-
公开(公告)号：US20180194028A1
公开(公告)日：2018-07-12
申请号：US15400135
申请日：2017-01-06
CPC分类号： B26D1/225 , B26D1/0006 , B26D7/015 , B26D2001/0046 , B26D2001/0053 , B65H35/02
摘要： Disclosed are apparatuses and methods for cutting thin film solar cells. The apparatus may include circular knife cutter rollers, each having a knife edge and coupled with a cutter arbor, support rollers, each coupled to a support arbor and having first and second outer surfaces and a circumferential gap between the first and second outer surfaces partially defined by a first side, a second side facing and offset from the first side, a first rounded edge where the first side intersects with the first outer surface, and a second sharp edge where the second side intersects with the second outer surface. The cutter arbor and support arbor are offset, and the knife cutter rollers and support rollers are axially spaced, such that one knife edge is positioned in the gap of each support roller and the web may be fed between the cutter arbor and the support arbor.
-
公开(公告)号：US6086246A
公开(公告)日：2000-07-11
申请号：US85149
申请日：1998-05-26
CPC分类号： G01J5/041
摘要： A plasma resistant lightpipe is used in a pyrometric temperature measurement system to measure the temperature of a substrate in a reaction chamber. The plasma resistant lightpipe includes two lightpipe elements. The first lightpipe element, which may be a sapphire rod or aluminum nitride rod, is positioned within a backside gas delivery path to the chamber. The first lightpipe element is resistant to etching caused by reactive plasmas or gases used within the chamber, such as fluorine. The second lightpipe, which is a quartz rod, is positioned beneath the first lightpipe element such that the two lightpipe elements are optically coupled. The first lightpipe element may be directly mounted in the base plate or electrostatic chuck of the pedestal assembly or directly mounted in a plug, which is then positioned within the base plate or electrostatic chuck. The first lightpipe element is securely mounted into the base plate, electrostatic chuck, or the plug by shrink and/or interference fitting, by spring pins or set screws. In one embodiment, the interface between the first lightpipe element and the second lightpipe element is set in a plane defined by the top surface of the seal plate. Thus, there is little danger of damaging the lightpipe elements during the removal of the electrostatic chuck and base plate.
摘要翻译： 在高温测量系统中使用耐等离子体光管来测量反应室中的基底的温度。 耐等离子体光管包括两个光管元件。 可以是蓝宝石棒或氮化铝棒的第一光管元件位于到腔室的后侧气体输送路径内。 第一光管元件抵抗由室内使用的反应性等离子体或气体引起的蚀刻，例如氟。 作为石英棒的第二光管位于第一光管元件的下方，使得两个光管元件光学耦合。 第一光管元件可以直接安装在基座组件的基板或静电卡盘中，或者直接安装在插头中，然后定位在基板或静电卡盘内。 第一个光管元件通过弹簧销或固定螺钉通过收缩和/或干涉配合牢固地安装到基板，静电卡盘或插头中。 在一个实施例中，将第一光管元件和第二光管元件之间的界面设置在由密封板的顶表面限定的平面中。 因此，在去除静电卡盘和基板期间几乎没有损坏光管元件的危险。
-
公开(公告)号：US08099192B2
公开(公告)日：2012-01-17
申请号：US11935883
申请日：2007-11-06
IPC分类号： G05B19/18
CPC分类号： B25J9/1694 , G05B2219/37125 , Y10S414/115
摘要： A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to the pedestal assembly, a transfer robot having an end effector, and a processing chamber containing the pedestal assembly and light sensor. The method includes the steps of producing light within the processing chamber, moving the end effector over the optical input such that amount of light reaching the light sensor varies in relation to the position of the end effector, and recording the signal gain as the end effector is moved over the optical input. The method also includes the step of establishing from the recorded signal gain a desired position of the end effector relative to the pedestal assembly.
摘要翻译： 提供了一种用于教导与包括基座组件的工件处理系统一起使用的传送机器人的方法，具有固定地联接到基座组件的光学输入的光传感器，具有末端执行器的传送机器人和包含 基座组件和光传感器。 该方法包括以下步骤：在处理室内产生光，使端部执行器移动到光学输入端上，使得到达光传感器的光量相对于末端执行器的位置变化，并记录信号增益作为末端执行器 在光学输入端移动。 该方法还包括从记录的信号增益建立末端执行器相对于基座组件的期望位置的步骤。
-
公开(公告)号：US20180219509A1
公开(公告)日：2018-08-02
申请号：US15422355
申请日：2017-02-01
申请人： Robert Martinson , Cormac Wicklow , Jason Cheng , Arthur Cheung , Heinrich von Bunau , Darin S. Birtwhistle , Hyung Paek , Robert McClymond
发明人： Robert Martinson , Cormac Wicklow , Jason Cheng , Arthur Cheung , Heinrich von Bunau , Darin S. Birtwhistle , Hyung Paek , Robert McClymond
CPC分类号： H02S30/20 , H02S20/23 , H02S30/10 , H02S40/32 , H02S40/34 , H02S40/36 , Y02B10/12 , Y02B10/14
摘要： Disclosed are apparatuses and methods for an apparatus that has a flexible mounting substrate, one or more flexible photovoltaic modules attached to the flexible mounting substrate, one or more inverters attached to the flexible mounting substrate and electrically connected to the one or more flexible photovoltaic modules, a flexible electrical conduit electrically connected to the one or more inverters and to the one or more flexible photovoltaic modules, a plurality of mounting features, and a plurality of flexible connectors that extend between the flexible mounting substrate and one corresponding mounting feature, that is configured to be positioned above a structure and secured to the structure without penetrating roofing of the structure.
-
公开(公告)号：US09512516B1
公开(公告)日：2016-12-06
申请号：US12888963
申请日：2010-09-23
申请人： Robert Martinson , Paul Shufflebotham , Kevin Lynch , Heinrich von Bunau , Deborah Sloan , Daniel R. Juliano
发明人： Robert Martinson , Paul Shufflebotham , Kevin Lynch , Heinrich von Bunau , Deborah Sloan , Daniel R. Juliano
CPC分类号： H01J37/3417 , C23C14/0057 , C23C14/3407 , C23C14/35 , H01J37/3405 , H01J37/3429 , H01J37/3435 , H01J37/345 , H01J37/3497 , H01J2237/002 , H01J2237/332
摘要： A sputtering target assembly, including a cylindrical backing tube, a magnet assembly disposed within the backing tube, and a conduit disposed within the backing tube and adapted for transporting coolant. The conduit includes at least one first opening positioned for providing the coolant in a substantially circumferential direction from the conduit toward an inner surface of the backing tube into a gap volume between a front side of the magnet assembly and the inner surface of the backing tube.
摘要翻译： 包括圆柱形背衬管，设置在背衬管内的磁体组件和设置在背衬管内并适于运输冷却剂的导管的溅射靶组件。 导管包括至少一个第一开口，其定位成将冷却剂沿着从管道朝向背衬管的内表面的大致圆周方向提供到磁体组件的前侧和背衬管的内表面之间的间隙体积中。
-
6.发明授权Continuous web apparatus and method using an air to vacuum seal and accumulator 有权使用空气至真空密封和蓄能器的连续纸幅设备和方法公开(公告)号：US09303316B1
公开(公告)日：2016-04-05
申请号：US13006098
申请日：2011-01-13
CPC分类号： H01L31/1876 , B05C15/00 , C23C14/562 , C23C14/566 , C23C14/568 , F26B5/04 , F26B25/008 , H01L21/67742 , H01L21/67754 , H01L31/0322 , H01L31/0445 , H01L31/1884 , Y10S438/907
摘要： A deposition apparatus includes an input spool located in non-vacuum input module, at least one vacuum process module, an accumulator, and an air to vacuum sealing mechanism. The accumulator and the sealing mechanism are configured to continuously provide a web substrate from the input spool at atmosphere into the at least one process module at vacuum without stopping the web substrate.
摘要翻译： 沉积设备包括位于非真空输入模块中的输入卷轴，至少一个真空处理模块，蓄能器和空气至真空密封机构。 蓄能器和密封机构被构造成在大气压下连续地将输送卷筒从真空输送到至少一个处理模块中而不停止卷材基材。
-
7.发明授权Sputtering target including a feature to reduce chalcogen build up and arcing on a backing tube 有权溅射目标包括减少硫属元素在背衬管上积聚和起弧的特征公开(公告)号：US09255323B2
公开(公告)日：2016-02-09
申请号：US13525593
申请日：2012-06-18
申请人： Robert Martinson , Heinrich Von Bunau , Mark Campello , Ron Rulkens , Tom Heckel , Johannes Vlcek
发明人： Robert Martinson , Heinrich Von Bunau , Mark Campello , Ron Rulkens , Tom Heckel , Johannes Vlcek
IPC分类号： C23C14/34 , H01J37/34 , H01L31/18 , H01L31/032 , C23C14/06
CPC分类号： C23C14/3407 , C23C14/0623 , H01J37/3414 , H01J37/3423 , H01L31/0322 , H01L31/18 , Y02E10/541 , Y02P70/521
摘要： A sputtering target has a cylindrical backing tube having two edges and a sidewall comprising a middle portion located between two end portions. The sputtering material is on the backing tube. The sputtering material does not cover at least one end portion of the backing tube. The sputtering target also has a feature which prevents or reduces at least one of chalcogen buildup and arcing at the at least one end portion of the backing tube not covered by the sputtering material.
摘要翻译： 溅射靶具有具有两个边缘的圆柱形背衬管和包括位于两个端部之间的中间部分的侧壁。 溅射材料在背衬管上。 溅射材料不覆盖背衬管的至少一个端部。 溅射靶还具有防止或减少未被溅射材料覆盖的背衬管的至少一个端部处的硫属元素累积和电弧中的至少一种的特征。
-
8.发明申请Sputtering Target Including a Feature to Reduce Chalcogen Build Up and Arcing on a Backing Tube 有权包含特征的溅射目标，以减少硫属元素在支撑管上的积聚和电弧公开(公告)号：US20130337602A1
公开(公告)日：2013-12-19
申请号：US13525593
申请日：2012-06-18
申请人： Robert Martinson , Heinrich Von Bunau , Mark Campello , Ron Rulkens , Tom Heckel , Johannes Vlcek
发明人： Robert Martinson , Heinrich Von Bunau , Mark Campello , Ron Rulkens , Tom Heckel , Johannes Vlcek
CPC分类号： C23C14/3407 , C23C14/0623 , H01J37/3414 , H01J37/3423 , H01L31/0322 , H01L31/18 , Y02E10/541 , Y02P70/521
摘要： A sputtering target has a cylindrical backing tube having two edges and a sidewall comprising a middle portion located between two end portions. The sputtering material is on the backing tube. The sputtering material does not cover at least one end portion of the backing tube. The sputtering target also has a feature which prevents or reduces at least one of chalcogen buildup and arcing at the at least one end portion of the backing tube not covered by the sputtering material.
摘要翻译： 溅射靶具有具有两个边缘的圆柱形背衬管和包括位于两个端部之间的中间部分的侧壁。 溅射材料在背衬管上。 溅射材料不覆盖背衬管的至少一个端部。 溅射靶还具有防止或减少未被溅射材料覆盖的背衬管的至少一个端部处的硫属元素累积和电弧中的至少一种的特征。
-
公开(公告)号：US20090118862A1
公开(公告)日：2009-05-07
申请号：US11935883
申请日：2007-11-06
IPC分类号： G05B15/02
CPC分类号： B25J9/1694 , G05B2219/37125 , Y10S414/115
摘要： A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to the pedestal assembly, a transfer robot having an end effector, and a processing chamber containing the pedestal assembly and light sensor. The method includes the steps of producing light within the processing chamber, moving the end effector over the optical input such that amount of light reaching the light sensor varies in relation to the position of the end effector, and recording the signal gain as the end effector is moved over the optical input. The method also includes the step of establishing from the recorded signal gain a desired position of the end effector relative to the pedestal assembly.
摘要翻译： 提供了一种用于教导与包括基座组件的工件处理系统一起使用的传送机器人的方法，具有固定地联接到基座组件的光学输入的光传感器，具有末端执行器的传送机器人和包含 基座组件和光传感器。 该方法包括以下步骤：在处理室内产生光，使端部执行器移动到光学输入端上，使得到达光传感器的光量相对于末端执行器的位置变化，并记录信号增益作为末端执行器 在光学输入端移动。 该方法还包括从记录的信号增益建立末端执行器相对于基座组件的期望位置的步骤。
-
-
-
-
-
-
-
-
搜索结果
9 条记录 (耗时 0.019 秒)
