Tester and method for testing a rectifier-regulator
    1.
    发明授权
    Tester and method for testing a rectifier-regulator 失效
    测试仪和整流器调节器测试方法

    公开(公告)号:US5471135A

    公开(公告)日:1995-11-28

    申请号:US325970

    申请日:1994-10-20

    IPC分类号: G01R31/00 G01R31/40

    CPC分类号: G01R31/006 G01R31/40

    摘要: A tester and method for testing a rectifier-regulator. A ramping voltage generator generates a ramping input voltage during each of a multiplicity of ramping cycles in response to ramping voltage control signals provided by a controller. A relay circuit relays the ramping input voltage to one of the input terminals of the rectifier-regulator during each ramping cycle in response to relay control signals provided by the controller. The rectifier-regulator provides in response a ramping output voltage at its output terminal during each of the ramping cycles. A voltage measurement circuit makes voltage measurements during each of the ramping cycles representing the ramping output voltage. A trip point determination circuit determines when the trip point of the rectifier-regulator occurs during each of the ramping cycles and generates in response a trip point signal during each of the ramping cycles indicating that the trip point has occurred. A memory stores a predefined maximum trip point voltage and a predefined minimum trip point voltage. The controller estimates the trip point voltage for each ramping cycle in response to the trip point signal and the voltage measurements. It then compares the estimated trip point voltage for each of the ramping cycles with the stored predefined maximum and minimum voltages and generates a trip point error flag indicating that a trip point error has occurred for each of the ramping cycles where the compared trip point voltage does not fall within a range between the stored predefined maximum and minimum voltages.

    摘要翻译: 用于测试整流器稳压器的测试器和方法。 斜坡电压发生器响应于由控制器提供的斜坡电压控制信号,在多个斜坡周期的每一个期间产生斜坡输入电压。 继电器电路响应于由控制器提供的继电器控制信号,在每个斜坡周期期间将斜坡输入电压中继到整流器调节器的输入端之一。 整流器稳压器在每个斜坡周期期间响应于其输出端子处的斜坡输出电压。 电压测量电路在每个斜坡周期期间进行电压测量,表示斜坡输出电压。 跳闸点确定电路确定在每个斜坡周期期间何时发生整流器调节器的跳闸点,并响应于在每个斜坡周期期间产生跳闸点信号,指示出现跳闸点。 存储器存储预定义的最大跳变点电压和预定义的最小跳变点电压。 控制器根据跳变点信号和电压测量值估计每个斜坡周期的跳变点电压。 然后,将每个斜坡周期的估计跳变点电压与存储的预定义的最大和最小电压进行比较,并产生跳变点误差标志,指示针对比较的跳变点电压的每个斜坡周期发生跳变点误差 不在所存储的预定义的最大和最小电压之间的范围内。

    Filter circuit for a magnetron deposition source
    3.
    发明授权
    Filter circuit for a magnetron deposition source 有权
    用于磁控管沉积源的滤波电路

    公开(公告)号:US09103026B1

    公开(公告)日:2015-08-11

    申请号:US13277441

    申请日:2011-10-20

    IPC分类号: C23C14/34 C23C14/35 H01J37/34

    摘要: A magnetron sputtering system comprising a vacuum processing chamber having a chamber shield, a magnetron assembly, and a substrate, the magnetron assembly comprising a permanent magnetic assembly and an electromagnetic coil assembly, a first impedance circuit coupled between a power supply and the electromagnetic coil assembly, the first impedance circuit comprising a first resistor and a first capacitor, and a second impedance circuit having a second resistor and a second capacitor, and coupled between the substrate and a susceptor.

    摘要翻译: 一种磁控溅射系统,包括具有室屏蔽,磁控管组件和基板的真空处理室,所述磁控管组件包括永久磁组件和电磁线圈组件,第一阻抗电路耦合在电源和电磁线圈组件之间 所述第一阻抗电路包括第一电阻器和第一电容器,以及具有第二电阻器和第二电容器的第二阻抗电路,并且耦合在所述基板和基座之间。