公开(公告)号：US20240105810A1

公开(公告)日：2024-03-28

申请号：US17952161

申请日：2022-09-23

申请人： Intel Corporation

发明人： Rachel A. Steinhardt ,  Ian Alexander Young ,  Dmitri Evgenievich Nikonov ,  Marko Radosavljevic ,  Matthew V. Metz ,  John J. Plombon ,  Raseong Kim ,  Kevin P. O'Brien ,  Scott B. Clendenning ,  Tristan A. Tronic ,  Dominique A. Adams ,  Carly Rogan ,  Arnab Sen Gupta ,  Brandon Holybee ,  Punyashloka Debashis ,  I-Cheng Tung ,  Gauri Auluck

IPC分类号： H01L29/51 ,  H01L29/66 ,  H01L29/78

CPC分类号： H01L29/516 ,  H01L29/6684 ,  H01L29/66969 ,  H01L29/7831

摘要： In one embodiment, transistor device includes a first source or drain material on a substrate, a semiconductor material on the first source or drain material, a second source or drain material on the semiconductor material, a dielectric layer on the substrate and adjacent the first source or drain material, a ferroelectric (FE) material on the dielectric layer and adjacent the semiconductor material, and a gate material on or adjacent to the FE material. The FE material may be a perovskite material and may have a lattice parameter that is less than a lattice parameter of the semiconductor material.

公开(公告)号：US20240063071A1

公开(公告)日：2024-02-22

申请号：US17891880

申请日：2022-08-19

申请人： Intel Corporation

发明人： Jeffery Bielefeld ,  Adel Elsherbini ,  Bhaskar Jyoti Krishnatreya ,  Feras Eid ,  Gauri Auluck ,  Kimin Jun ,  Mohammad Enamul Kabir ,  Nagatoshi Tsunoda ,  Renata Camillo-Castillo ,  Tristan A. Tronic ,  Xavier Brun

IPC分类号： H01L23/31 ,  H01L25/065 ,  H01L23/00 ,  H01L23/367 ,  H01L23/498 ,  H01L21/48 ,  H01L21/56 ,  H01L25/00

CPC分类号： H01L23/3128 ,  H01L25/0655 ,  H01L24/08 ,  H01L23/367 ,  H01L23/49827 ,  H01L23/49838 ,  H01L21/4853 ,  H01L21/486 ,  H01L21/56 ,  H01L24/80 ,  H01L25/50 ,  H01L2224/08225 ,  H01L2224/80895 ,  H01L2224/80896

摘要： Multi-die composite structures including a multi-layered inorganic dielectric gap fill material within a space between adjacent IC dies. A first layer of fill material with an inorganic composition may be deposited over IC dies with a high-rate deposition process, for example to at least partially fill a space between the IC dies. The first layer of fill material may then be partially removed to modify a sidewall slope of the first layer or otherwise reduce an aspect ratio of the space between the IC dies. Another layer of fill material may be deposited over the lower layer of fill material, for example with the same high-rate deposition process. This dep-etch-dep cycle may be repeated any number of times to backfill spaces between IC dies. The multi-layer fill material may then be globally planarized and the IC die package completed and/or assembled into a next-level of integration.

公开(公告)号：US20240120415A1

公开(公告)日：2024-04-11

申请号：US17958362

申请日：2022-10-01

申请人： Intel Corporation

发明人： Scott B. Clendenning ,  Sudarat Lee ,  Kevin P. O'Brien ,  Rachel A. Steinhardt ,  John J. Plombon ,  Arnab Sen Gupta ,  Charles C. Mokhtarzadeh ,  Gauri Auluck ,  Tristan A. Tronic ,  Brandon Holybee ,  Matthew V. Metz ,  Dmitri Evgenievich Nikonov ,  Ian Alexander Young

IPC分类号： H01L29/778 ,  H01L21/02 ,  H01L29/06 ,  H01L29/66 ,  H01L29/78

CPC分类号： H01L29/778 ,  H01L21/02197 ,  H01L29/0665 ,  H01L29/66795 ,  H01L29/78391

摘要： Technologies for a field effect transistor (FET) with a ferroelectric gate dielectric are disclosed. In an illustrative embodiment, a perovskite stack is grown on a buffer layer as part of manufacturing a transistor. The perovskite stack includes one or more doped semiconductor layers alternating with other lattice-matched layers. Growing the doped semiconductor layers on lattice-matched layers can improve the quality of the doped semiconductor layers. The lattice-matched layers can be etched away, leaving the doped semiconductor layers as fins for a ribbon FET. A ferroelectric layer can be conformally grown on the fins, creating a high-quality ferroelectric layer above and below the fins. A gate can then be grown on the ferroelectric layer.

公开(公告)号：US20230395506A1

公开(公告)日：2023-12-07

申请号：US17833708

申请日：2022-06-06

申请人： Intel Corporation

发明人： Miriam Reshotko ,  Elijah Karpov ,  Mark Anders ,  Gauri Auluck ,  Shakuntala Sundararajan ,  Michael Makowski ,  Caleb Barrett

IPC分类号： H01L23/532 ,  H01L23/522 ,  H01L21/768

CPC分类号： H01L23/53238 ,  H01L23/5226 ,  H01L21/76843 ,  H01L21/76877 ,  H01L23/53266

摘要： Adjacent interconnect features are in staggered, vertically spaced positions, which accordingly reduces their capacitive coupling within a level of interconnect metallization. Adjacent interconnect features may comprise a plurality of first interconnect lines with spaces therebetween. A dielectric material is over the first interconnect lines and within the spaces between the first interconnect lines. Resultant topography in the dielectric material defines a plurality of trenches between the first interconnect lines. The adjacent interconnect features further comprise a plurality of second interconnect lines interdigitated with the first interconnect lines that occupy at least a portion of the trenches between individual ones of the first interconnect lines.

公开(公告)号：US20240113212A1

公开(公告)日：2024-04-04

申请号：US17956296

申请日：2022-09-29

申请人： Intel Corporation

发明人： Ian Alexander Young ,  Dmitri Evgenievich Nikonov ,  Marko Radosavljevic ,  Matthew V. Metz ,  John J. Plombon ,  Raseong Kim ,  Kevin P. O'Brien ,  Scott B. Clendenning ,  Tristan A. Tronic ,  Dominique A. Adams ,  Carly Rogan ,  Hai Li ,  Arnab Sen Gupta ,  Gauri Auluck ,  I-Cheng Tung ,  Brandon Holybee ,  Rachel A. Steinhardt ,  Punyashloka Debashis

IPC分类号： H01L29/775 ,  H01L21/02 ,  H01L21/465 ,  H01L29/06 ,  H01L29/24 ,  H01L29/423 ,  H01L29/49 ,  H01L29/66

CPC分类号： H01L29/775 ,  H01L21/02565 ,  H01L21/02603 ,  H01L21/465 ,  H01L29/0673 ,  H01L29/24 ,  H01L29/42392 ,  H01L29/4908 ,  H01L29/66969

摘要： Technologies for a field effect transistor (FET) with a ferroelectric gate dielectric are disclosed. In an illustrative embodiment, a perovskite stack is grown on a buffer layer as part of manufacturing a transistor. The perovskite stack includes one or more doped semiconductor layers alternating with other lattice-matched layers, such as undoped semiconductor layers. Growing the doped semiconductor layers on lattice-matched layers can improve the quality of the doped semiconductor layers. The lattice-matched layers can be preferentially etched away, leaving the doped semiconductor layers as fins for a ribbon FET. In another embodiment, an interlayer can be deposited on top of a semiconductor layer, and a ferroelectric layer can be deposited on the interlayer. The interlayer can bridge a gap in lattice parameters between the semiconductor layer and the ferroelectric layer.

公开(公告)号：US20240097031A1

公开(公告)日：2024-03-21

申请号：US17947071

申请日：2022-09-16

申请人： Intel Corporation

发明人： Punyashloka Debashis ,  Rachel A. Steinhardt ,  Brandon Holybee ,  Kevin P. O'Brien ,  Dmitri Evgenievich Nikonov ,  John J. Plombon ,  Ian Alexander Young ,  Raseong Kim ,  Carly Rogan ,  Dominique A. Adams ,  Arnab Sen Gupta ,  Marko Radosavljevic ,  Scott B. Clendenning ,  Gauri Auluck ,  Hai Li ,  Matthew V. Metz ,  Tristan A. Tronic ,  I-Cheng Tung

IPC分类号： H01L29/78 ,  H01L29/51

CPC分类号： H01L29/78391 ,  H01L29/516

摘要： In one embodiment, a transistor device includes a gate material layer on a substrate, a ferroelectric (FE) material layer on the gate material, a semiconductor channel material layer on the FE material layer, a first source/drain material on the FE material layer and adjacent the semiconductor channel material layer, and a second source/drain material on the FE material layer and adjacent the semiconductor channel material layer and on an opposite side of the semiconductor channel material layer from the first source/drain material. A first portion of the FE material layer is directly between the gate material and the first source/drain material, and a second portion of the FE material layer is directly between the gate material and the second source/drain material.