WIRING SUBSTRATE AND MANUFACTURING METHOD THEREFOR
    4.
    发明申请
    WIRING SUBSTRATE AND MANUFACTURING METHOD THEREFOR 有权
    接线基板及其制造方法

    公开(公告)号:US20150041990A1

    公开(公告)日:2015-02-12

    申请号:US14446621

    申请日:2014-07-30

    Abstract: A wiring substrate includes a semiconductor substrate, an insulator and a plurality of columnar conductors. The insulator is made of an insulating material filled in a groove or hole provided in the semiconductor substrate. The plurality of columnar conductors are filled in grooves or holes provided in the insulator. The grooves or holes are arranged at a narrow pitch in a plane of the insulator. The insulating material has a Si—O bond obtained by reacting Si particles with an organic Si compound.

    Abstract translation: 布线基板包括半导体基板,绝缘体和多个柱状导体。 绝缘体由填充在设置在半导体衬底中的沟槽或孔中的绝缘材料制成。 多个柱状导体填充在设置在绝缘体中的槽或孔中。 凹槽或孔在绝缘体的平面中以窄间距排列。 绝缘材料具有通过使Si颗粒与有机Si化合物反应而获得的Si-O键。

    Integrated circuit device
    7.
    发明授权
    Integrated circuit device 有权
    集成电路器件

    公开(公告)号:US09349720B2

    公开(公告)日:2016-05-24

    申请号:US14341956

    申请日:2014-07-28

    Abstract: An integrated circuit device includes a semiconductor substrate, an active element and a passive element. The active element is made of the semiconductor substrate. The passive element includes a functional element filled in a groove or hole provided in the semiconductor substrate along a thickness direction thereof and is electrically connected to the active element. The functional element has a Si—O bond region obtained by reacting Si particles with an organic Si compound.

    Abstract translation: 集成电路器件包括半导体衬底,有源元件和无源元件。 有源元件由半导体衬底制成。 无源元件包括填充在半导体衬底中沿其厚度方向设置的沟槽中的功能元件,并且电连接到有源元件。 功能元件具有通过使Si颗粒与有机Si化合物反应而获得的Si-O键区域。

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