公开(公告)号：US20240222485A1

公开(公告)日：2024-07-04

申请号：US18091209

申请日：2022-12-29

Applicant: Intel Corporation

Inventor： Mahmut Sami Kavrik ,  Tristan Tronic ,  Chelsey Dorow ,  Kevin O?Brien ,  Uygar Avci ,  Carl H. Naylor ,  Chia-Ching Lin ,  Dominique Adams ,  Matthew Metz ,  Ande Kitamura ,  Scott B. Clendenning

IPC: H01L29/775 ,  H01L27/088 ,  H01L29/06 ,  H01L29/26 ,  H01L29/423 ,  H01L29/66

CPC classification number: H01L29/775 ,  H01L27/088 ,  H01L29/0673 ,  H01L29/26 ,  H01L29/42392 ,  H01L29/66969

Abstract: A transistor structure includes a stack of nanoribbons coupling source and drain terminals. The nanoribbons may each include a pair of crystalline interface layers and a channel layer between the interface layers. The channel layers may be a molecular monolayer, including a metal and a chalcogen, with a thickness of less than 1 nm. The channel layers may be substantially monocrystalline, and the interface layers may be lattice matched to the channel layers. The channel layers may be epitaxially grown over the lattice-matched interface layers. The crystalline interface layers may be grown over sacrificial layers when forming the stack of nanoribbons.

公开(公告)号：US20230284538A1

公开(公告)日：2023-09-07

申请号：US17685053

申请日：2022-03-02

Applicant: Intel Corporation

Inventor： Punyashloka Debashis ,  Chia-Ching Lin ,  Hai Li ,  Dmitri Evgenievich Nikonov ,  Ian Alexander Young

IPC: H01L43/06 ,  H01L27/22 ,  H01L43/14 ,  H01F10/32 ,  G11C11/18 ,  G11C11/16 ,  H03K19/18

CPC classification number: H01L43/06 ,  H01L27/228 ,  H01L43/14 ,  H01F10/3286 ,  H01F10/3268 ,  G11C11/18 ,  G11C11/1673 ,  G11C11/1675 ,  H03K19/18 ,  H01L43/10

Abstract: A spin orbit logic device includes: a first electrically conductive layer; a layer including a magnetoelectric material (ME layer) on the first electrically conductive layer; a layer including a ferromagnetic material with in-plane magnetic anisotropy (FM layer) on the ME layer; a second electrically conductive layer on the FM layer; a layer including a dielectric material on the second electrically conductive layer (coupling layer); a layer including a spin orbit coupling material (SOC layer) on the coupling layer; and a layer including a ferromagnetic material with perpendicular magnetic anisotropy (PMA layer) on the SOC layer.

公开(公告)号：US20230253475A1

公开(公告)日：2023-08-10

申请号：US18130334

申请日：2023-04-03

Applicant: Intel Corporation

Inventor： Tanay Gosavi ,  Chia-Ching Lin ,  Raseong Kim ,  Ashish Verma Penumatcha ,  Uygar Avci ,  Ian Young

IPC: H01L29/51 ,  H01L27/088 ,  H01L29/78 ,  H03H9/17 ,  H01L29/423

CPC classification number: H01L29/516 ,  H01L27/0886 ,  H01L29/7851 ,  H03H9/17 ,  H01L29/78391 ,  H01L29/42356

Abstract: Describe is a resonator that uses anti-ferroelectric (AFE) materials in the gate of a transistor as a dielectric. The use of AFE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, additional current drive is also achieved from the piezoelectric response generated to due to AFE material. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias' to body and dummy fins on the side. As such, a Bragg reflector is formed above or below the AFE based transistor. Increased drive signal from the AFE results in larger output signal and larger bandwidth.

公开(公告)号：US11696514B2

公开(公告)日：2023-07-04

申请号：US17565106

申请日：2021-12-29

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Benjamin Buford ,  Kaan Oguz ,  John J. Plombon ,  Ian A. Young

IPC: H10N50/85 ,  H10B61/00 ,  H10N50/80

CPC classification number: H10N50/85 ,  H10B61/22 ,  H10N50/80

Abstract: An apparatus is provided which comprises: a stack comprising a magnetoelectric (ME such as BiFeO3, (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, SmBiFeO3, Cr2O3, etc.) material and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, graphene, etc.); a magnet adjacent to a first portion of the TMD of the stack; a first interconnect adjacent to the magnet; a second interconnect adjacent to the ME material of the stack; and a third interconnect adjacent to a second portion of the TMD of the stack.

公开(公告)号：US20230077177A1

公开(公告)日：2023-03-09

申请号：US17469320

申请日：2021-09-08

Applicant: Intel Corporation

Inventor： Hai Li ,  Dmitri Evgenievich Nikonov ,  Chia-Ching Lin ,  Tanay A. Gosavi ,  Ian Alexander Young

IPC: H01L27/22 ,  H01L43/06 ,  H01L43/10 ,  H01L25/10

Abstract: A spin orbit logic (SOL) device includes a first electrically conductive layer; a layer comprising a ferroelectric material (FE layer) on the first electrically conductive layer; a second electrically conductive layer on the FE layer; and a spin orbit coupling (SOC) stack including a first layer (SOC1 layer) including a first SOC material, and a second layer (SOC2 layer) including a second SOC material, the SOC1 layer adjacent the FE layer.

公开(公告)号：US11532439B2

公开(公告)日：2022-12-20

申请号：US16296085

申请日：2019-03-07

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sou-Chi Chang ,  Nazila Haratipour ,  Seung Hoon Sung ,  Ashish Verma Penumatcha ,  Jack Kavalieros ,  Uygar E. Avci ,  Ian A. Young

IPC: G11C16/10 ,  H01G7/06 ,  G11C11/22 ,  H01L27/108 ,  H01L49/02

Abstract: Described is an ultra-dense ferroelectric memory. The memory is fabricated using a patterning method by that applies atomic layer deposition with selective dry and/or wet etch to increase memory density at a given via opening. A ferroelectric capacitor in one example comprises: a first structure (e.g., first electrode) comprising metal; a second structure (e.g., a second electrode) comprising metal; and a third structure comprising ferroelectric material, wherein the third structure is between and adjacent to the first and second structures, wherein a portion of the third structure is interdigitated with the first and second structures to increase surface area of the third structure. The increased surface area allows for higher memory density.

公开(公告)号：US20220352358A1

公开(公告)日：2022-11-03

申请号：US17833662

申请日：2022-06-06

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Sou-Chi Chang ,  Dmitri Nikonov ,  Ian A. Young

IPC: H01L29/66 ,  H01L29/82 ,  G11C11/16 ,  H01F10/32

Abstract: An apparatus is provided which comprises: a first stack comprising a magnetic insulating material (MI such as, EuS, EuO, YIG, TmIG, or GaMnAs) and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, or graphene; a second stack comprising an MI material and a TMD, wherein the first and second stacks are separated by an insulating material (e.g., oxide); a magnet (e.g., a ferromagnet or a paramagnet) adjacent to the TMDs of the first and second stacks, and also adjacent to the insulating material; and a magnetoelectric material (e.g., (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, or (SmBi)FeO3) adjacent to the magnet.

公开(公告)号：US20220199783A1

公开(公告)日：2022-06-23

申请号：US17133087

申请日：2020-12-23

Applicant: Intel Corporation

Inventor： Ashish Verma Penumatcha ,  Kevin O'Brien ,  Chelsey Dorow ,  Kirby Maxey ,  Carl Naylor ,  Tanay Gosavi ,  Sudarat Lee ,  Chia-Ching Lin ,  Seung Hoon Sung ,  Uygar Avci

IPC: H01L29/24 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L27/22 ,  H01L27/24

Abstract: A transistor includes a first channel layer over a second channel layer, where the first and the second channel layers include a monocrystalline transition metal dichalcogenide (TMD). The transistor structure further includes a source structure coupled to a first end of the first and second channel layers, a drain structure coupled to a second end of the first and second channel layers, a gate structure between the source material and the drain material, and between the first channel layer and the second channel layer. The transistor further includes a spacer laterally between the gate structure and the and the source structure and between the gate structure and the drain structure. A liner is between the spacer and the gate structure. The liner is in contact with the first channel layer and the second channel layer and extends between the gate structure and the respective source structure and the drain structure.

公开(公告)号：US20220115438A1

公开(公告)日：2022-04-14

申请号：US17070808

申请日：2020-10-14

Applicant: Intel Corporation

Inventor： Hai Li ,  Dmitri Nikonov ,  Chia-Ching Lin ,  Tanay Gosavi ,  Ian Young

IPC: H01L27/22 ,  H01F10/32

Abstract: A differential magnetoelectric spin-orbit (MESO) logic device is provided where two ports are used to connect the spin orbital module of the MESO device and a ferroelectric capacitor. In some examples, an insulating layer is added to decouple current paths.

公开(公告)号：US11245068B2

公开(公告)日：2022-02-08

申请号：US16009035

申请日：2018-06-14

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Benjamin Buford ,  Kaan Oguz ,  John J. Plombon ,  Ian A. Young

IPC: H01L43/10 ,  H01L43/02 ,  H01L27/22

Abstract: An apparatus is provided which comprises: a stack comprising a magnetoelectric (ME such as BiFeO3, (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, SmBiFeO3, Cr2O3, etc.) material and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, graphene, etc.); a magnet adjacent to a first portion of the TMD of the stack; a first interconnect adjacent to the magnet; a second interconnect adjacent to the ME material of the stack; and a third interconnect adjacent to a second portion of the TMD of the stack.