cleaning with the oxygen based plasma is not used since some level of cleaning is accomplished with the fluorine based plasma. In another embodiment, oxygen based plasmas and fluorine based plasmas are formed in the laser discharge chamber by applying a radiofrequency signal to a laser discharge chamber electrode. Plasma cleaning and passivation of laser discharge chambers is safer, more efficient, and more effective than conventional thermal cleaning and passivation processes.

    摘要翻译: 提供了用等离子体清洗和钝化激光放电室的方法和装置。 在一个实施例中,通过对含氧气体施加射频信号,在激光放电室外部的等离子体源中形成氧基等离子体。 氧基等离子体被吸入激光放电室,在其中与污染物反应并清洗内表面。 在清洁之后,在等离子体源中形成氟基等离子体并被吸入激光放电室以钝化内表面。 在另一个实施例中,不使用基于氧的等离子体的清洁,因为用氟基等离子体进行一些清洁水平。 在另一个实施例中,通过向激光放电室电极施加射频信号,在激光放电室中形成氧基等离子体和基于氟的等离子体。 激光放电室的等离子体清洁和钝化比传统的热清洗和钝化工艺更安全,更有效,更有效。